[Scan]
initial_time=2016-01-18T22:23:35
final_time=2016-01-18T22:23:54
ip_count=19
run=1024
dataset=9
scan=716
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-7.56478E-1
ql1_imon=1.40437E-8
ql2_vset=
ql2_vmon=-7.3483E-1
ql2_imon=2.02371E-9
ql3_vset=
ql3_vmon=-9.19511E0
ql3_imon=7.56383E-11
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-1.9803E-10
mult1=-9.921E-9
mult2=-2.70264E-9
rf_tmon=-4.56049E-3
rf_agc=3.32795E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.72222E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65038E0
bslens_imon=2.41005E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.9859E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53973E1
cs_ef1b_imon=2.75759E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.019E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04377E1
cs_ea1_imon=2.62231E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32639E0
lens1_imon=2.50739E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64671E1
os_ef1alow_imon=2.98514E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04065E1
cs_ea2_imon=1.49436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.90505E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.20217E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11198E1
os_restr1_imon=4.26361E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=2.43101E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.08619E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23962E0
cs_ionrep_imon=1.17241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93753E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02146E1
cs_anode1_imon=2.89719E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.19801E-8
tplens_vset=1.4E-1
tplens_vmon=1.66577E0
tplens_imon=-4.3883E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.51346E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2641E1
iondef2_imon=1.5625E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98103E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=3.96127E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2365E0
ionrepsh_imon=1.74668E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.15024E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74426E1
cs_ef2b_imon=3.12549E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4555E0
os_ea2_imon=-4.46317E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06017E2
lens4b_imon=2.00323E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71301E1
cs_ef2a_imon=3.17302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04146E0
os_ef2alow_imon=-2.54812E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83285E-1
os_ef2bup_imon=-5.26523E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11373E1
os_restr2_imon=3.37399E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.22727E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.10016E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69331E1
iondef4_imon=1.09589E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.77408E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.23591E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12702E0
cs_ionaccel_imon=-1.8782E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47477E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.5793E-6
window_vset=0.0E0
window_vmon=2.50032E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86113E1
mask2_imon=-8.48986E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.66982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.31463E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.31043E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52742E0
defgridb_imon=6.32961E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.38815E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06836E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62295E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30868E1
cs_fil1_imon=9.93656E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63052E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6336E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82672E-2
os_fil2_imon=-2.55023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.01532E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.03874E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21905E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.02622E-1
res40_imon=-2.49198E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.56502E-1	-7.34901E-1	-9.19523E0	-9.18972E0	4.81606E-3	9.51529E-2	2.73305E1	-3.26779E1	-3.26219E1	2.67995E1	1.201E-7	2.52179E-3	2.52179E-3	6.3245E-3	2.9944E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56216E-1	-7.34782E-1	-9.19518E0	-9.18953E0	4.76837E-3	9.49383E-2	2.73071E1	-3.266E1	-3.26534E1	2.67443E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.56264E-1	-7.34687E-1	-9.19516E0	-9.18999E0	4.60148E-3	9.50813E-2	2.73202E1	-3.26579E1	-3.26092E1	2.68221E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31203E-3	3.00726E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.56311E-1	-7.34806E-1	-9.19518E0	-9.18987E0	4.45843E-3	9.49621E-2	2.73364E1	-3.26638E1	-3.26119E1	2.68532E1	1.1979E-7	2.52553E-3	2.52553E-3	6.31269E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.56359E-1	-7.34639E-1	-9.19547E0	-9.19003E0	4.55379E-3	9.4986E-2	2.73291E1	-3.26488E1	-3.2641E1	2.68442E1	1.20158E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-7.56168E-1	-7.34711E-1	-9.19518E0	-9.18987E0	4.57764E-3	9.52005E-2	2.73339E1	-3.26759E1	-3.26176E1	2.68496E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-7.56192E-1	-7.34663E-1	-9.19526E0	-9.19003E0	4.74453E-3	9.5129E-2	2.73327E1	-3.26488E1	-3.26332E1	2.68683E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56025E-1	-7.3483E-1	-9.19504E0	-9.19006E0	4.81606E-3	9.49144E-2	2.72823E1	-3.2647E1	-3.2605E1	2.68689E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56192E-1	-7.34925E-1	-9.19514E0	-9.19013E0	4.88758E-3	9.47237E-2	2.73063E1	-3.26723E1	-3.2626E1	2.68436E1	1.20278E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-7.56383E-1	-7.34544E-1	-9.19485E0	-9.18996E0	4.64916E-3	9.51767E-2	2.72921E1	-3.27045E1	-3.26266E1	2.68502E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98222E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.5593E-1	-7.35021E-1	-9.19471E0	-9.19001E0	4.45843E-3	9.4533E-2	2.73163E1	-3.26496E1	-3.2649E1	2.68655E1	1.19595E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9841E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.56097E-1	-7.34973E-1	-9.19476E0	-9.19011E0	4.673E-3	9.50813E-2	2.73297E1	-3.26621E1	-3.2629E1	2.68058E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9892E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.5624E-1	-7.34901E-1	-9.19521E0	-9.18977E0	4.43459E-3	9.50098E-2	2.73249E1	-3.26248E1	-3.26416E1	2.68136E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.56216E-1	-7.35044E-1	-9.19473E0	-9.18999E0	4.69685E-3	9.51052E-2	2.73141E1	-3.26993E1	-3.26098E1	2.68136E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.56216E-1	-7.34901E-1	-9.19466E0	-9.19039E0	4.55379E-3	9.47714E-2	2.73249E1	-3.26819E1	-3.26212E1	2.6834E1	1.20383E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-7.56335E-1	-7.35068E-1	-9.19509E0	-9.19018E0	4.72069E-3	9.49144E-2	2.73092E1	-3.26301E1	-3.26555E1	2.68459E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56311E-1	-7.34735E-1	-9.19495E0	-9.19015E0	4.62532E-3	9.50575E-2	2.73417E1	-3.26554E1	-3.26272E1	2.68553E1	1.19749E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.9841E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.56383E-1	-7.35068E-1	-9.19502E0	-9.19001E0	4.57764E-3	9.50336E-2	2.73322E1	-3.26579E1	-3.26183E1	2.6865E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56359E-1	-7.3514E-1	-9.19511E0	-9.19003E0	4.69685E-3	9.5439E-2	2.73517E1	-3.2708E1	-3.26113E1	2.68018E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-7.56478E-1	-7.3483E-1	-9.19511E0	-9.18992E0	4.55379E-3	9.5129E-2	2.73015E1	-3.2641E1	-3.26392E1	2.69331E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1