[Scan]
initial_time=2016-01-18T22:26:53
final_time=2016-01-18T22:27:21
ip_count=19
run=1024
dataset=10
scan=722
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.70303E-6
ql1_vset=
ql1_vmon=-8.79988E1
ql1_imon=-1.8629E-9
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.49583E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-5.96775E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.64414E-8
mult1=-2.12753E-8
mult2=-3.69071E-9
rf_tmon=-2.28538E-4
rf_agc=3.77256E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=6.76167E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=2.03465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.75889E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04174E1
cs_ea1_imon=2.57795E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00234E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.50905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.89909E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.2048E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.28806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=2.40629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.89404E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.93326E-8
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27618E1
iondef2_imon=1.58621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.9808E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.67896E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31286E0
ionrepsh_imon=1.73557E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33947E1
lens5b_imon=2.21303E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39603E0
os_ea2_imon=-8.43956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71504E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03173E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.38743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23003E2
cs_ionfoca_imon=6.27061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.98052E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.24729E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.17343E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=6.92505E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.27026E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.42438E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06014E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62326E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.95729E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86374E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.81242E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22021E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.932E3	3.0E0	1.47E2	4.1E1	-7.10825E-2	-8.79983E1	9.53674E-5	-8.80019E1	6.91414E-4	4.43459E-3	9.52721E-2	2.72895E1	-3.26807E1	-3.25948E1	2.68899E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
2.0E0	9.9159E4	9.2E1	3.16E2	1.6E2	-7.16233E-2	-8.79985E1	-2.38419E-4	-8.80016E1	9.05991E-4	4.57764E-3	9.51052E-2	2.73486E1	-3.26627E1	-3.26303E1	2.68629E1	1.19705E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00041E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.79984E1	-7.15256E-5	-8.80017E1	6.91414E-4	4.57764E-3	9.5129E-2	2.73307E1	-3.26459E1	-3.26021E1	2.68325E1	1.20084E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.0041E-1
4.0E0	2.1794E4	2.0E1	6.55E2	3.98E2	-7.286E-2	-8.79984E1	4.76837E-5	-8.80018E1	5.48363E-4	4.81606E-3	9.52721E-2	2.72973E1	-3.26621E1	-3.26591E1	2.6816E1	1.20226E-7	2.52093E-3	2.52093E-3	6.3126E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.79982E1	-1.90735E-4	-8.80017E1	8.10623E-4	4.57764E-3	9.50098E-2	2.73128E1	-3.26614E1	-3.26437E1	2.68111E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.79982E1	-7.15256E-5	-8.8002E1	7.86781E-4	4.55379E-3	9.50336E-2	2.73253E1	-3.26548E1	-3.26346E1	2.68843E1	1.19697E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.79981E1	-3.09944E-4	-8.80018E1	6.4373E-4	4.62532E-3	9.51052E-2	2.72912E1	-3.26822E1	-3.2571E1	2.67595E1	1.19861E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.79982E1	-1.43051E-4	-8.80018E1	5.72205E-4	4.81606E-3	9.47952E-2	2.73535E1	-3.26401E1	-3.2648E1	2.67976E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01223E-1
1.2E1	8.9E1	1.0E0	4.85E2	3.23E2	-7.201E-2	-8.79981E1	-3.8147E-4	-8.80016E1	8.10623E-4	4.673E-3	9.47475E-2	2.73309E1	-3.2647E1	-3.25785E1	2.69003E1	1.19925E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.01742E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.79982E1	-2.38419E-4	-8.80017E1	7.39098E-4	4.48227E-3	9.49383E-2	2.72949E1	-3.26163E1	-3.26562E1	2.67856E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.0148E-1
1.4E1	3.126E3	2.0E0	5.66E2	3.82E2	-7.13915E-2	-8.79984E1	-4.05312E-4	-8.80015E1	6.4373E-4	4.24385E-3	9.48906E-2	2.73219E1	-3.2655E1	-3.25814E1	2.68099E1	1.1988E-7	2.51679E-3	2.51679E-3	6.30221E-3	2.98031E-1
1.5E1	8.7E1	1.0E0	6.06E2	4.11E2	-7.07733E-2	-8.79984E1	-1.66893E-4	-8.80013E1	7.62939E-4	4.72069E-3	9.49144E-2	2.73278E1	-3.26701E1	-3.26059E1	2.68491E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
1.6E1	3.83E2	0.0E0	6.47E2	4.41E2	-7.10825E-2	-8.79986E1	-4.05312E-4	-8.80014E1	9.05991E-4	4.45843E-3	9.5129E-2	2.73237E1	-3.2653E1	-3.26272E1	2.6798E1	1.19514E-7	2.52739E-3	2.52739E-3	6.30149E-3	2.98792E-1
1.7E1	7.48E2	2.0E0	6.87E2	4.7E2	-7.21643E-2	-8.79983E1	-2.86102E-4	-8.80015E1	4.29153E-4	4.62532E-3	9.51052E-2	2.73279E1	-3.26651E1	-3.25906E1	2.68545E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.8E1	3.183E3	2.0E0	7.27E2	5.0E2	-7.12368E-2	-8.79983E1	-5.72205E-4	-8.80015E1	6.4373E-4	4.69685E-3	9.52482E-2	2.7361E1	-3.26392E1	-3.26338E1	2.68641E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
1.9E1	1.822E3	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.79984E1	-4.29153E-4	-8.80014E1	6.19888E-4	4.72069E-3	9.50575E-2	2.73424E1	-3.26711E1	-3.26314E1	2.68532E1	1.19766E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00676E-1
2.0E1	2.4679E4	1.0E1	8.08E2	5.58E2	-7.13143E-2	-8.79985E1	-2.86102E-4	-8.80015E1	6.4373E-4	4.64916E-3	9.51052E-2	2.73381E1	-3.26484E1	-3.26413E1	2.68554E1	1.19749E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.0071E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.79984E1	-9.53674E-5	-8.80017E1	8.58307E-4	4.69685E-3	9.48191E-2	2.73458E1	-3.26655E1	-3.26343E1	2.68247E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
2.2E1	1.767E3	2.0E0	8.89E2	6.17E2	-7.09279E-2	-8.79986E1	-5.72205E-4	-8.80014E1	5.72205E-4	4.29153E-3	9.50813E-2	2.73334E1	-3.26844E1	-3.25995E1	2.68453E1	1.20344E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99093E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.79988E1	-3.57628E-4	-8.80016E1	5.72205E-4	4.3869E-3	9.5129E-2	2.7349E1	-3.27618E1	-3.26068E1	2.6807E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1