[Scan]
initial_time=2016-01-18T22:27:32
final_time=2016-01-18T22:28:00
ip_count=19
run=1024
dataset=10
scan=723
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.79317E-6
ql1_vset=
ql1_vmon=-8.79991E1
ql1_imon=-1.48764E-9
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.40826E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-4.8951E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.63277E-8
mult1=-1.72189E-8
mult2=-3.76783E-9
rf_tmon=-7.07555E-3
rf_agc=2.93214E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.02174E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69217E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19288E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.74556E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04398E1
cs_ea1_imon=2.56273E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97343E0
lens1_imon=1.64779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.90738E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.20354E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14757E1
os_ea1_imon=2.42115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63245E1
os_ef1bup_imon=3.05694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27805E0
cs_ionrep_imon=1.20572E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.89476E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.93026E-8
tplens_vset=1.4E-1
tplens_vmon=1.65677E0
tplens_imon=-1.6085E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25729E1
iondef3_imon=1.48356E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27835E1
iondef2_imon=1.53807E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=9.5433E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31758E0
ionrepsh_imon=1.73132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4975E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00375E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03714E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69793E-1
os_ef2bup_imon=-5.54592E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.37986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.21866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74243E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68587E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.8651E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.23329E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16318E0
cs_ionaccel_imon=-1.60318E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=6.98522E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.2561E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21657E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.41243E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06584E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62022E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.96383E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63663E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63263E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.07059E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21855E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87523E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.825E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.79986E1	-3.09944E-4	-8.80013E1	5.48363E-4	4.48227E-3	9.52005E-2	2.73105E1	-3.2644E1	-3.26356E1	2.68358E1	1.20042E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.98842E-1
2.0E0	9.8758E4	9.8E1	3.16E2	1.6E2	-7.26282E-2	-8.79986E1	-3.57628E-4	-8.80014E1	3.33786E-4	4.3869E-3	9.49144E-2	2.73314E1	-3.26817E1	-3.26487E1	2.67854E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02133E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79988E1	-2.14577E-4	-8.80014E1	2.38419E-4	4.45843E-3	9.48668E-2	2.73149E1	-3.26608E1	-3.2633E1	2.68755E1	1.19766E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.0041E-1
4.0E0	2.1599E4	8.0E0	6.55E2	3.98E2	-7.34782E-2	-8.79986E1	-4.76837E-5	-8.80016E1	4.05312E-4	4.45843E-3	9.50098E-2	2.73314E1	-3.26768E1	-3.26144E1	2.68052E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.79988E1	7.15256E-5	-8.80013E1	3.09944E-4	4.43459E-3	9.50575E-2	2.73116E1	-3.26632E1	-3.25912E1	2.68818E1	1.19653E-7	2.50789E-3	2.50789E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.79984E1	-2.86102E-4	-8.80012E1	6.19888E-4	4.33922E-3	9.55343E-2	2.73297E1	-3.26657E1	-3.26428E1	2.68004E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.79985E1	-6.91414E-4	-8.80013E1	7.39098E-4	4.60148E-3	9.5129E-2	2.7269E1	-3.26765E1	-3.26344E1	2.6822E1	1.19902E-7	2.52169E-3	2.52169E-3	6.34518E-3	2.98156E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.79987E1	-3.09944E-4	-8.80015E1	5.48363E-4	4.79221E-3	9.49383E-2	2.73222E1	-3.26236E1	-3.26018E1	2.68238E1	1.19601E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.98481E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.79989E1	-1.43051E-4	-8.80014E1	6.67572E-4	4.48227E-3	9.50336E-2	2.72973E1	-3.26326E1	-3.26068E1	2.68617E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99175E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.79989E1	1.19209E-4	-8.80014E1	8.34465E-4	4.52995E-3	9.50813E-2	2.73249E1	-3.26855E1	-3.26681E1	2.6822E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.4E1	3.269E3	5.0E0	5.66E2	3.82E2	-7.15461E-2	-8.79987E1	0.0E0	-8.80014E1	8.34465E-4	4.45843E-3	9.47714E-2	2.73187E1	-3.26543E1	-3.26455E1	2.68424E1	1.20278E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00302E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.7999E1	0.0E0	-8.80014E1	9.05991E-4	4.24385E-3	9.48429E-2	2.73479E1	-3.26487E1	-3.26193E1	2.68562E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
1.6E1	3.57E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79989E1	4.76837E-5	-8.80013E1	7.15256E-4	4.26769E-3	9.4676E-2	2.73482E1	-3.26354E1	-3.26071E1	2.68599E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02659E-1
1.7E1	7.31E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.79989E1	2.38419E-5	-8.80013E1	9.53674E-4	4.81606E-3	9.47237E-2	2.73303E1	-3.26326E1	-3.26314E1	2.67752E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.8E1	3.138E3	3.0E0	7.27E2	5.0E2	-7.19325E-2	-8.79988E1	-1.90735E-4	-8.80013E1	4.05312E-4	4.57764E-3	9.47237E-2	2.73369E1	-3.26765E1	-3.26458E1	2.68331E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
1.9E1	1.918E3	3.0E0	7.68E2	5.29E2	-7.21643E-2	-8.79991E1	-7.15256E-5	-8.80015E1	4.52995E-4	4.33922E-3	9.50575E-2	2.73255E1	-3.26567E1	-3.265E1	2.68647E1	1.20174E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
2.0E1	2.4646E4	1.2E1	8.08E2	5.58E2	-7.22418E-2	-8.79991E1	-1.90735E-4	-8.80014E1	4.05312E-4	4.55379E-3	9.48906E-2	2.7324E1	-3.26307E1	-3.26207E1	2.68196E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99941E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.79991E1	-1.43051E-4	-8.80014E1	5.24521E-4	4.673E-3	9.47237E-2	2.73261E1	-3.26561E1	-3.25894E1	2.68478E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01609E-1
2.2E1	1.792E3	1.0E0	8.89E2	6.17E2	-7.17007E-2	-8.79988E1	-1.43051E-4	-8.80017E1	5.00679E-4	4.48227E-3	9.46999E-2	2.73476E1	-3.26797E1	-3.26006E1	2.68018E1	1.20069E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.79991E1	2.38419E-5	-8.80013E1	4.52995E-4	5.03063E-3	9.47952E-2	2.74243E1	-3.27835E1	-3.25729E1	2.68587E1	1.19891E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.00097E-1