[Scan]
initial_time=2016-01-18T22:32:44
final_time=2016-01-18T22:33:07
ip_count=19
run=1024
dataset=10
scan=731
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.74041E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-9.70936E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.34653E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-3.13804E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.61829E-8
mult1=-2.32125E-8
mult2=-2.84084E-9
rf_tmon=-4.65105E-3
rf_agc=3.30849E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.35452E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.15392E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19583E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5391E1
cs_ef1b_imon=2.75003E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=2.59989E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03537E0
lens1_imon=1.41773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64979E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.47436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.90085E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.20293E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.42575E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.0694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.17634E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.91023E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=3.92216E-8
tplens_vset=1.4E-1
tplens_vmon=1.65205E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26543E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26461E1
iondef2_imon=1.54975E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=8.94201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.73097E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33534E1
lens5b_imon=2.16313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74478E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43674E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.1542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0256E0
os_ef2alow_imon=-2.41472E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11065E1
os_restr2_imon=3.38773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68534E1
iondef4_imon=1.10171E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.80417E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.22813E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15621E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56602E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.48963E-1
window_imon=-8.61283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86101E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.83467E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=6.9392E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47938E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.40775E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07109E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62186E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.94103E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62603E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6335E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.50701E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08072E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15359E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21985E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19872E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18865E-1
res40_imon=-2.41125E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.832E3	1.0E0	1.47E2	4.1E1	-7.10051E-2	-8.80007E1	3.33786E-4	-8.8001E1	3.09944E-4	4.29153E-3	9.49144E-2	2.73363E1	-3.26651E1	-3.25984E1	2.68767E1	1.2026E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01738E-1
2.0E0	9.9028E4	9.4E1	3.16E2	1.6E2	-7.06187E-2	-8.80006E1	-7.15256E-5	-8.8001E1	7.15256E-5	4.02927E-3	9.48429E-2	2.72871E1	-3.26693E1	-3.2626E1	2.68352E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80005E1	7.15256E-5	-8.80008E1	4.76837E-4	4.3869E-3	9.47952E-2	2.73588E1	-3.26744E1	-3.26225E1	2.68514E1	1.19913E-7	2.51007E-3	2.51007E-3	6.34588E-3	3.00302E-1
4.0E0	2.1835E4	7.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80006E1	-1.43051E-4	-8.80006E1	6.91414E-4	4.14848E-3	9.48906E-2	2.73033E1	-3.2672E1	-3.26213E1	2.68192E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80005E1	-2.86102E-4	-8.80005E1	2.38419E-4	4.31538E-3	9.50813E-2	2.73297E1	-3.26567E1	-3.26194E1	2.68382E1	1.19902E-7	2.51739E-3	2.51739E-3	6.35059E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80002E1	0.0E0	-8.80008E1	5.48363E-4	4.48227E-3	9.5439E-2	2.72979E1	-3.26645E1	-3.26062E1	2.68052E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80003E1	-3.09944E-4	-8.8001E1	4.05312E-4	4.29153E-3	9.51767E-2	2.73369E1	-3.26603E1	-3.26362E1	2.68436E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80003E1	-2.86102E-4	-8.80008E1	2.38419E-4	4.24385E-3	9.51052E-2	2.73216E1	-3.26661E1	-3.26325E1	2.68496E1	1.19601E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80003E1	9.53674E-5	-8.80006E1	4.05312E-4	3.93391E-3	9.5129E-2	2.72626E1	-3.2673E1	-3.26255E1	2.68171E1	1.19811E-7	2.51955E-3	2.51955E-3	6.33102E-3	3.00172E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80003E1	-7.15256E-5	-8.80006E1	9.53674E-5	4.29153E-3	9.50813E-2	2.73447E1	-3.26734E1	-3.25949E1	2.68426E1					
1.4E1	3.159E3	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80003E1	-3.33786E-4	-8.80005E1	4.76837E-4	4.69685E-3	9.54628E-2	2.73375E1	-3.26801E1	-3.2626E1	2.6798E1	1.20076E-7	2.51793E-3	2.51793E-3	6.33112E-3	3.00761E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80004E1	-1.66893E-4	-8.80008E1	3.57628E-4	4.69685E-3	9.5129E-2	2.73269E1	-3.26779E1	-3.26284E1	2.68314E1	1.19705E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00824E-1
1.6E1	3.97E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80004E1	-1.90735E-4	-8.80005E1	6.91414E-4	4.57764E-3	9.51767E-2	2.73387E1	-3.26795E1	-3.2593E1	2.68556E1	1.20055E-7	2.52492E-3	2.52492E-3	6.33977E-3	3.01738E-1
1.7E1	7.2E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80007E1	2.38419E-5	-8.80007E1	4.29153E-4	4.45843E-3	9.49383E-2	2.731E1	-3.26725E1	-3.2607E1	2.68176E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.8E1	3.277E3	3.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80006E1	-1.90735E-4	-8.80009E1	6.91414E-4	4.57764E-3	9.50336E-2	2.73267E1	-3.26603E1	-3.25966E1	2.6849E1	1.20297E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01209E-1
1.9E1	1.881E3	3.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80008E1	-1.43051E-4	-8.80012E1	7.86781E-4	4.62532E-3	9.53436E-2	2.73175E1	-3.26467E1	-3.25853E1	2.68372E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
2.0E1	2.5076E4	1.5E1	8.08E2	5.58E2	-7.23189E-2	-8.80007E1	4.76837E-5	-8.80013E1	3.09944E-4	4.48227E-3	9.51767E-2	2.73075E1	-3.26621E1	-3.26254E1	2.68418E1	1.20363E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.98665E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80007E1	9.53674E-5	-8.8001E1	2.86102E-4	4.62532E-3	9.50098E-2	2.73306E1	-3.26724E1	-3.25982E1	2.68146E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
2.2E1	1.747E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80009E1	-4.76837E-5	-8.80011E1	3.8147E-4	4.57764E-3	9.50575E-2	2.73449E1	-3.26266E1	-3.26272E1	2.68338E1	1.20092E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.99343E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80011E1	2.38419E-5	-8.80009E1	2.38419E-4	4.57764E-3	9.5129E-2	2.73145E1	-3.26461E1	-3.26543E1	2.68534E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0041E-1