[Scan]
initial_time=2016-01-18T22:33:15
final_time=2016-01-18T22:33:38
ip_count=19
run=1024
dataset=10
scan=732
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.7753E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-9.00555E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.41702E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.97976E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.61653E-8
mult1=-1.76631E-8
mult2=-2.91223E-9
rf_tmon=-4.56049E-3
rf_agc=3.36881E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.89025E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.37192E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1961E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.75961E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04543E1
cs_ea1_imon=2.58942E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96866E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.50145E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.90449E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.20122E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15137E1
os_ea1_imon=2.42288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.1716E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.90449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.93123E-8
tplens_vset=1.4E-1
tplens_vmon=1.67147E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25936E1
iondef3_imon=1.48631E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.54146E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98061E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=9.03213E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=1.74478E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43114E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03534E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.39716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23992E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.84002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.23452E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15357E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.5198E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.37703E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.34315E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.4066E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07822E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62342E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.95837E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63549E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.89044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22095E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.31662E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.89E3	0.0E0	1.47E2	4.1E1	-7.11597E-2	-8.80008E1	-3.57628E-4	-8.80008E1	3.57628E-4	3.98159E-3	9.50336E-2	2.7357E1	-3.26667E1	-3.26514E1	2.68673E1	1.20069E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.97963E-1
2.0E0	9.8465E4	1.11E2	3.16E2	1.6E2	-7.07733E-2	-8.8001E1	-6.19888E-4	-8.80008E1	1.43051E-4	4.55379E-3	9.50098E-2	2.73143E1	-3.26425E1	-3.26303E1	2.68282E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99093E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.8001E1	-6.19888E-4	-8.80011E1	4.52995E-4	4.17233E-3	9.48191E-2	2.73128E1	-3.26319E1	-3.26213E1	2.68012E1	1.20262E-7	2.52179E-3	2.52179E-3	6.34164E-3	3.02426E-1
4.0E0	2.1643E4	8.0E0	6.55E2	3.98E2	-7.14689E-2	-8.8001E1	-4.52995E-4	-8.8001E1	5.96046E-4	4.43459E-3	9.48906E-2	2.73364E1	-3.2672E1	-3.26107E1	2.6855E1	1.1964E-7	2.51287E-3	2.51287E-3	6.2863E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80008E1	-2.14577E-4	-8.80011E1	5.96046E-4	4.41074E-3	9.49383E-2	2.73177E1	-3.26687E1	-3.26032E1	2.67968E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.8001E1	-3.8147E-4	-8.8001E1	6.67572E-4	4.62532E-3	9.4676E-2	2.72907E1	-3.26543E1	-3.25828E1	2.67379E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80011E1	-4.29153E-4	-8.80008E1	3.57628E-4	4.673E-3	9.49144E-2	2.73328E1	-3.26408E1	-3.26284E1	2.69148E1	1.20114E-7	2.51972E-3	2.51972E-3	6.3074E-3	3.00766E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80011E1	-2.6226E-4	-8.80006E1	4.52995E-4	4.57764E-3	9.50336E-2	2.73167E1	-3.26823E1	-3.26107E1	2.67739E1					
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80007E1	-5.00679E-4	-8.80007E1	4.76837E-4	4.36306E-3	9.49144E-2	2.73213E1	-3.26356E1	-3.26104E1	2.68376E1	1.20084E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.0041E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80009E1	-2.6226E-4	-8.80005E1	4.05312E-4	4.05312E-3	9.50336E-2	2.7367E1	-3.26705E1	-3.26062E1	2.68364E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
1.4E1	3.23E3	1.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80007E1	-5.00679E-4	-8.80004E1	5.24521E-4	4.55379E-3	9.52005E-2	2.73267E1	-3.26615E1	-3.2626E1	2.68659E1	1.19925E-7	2.51359E-3	2.51359E-3	6.29067E-3	2.99348E-1
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.08504E-2	-8.80007E1	-5.00679E-4	-8.80006E1	4.52995E-4	4.74453E-3	9.52482E-2	2.73105E1	-3.26645E1	-3.26206E1	2.6819E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.96381E-1
1.6E1	4.44E2	2.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80009E1	-4.76837E-4	-8.80009E1	4.52995E-4	4.72069E-3	9.54151E-2	2.73128E1	-3.2672E1	-3.2616E1	2.68256E1	1.19705E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.96414E-1
1.7E1	7.78E2	0.0E0	6.87E2	4.7E2	-7.14689E-2	-8.80007E1	-6.67572E-4	-8.80009E1	5.24521E-4	4.673E-3	9.50575E-2	2.73322E1	-3.26425E1	-3.26343E1	2.67992E1	1.20055E-7	2.51096E-3	2.51096E-3	6.33436E-3	2.97394E-1
1.8E1	3.227E3	3.0E0	7.27E2	5.0E2	-7.06958E-2	-8.80009E1	-6.4373E-4	-8.80007E1	6.4373E-4	4.55379E-3	9.52482E-2	2.72933E1	-3.26455E1	-3.26307E1	2.68472E1	1.19913E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.9926E-1
1.9E1	2.0E3	0.0E0	7.68E2	5.29E2	-7.09279E-2	-8.80009E1	-4.76837E-4	-8.80006E1	6.91414E-4	4.45843E-3	9.53913E-2	2.72935E1	-3.26364E1	-3.26266E1	2.69013E1	1.19646E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99175E-1
2.0E1	2.4692E4	1.1E1	8.08E2	5.58E2	-7.14689E-2	-8.80007E1	-3.8147E-4	-8.80005E1	5.96046E-4	4.57764E-3	9.53674E-2	2.73352E1	-3.26402E1	-3.26349E1	2.68348E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
2.1E1	6.6E1	1.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80008E1	-3.57628E-4	-8.80005E1	6.4373E-4	4.31538E-3	9.51767E-2	2.73159E1	-3.26729E1	-3.25948E1	2.68418E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
2.2E1	1.757E3	1.0E0	8.89E2	6.17E2	-7.10051E-2	-8.80009E1	-4.76837E-4	-8.80006E1	5.96046E-4	4.3869E-3	9.49621E-2	2.73163E1	-3.26585E1	-3.26313E1	2.6819E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80009E1	-3.57628E-4	-8.80007E1	6.91414E-4	4.57764E-3	9.50575E-2	2.73478E1	-3.27041E1	-3.25936E1	2.68088E1	1.20122E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.02396E-1