[Scan]
initial_time=2016-01-18T22:33:46
final_time=2016-01-18T22:34:09
ip_count=19
run=1024
dataset=10
scan=733
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.75004E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-8.96037E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.39071E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.8543E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.61619E-8
mult1=-1.44645E-8
mult2=-2.8918E-9
rf_tmon=-3.05832E-3
rf_agc=3.52499E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=5.55563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=2.0081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=2.7607E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04457E1
cs_ea1_imon=2.58821E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96163E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.4825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.90522E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.20628E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.27941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15111E1
os_ea1_imon=2.42151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=1.18377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.90089E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.92812E-8
tplens_vset=1.4E-1
tplens_vmon=1.7134E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.54479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98095E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.32133E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.73344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44854E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.14956E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.38815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.27132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.22659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68933E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.84297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.23168E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.64709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.42492E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62259E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.94503E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63087E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6338E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.86684E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22006E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67701E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.913E3	1.0E0	1.47E2	4.1E1	-7.10051E-2	-8.80012E1	-1.66893E-4	-8.80007E1	6.4373E-4	4.1008E-3	9.46999E-2	2.73411E1	-3.26753E1	-3.26302E1	2.68389E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01738E-1
2.0E0	9.9203E4	1.05E2	3.16E2	1.6E2	-7.19325E-2	-8.8001E1	-1.90735E-4	-8.80009E1	6.4373E-4	4.36306E-3	9.48906E-2	2.7355E1	-3.26855E1	-3.26284E1	2.68142E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80011E1	-4.76837E-4	-8.8001E1	9.77516E-4	4.3869E-3	9.50098E-2	2.73193E1	-3.26797E1	-3.26284E1	2.68496E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
4.0E0	2.2016E4	1.2E1	6.55E2	3.98E2	-7.09279E-2	-8.80006E1	-4.52995E-4	-8.80006E1	9.53674E-5	4.62532E-3	9.50098E-2	2.73586E1	-3.26512E1	-3.2626E1	2.68382E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80006E1	-4.76837E-4	-8.80006E1	3.57628E-4	4.24385E-3	9.49383E-2	2.73319E1	-3.26493E1	-3.26613E1	2.68362E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80011E1	-3.57628E-4	-8.80006E1	2.38419E-4	4.14848E-3	9.5129E-2	2.73033E1	-3.26493E1	-3.26058E1	2.68556E1	1.20028E-7	2.52093E-3	2.52093E-3	6.31779E-3	3.04477E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80008E1	-4.76837E-5	-8.80006E1	2.38419E-4	4.50611E-3	9.50336E-2	2.73201E1	-3.26903E1	-3.26236E1	2.68334E1	1.19925E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.8001E1	-4.05312E-4	-8.80009E1	4.76837E-4	4.19617E-3	9.50575E-2	2.73204E1	-3.26402E1	-3.26266E1	2.68082E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01995E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80007E1	-6.67572E-4	-8.80006E1	4.52995E-4	4.88758E-3	9.48906E-2	2.73189E1	-3.26597E1	-3.26458E1	2.68725E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80008E1	-4.76837E-4	-8.80013E1	3.09944E-4	4.48227E-3	9.50575E-2	2.73105E1	-3.26615E1	-3.2638E1	2.68611E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.99E-1
1.4E1	3.288E3	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80008E1	-4.29153E-4	-8.80011E1	2.86102E-4	4.17233E-3	9.5129E-2	2.73195E1	-3.26657E1	-3.2638E1	2.6813E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.97394E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80009E1	-2.86102E-4	-8.80009E1	5.96046E-4	4.1008E-3	9.53436E-2	2.73411E1	-3.26703E1	-3.26408E1	2.67992E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97704E-1
1.6E1	4.2E2	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80007E1	-3.57628E-4	-8.80007E1	5.96046E-4	4.45843E-3	9.50336E-2	2.73219E1	-3.26687E1	-3.26422E1	2.68556E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.7E1	7.57E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80009E1	-3.33786E-4	-8.8001E1	4.05312E-4	4.57764E-3	9.5129E-2	2.73532E1	-3.26434E1	-3.25966E1	2.68617E1	1.20122E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01085E-1
1.8E1	3.222E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80009E1	-2.6226E-4	-8.80006E1	4.29153E-4	4.57764E-3	9.50098E-2	2.73069E1	-3.26741E1	-3.26446E1	2.68707E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
1.9E1	1.927E3	3.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80006E1	-3.57628E-4	-8.80007E1	5.96046E-4	4.72069E-3	9.5129E-2	2.7334E1	-3.26726E1	-3.26018E1	2.6774E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01738E-1
2.0E1	2.4707E4	1.2E1	8.08E2	5.58E2	-7.20871E-2	-8.80008E1	-2.6226E-4	-8.80007E1	5.00679E-4	4.48227E-3	9.49621E-2	2.73255E1	-3.26729E1	-3.26428E1	2.68524E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80009E1	-3.8147E-4	-8.80007E1	3.33786E-4	4.55379E-3	9.51052E-2	2.73039E1	-3.26803E1	-3.26585E1	2.68141E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.2E1	1.74E3	2.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80009E1	-2.14577E-4	-8.80006E1	1.19209E-4	4.31538E-3	9.50813E-2	2.73424E1	-3.26392E1	-3.26104E1	2.68346E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80009E1	0.0E0	-8.80005E1	4.29153E-4	4.29153E-3	9.50336E-2	2.73275E1	-3.26797E1	-3.26307E1	2.68933E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1