[Scan]
initial_time=2016-01-18T22:34:17
final_time=2016-01-18T22:34:40
ip_count=19
run=1024
dataset=10
scan=734
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.09279E-2
qbias_imon=-3.76047E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-8.81851E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.4881E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.87771E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.61666E-8
mult1=-1.76918E-8
mult2=-2.66446E-9
rf_tmon=-4.71004E-3
rf_agc=3.28254E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.74052E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66973E0
bslens_imon=2.27493E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19223E1
lens5a_imon=1.97803E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.75925E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=2.59142E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97839E0
lens1_imon=1.54034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.95783E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03764E1
cs_ea2_imon=1.4932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.9135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.20619E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.28301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15E1
os_ea1_imon=2.39748E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22761E0
cs_ionrep_imon=1.16924E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93552E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.91026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.93164E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-2.55746E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.51487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.56519E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98265E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=8.98564E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31882E0
ionrepsh_imon=1.72496E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33909E1
lens5b_imon=2.15984E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42779E0
os_ea2_imon=-9.42592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72933E1
iondef1_imon=1.127E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.8646E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.23303E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56687E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.67798E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=6.88818E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.51721E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.25548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46484E0
defgridb_imon=6.20134E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.41934E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07035E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62252E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.96828E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63501E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6332E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92275E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.00029E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.1979E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16355E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.863E3	2.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80006E1	-1.66893E-4	-8.80009E1	5.00679E-4	4.55379E-3	9.5129E-2	2.73115E1	-3.26521E1	-3.26359E1	2.68448E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
2.0E0	9.8959E4	1.0E2	3.16E2	1.6E2	-7.15461E-2	-8.80007E1	9.53674E-5	-8.8001E1	3.57628E-4	4.41074E-3	9.51052E-2	2.73625E1	-3.2636E1	-3.26079E1	2.6786E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00453E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80009E1	-4.52995E-4	-8.80006E1	1.90735E-4	4.64916E-3	9.52244E-2	2.73204E1	-3.26667E1	-3.26136E1	2.68286E1	1.19819E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.00676E-1
4.0E0	2.1504E4	1.1E1	6.55E2	3.98E2	-7.17779E-2	-8.8001E1	-5.72205E-4	-8.80011E1	2.14577E-4	4.95911E-3	9.52482E-2	2.7319E1	-3.2659E1	-3.26167E1	2.68957E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80012E1	-6.91414E-4	-8.8001E1	4.76837E-4	4.36306E-3	9.50336E-2	2.72877E1	-3.26693E1	-3.26362E1	2.6834E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80007E1	-5.00679E-4	-8.80008E1	6.91414E-4	4.673E-3	9.49144E-2	2.72775E1	-3.26482E1	-3.26302E1	2.68442E1	1.20004E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.8001E1	-2.6226E-4	-8.80006E1	8.58307E-4	4.05312E-3	9.53674E-2	2.73399E1	-3.26296E1	-3.25971E1	2.68447E1	1.20031E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.99348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.8001E1	-3.09944E-4	-8.80009E1	7.15256E-4	4.45843E-3	9.52005E-2	2.73222E1	-3.26773E1	-3.26107E1	2.68424E1	1.20042E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.01356E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80008E1	-7.15256E-5	-8.80008E1	9.53674E-4	4.62532E-3	9.51052E-2	2.73135E1	-3.26494E1	-3.26206E1	2.6837E1	1.20174E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.8001E1	-3.09944E-4	-8.80008E1	8.58307E-4	4.72069E-3	9.53436E-2	2.73201E1	-3.26711E1	-3.2641E1	2.684E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
1.4E1	3.329E3	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80009E1	-1.90735E-4	-8.80011E1	8.10623E-4	4.62532E-3	9.52244E-2	2.72931E1	-3.26621E1	-3.26368E1	2.6843E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.8001E1	-4.76837E-5	-8.80009E1	7.62939E-4	4.69685E-3	9.52244E-2	2.72856E1	-3.26549E1	-3.26278E1	2.68412E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.6E1	4.13E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80013E1	-5.48363E-4	-8.80008E1	1.00136E-3	4.62532E-3	9.5129E-2	2.73467E1	-3.26432E1	-3.26291E1	2.68755E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.7E1	7.82E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80012E1	-4.05312E-4	-8.80009E1	7.62939E-4	4.76837E-3	9.50098E-2	2.72992E1	-3.26661E1	-3.26248E1	2.6818E1	1.19757E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9978E-1
1.8E1	3.201E3	6.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80011E1	-9.53674E-5	-8.80012E1	7.62939E-4	4.81606E-3	9.50098E-2	2.73177E1	-3.26765E1	-3.26494E1	2.68274E1	1.19757E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97963E-1
1.9E1	1.92E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80009E1	-4.05312E-4	-8.80009E1	6.4373E-4	4.45843E-3	9.51529E-2	2.73051E1	-3.26476E1	-3.26446E1	2.67932E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1
2.0E1	2.5046E4	2.2E1	8.08E2	5.58E2	-7.18554E-2	-8.80012E1	-1.90735E-4	-8.80012E1	8.34465E-4	4.76837E-3	9.52721E-2	2.73748E1	-3.27011E1	-3.26338E1	2.68448E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
2.1E1	5.1E1	1.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80013E1	-2.86102E-4	-8.80011E1	7.86781E-4	4.36306E-3	9.50098E-2	2.73228E1	-3.26779E1	-3.26885E1	2.68448E1	1.19549E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
2.2E1	1.725E3	1.0E0	8.89E2	6.17E2	-7.08504E-2	-8.80011E1	-2.38419E-4	-8.8001E1	6.19888E-4	4.673E-3	9.48906E-2	2.73257E1	-3.26626E1	-3.26113E1	2.68505E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.09279E-2	-8.80012E1	-1.43051E-4	-8.8001E1	7.39098E-4	4.81606E-3	9.52244E-2	2.72933E1	-3.26573E1	-3.26042E1	2.68052E1	1.1979E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.006E-1