[Scan]
initial_time=2016-01-18T22:34:48
final_time=2016-01-18T22:35:11
ip_count=19
run=1024
dataset=10
scan=735
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.78376E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-9.27198E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.41836E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.9197E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.61216E-8
mult1=-1.50262E-8
mult2=-2.5709E-9
rf_tmon=-6.81959E-3
rf_agc=3.13448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.79166E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69257E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.76358E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04465E1
cs_ea1_imon=2.57933E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98428E0
lens1_imon=1.64012E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.48991E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.90485E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.20648E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.43117E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=1.17881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.9063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.93009E-8
tplens_vset=1.4E-1
tplens_vmon=1.66667E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.48883E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=9.1362E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.73325E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44076E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00399E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.38094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23007E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.23524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.83471E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.21483E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=6.97545E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.47797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.48375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23615E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.4033E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62418E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.93837E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63129E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63357E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.89817E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21877E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29844E-3
inlet_lpb_pmon=3.01395E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51275E-3
foreline_cvt_pmon=2.51275E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.90526E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.789E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80013E1	-1.43051E-4	-8.80011E1	8.10623E-4	4.45843E-3	9.5129E-2	2.73204E1	-3.26543E1	-3.26012E1	2.68157E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
2.0E0	9.8415E4	7.9E1	3.16E2	1.6E2	-7.19325E-2	-8.80008E1	-1.19209E-4	-8.80013E1	6.67572E-4	4.33922E-3	9.50813E-2	2.73312E1	-3.26718E1	-3.26364E1	2.68621E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80014E1	2.14577E-4	-8.80013E1	5.00679E-4	4.12464E-3	9.52721E-2	2.73357E1	-3.26719E1	-3.26266E1	2.68032E1	1.19891E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.99343E-1
4.0E0	2.1716E4	7.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80008E1	1.66893E-4	-8.80007E1	6.91414E-4	4.93526E-3	9.51052E-2	2.73255E1	-3.26494E1	-3.2617E1	2.68575E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80011E1	-7.15256E-5	-8.80008E1	5.72205E-4	5.03063E-3	9.4986E-2	2.73682E1	-3.26502E1	-3.26449E1	2.68487E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80011E1	-1.66893E-4	-8.80009E1	5.48363E-4	4.52995E-3	9.50098E-2	2.73045E1	-3.26428E1	-3.26086E1	2.68226E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80013E1	-1.43051E-4	-8.80014E1	5.96046E-4	4.48227E-3	9.50575E-2	2.73291E1	-3.2632E1	-3.26302E1	2.68797E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80012E1	-1.90735E-4	-8.80013E1	2.14577E-4	4.57764E-3	9.52482E-2	2.73309E1	-3.26278E1	-3.2626E1	2.67619E1	1.19757E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00302E-1
1.2E1	9.6E1	2.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80011E1	1.19209E-4	-8.80011E1	5.48363E-4	4.64916E-3	9.52959E-2	2.73273E1	-3.26554E1	-3.26068E1	2.68839E1	1.20435E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.9952E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.8001E1	-2.6226E-4	-8.80011E1	4.29153E-4	4.45843E-3	9.4986E-2	2.73772E1	-3.26771E1	-3.26639E1	2.67794E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
1.4E1	3.254E3	4.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80012E1	9.53674E-5	-8.80011E1	4.29153E-4	4.43459E-3	9.52959E-2	2.73838E1	-3.26891E1	-3.26224E1	2.681E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80013E1	4.76837E-5	-8.80011E1	4.52995E-4	4.3869E-3	9.51052E-2	2.73333E1	-3.26543E1	-3.26518E1	2.68148E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.6E1	3.74E2	2.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80011E1	0.0E0	-8.8001E1	6.91414E-4	4.55379E-3	9.53197E-2	2.73225E1	-3.26867E1	-3.26014E1	2.68454E1	1.19978E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.99613E-1
1.7E1	7.35E2	0.0E0	6.87E2	4.7E2	-7.03869E-2	-8.8001E1	-2.38419E-5	-8.8001E1	7.39098E-4	4.62532E-3	9.52244E-2	2.73347E1	-3.26835E1	-3.26135E1	2.68151E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.8E1	3.198E3	2.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80013E1	0.0E0	-8.80009E1	5.48363E-4	4.52995E-3	9.48191E-2	2.73039E1	-3.26198E1	-3.26385E1	2.68213E1	1.1993E-7	2.52301E-3	2.52301E-3	6.31779E-3	3.00741E-1
1.9E1	1.892E3	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80014E1	1.19209E-4	-8.80012E1	5.24521E-4	4.74453E-3	9.52482E-2	2.73424E1	-3.26376E1	-3.25985E1	2.68635E1	1.19978E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00676E-1
2.0E1	2.5045E4	1.6E1	8.08E2	5.58E2	-7.11597E-2	-8.80011E1	2.38419E-5	-8.80011E1	6.91414E-4	4.8399E-3	9.52005E-2	2.73057E1	-3.26573E1	-3.26503E1	2.68581E1	1.19925E-7	2.5147E-3	2.5147E-3	6.29067E-3	3.00676E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.8001E1	-1.90735E-4	-8.8001E1	5.00679E-4	4.45843E-3	9.52482E-2	2.73292E1	-3.26564E1	-3.26263E1	2.68281E1	1.20158E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.98665E-1
2.2E1	1.76E3	1.0E0	8.89E2	6.17E2	-7.09279E-2	-8.80011E1	4.76837E-5	-8.8001E1	2.86102E-4	4.52995E-3	9.51767E-2	2.73132E1	-3.26554E1	-3.26341E1	2.67991E1	1.201E-7	2.51969E-3	2.51969E-3	6.31962E-3	3.02412E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80013E1	-2.86102E-4	-8.80009E1	2.86102E-4	4.55379E-3	9.54866E-2	2.73291E1	-3.26573E1	-3.26224E1	2.6846E1	1.198E-7	2.51275E-3	2.51275E-3	6.29844E-3	3.01395E-1