[Scan]
initial_time=2016-01-18T22:36:22
final_time=2016-01-18T22:36:45
ip_count=19
run=1024
dataset=10
scan=738
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79876E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-8.52895E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.40191E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.74086E-9
ql4_vset=
ql4_vmon=8.82149E-4
ql4_imon=1.61363E-8
mult1=-2.04917E-8
mult2=-2.72396E-9
rf_tmon=-3.09527E-3
rf_agc=3.45527E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=5.46336E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.75961E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.58654E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97286E0
lens1_imon=1.57162E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.95135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.50902E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.89512E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.19922E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.28049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14897E1
os_ea1_imon=2.40233E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63389E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.91675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.92243E-8
tplens_vset=1.4E-1
tplens_vmon=1.6907E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26682E1
iondef2_imon=1.55444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=9.39786E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29356E0
ionrepsh_imon=1.72027E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04555E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62586E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11376E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.22443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.82455E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.20868E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.39915E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06903E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62102E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=9.94666E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63045E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63165E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.09281E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.74405E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21859E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.7611E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.834E3	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80015E1	-3.8147E-4	-8.80009E1	4.76837E-4	4.3869E-3	9.52482E-2	2.73E1	-3.26539E1	-3.26311E1	2.68283E1	1.20122E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9952E-1
2.0E0	9.8299E4	9.0E1	3.16E2	1.6E2	-7.34782E-2	-8.80012E1	-2.38419E-5	-8.80007E1	3.8147E-4	4.52995E-3	9.48906E-2	2.7318E1	-3.2656E1	-3.26529E1	2.68475E1	1.20028E-7	2.52405E-3	2.52405E-3	6.31779E-3	2.98276E-1
3.0E0	1.9E1	1.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80014E1	-2.6226E-4	-8.80004E1	1.19209E-4	4.673E-3	9.50575E-2	2.73334E1	-3.26396E1	-3.26337E1	2.68945E1	1.19775E-7	2.51952E-3	2.51952E-3	6.3131E-3	2.97823E-1
4.0E0	2.1415E4	1.7E1	6.55E2	3.98E2	-7.30146E-2	-8.80012E1	-9.53674E-5	-8.80007E1	3.57628E-4	4.3869E-3	9.49621E-2	2.73346E1	-3.26666E1	-3.26324E1	2.68041E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80016E1	-4.52995E-4	-8.80009E1	4.52995E-4	4.60148E-3	9.49144E-2	2.7312E1	-3.26659E1	-3.26397E1	2.68618E1	1.19941E-7	2.52131E-3	2.52131E-3	6.31798E-3	2.97843E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80015E1	2.38419E-5	-8.8001E1	9.53674E-5	4.43459E-3	9.49621E-2	2.73183E1	-3.26867E1	-3.262E1	2.68208E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80015E1	-2.6226E-4	-8.80011E1	1.43051E-4	4.74453E-3	9.5129E-2	2.73165E1	-3.26761E1	-3.26175E1	2.68522E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80017E1	-1.66893E-4	-8.80008E1	3.57628E-4	4.29153E-3	9.50336E-2	2.73196E1	-3.2648E1	-3.26243E1	2.68151E1	1.1993E-7	2.51162E-3	2.51162E-3	6.3282E-3	2.99506E-1
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80015E1	-7.15256E-5	-8.80008E1	4.52995E-4	4.55379E-3	9.48191E-2	2.73364E1	-3.26868E1	-3.25977E1	2.68754E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9841E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80011E1	-2.38419E-4	-8.80008E1	4.05312E-4	4.62532E-3	9.51052E-2	2.72895E1	-3.26152E1	-3.26771E1	2.68268E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
1.4E1	3.286E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80012E1	-3.8147E-4	-8.8001E1	5.24521E-4	4.26769E-3	9.51052E-2	2.73525E1	-3.26701E1	-3.26277E1	2.68211E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99175E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80012E1	-4.29153E-4	-8.80007E1	2.6226E-4	4.14848E-3	9.5129E-2	2.73393E1	-3.26472E1	-3.2639E1	2.68184E1	1.1997E-7	2.51677E-3	2.51677E-3	6.30964E-3	2.99899E-1
1.6E1	3.76E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80012E1	-5.00679E-4	-8.8001E1	5.00679E-4	4.45843E-3	9.51529E-2	2.73388E1	-3.2637E1	-3.25605E1	2.68172E1					
1.7E1	7.69E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80011E1	-2.6226E-4	-8.80009E1	6.19888E-4	4.17233E-3	9.48906E-2	2.72817E1	-3.26481E1	-3.26442E1	2.68439E1	1.19872E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.00144E-1
1.8E1	3.332E3	3.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80011E1	-4.05312E-4	-8.80011E1	6.67572E-4	4.33922E-3	9.49383E-2	2.7306E1	-3.27414E1	-3.26386E1	2.68469E1	1.19785E-7	2.51874E-3	2.51874E-3	6.31902E-3	2.99811E-1
1.9E1	1.87E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80012E1	-2.6226E-4	-8.80011E1	3.33786E-4	4.72069E-3	9.52244E-2	2.7215E1	-3.26687E1	-3.27324E1	2.684E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29919E-3	2.98481E-1
2.0E1	2.4927E4	1.4E1	8.08E2	5.58E2	-7.17007E-2	-8.8001E1	2.38419E-5	-8.8001E1	6.67572E-4	4.41074E-3	9.48668E-2	2.7324E1	-3.26838E1	-3.25853E1	2.68538E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.8001E1	-1.43051E-4	-8.80009E1	6.91414E-4	4.50611E-3	9.49144E-2	2.73145E1	-3.26526E1	-3.26614E1	2.68105E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
2.2E1	1.709E3	1.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80009E1	-1.90735E-4	-8.8001E1	8.34465E-4	4.64916E-3	9.48191E-2	2.73517E1	-3.26891E1	-3.26101E1	2.68833E1	1.2026E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.8001E1	-3.33786E-4	-8.80008E1	8.82149E-4	4.17233E-3	9.48191E-2	2.73204E1	-3.26682E1	-3.26278E1	2.68202E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.99E-1