[Scan]
initial_time=2016-01-18T22:36:53
final_time=2016-01-18T22:37:14
ip_count=19
run=1024
dataset=10
scan=739
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.79126E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-8.80241E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.44188E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.76982E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.61328E-8
mult1=-2.09546E-8
mult2=-2.70366E-9
rf_tmon=-6.53874E-3
rf_agc=3.13565E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.5722E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.30612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54096E1
cs_ef1b_imon=2.75663E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.58892E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97638E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03454E1
cs_ea2_imon=1.48498E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.91163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.19703E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.2701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.42752E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63925E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.18802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.9005E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.92643E-8
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.59045E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.19282E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31994E0
ionrepsh_imon=1.73663E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.1564E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.11944E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41609E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.15802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06846E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70008E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.37766E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01676E1
cs_anode2_imon=2.2336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68592E1
iondef4_imon=1.09372E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.8525E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.20276E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-1.7718E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02007E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.67394E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-8.12629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.44534E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.15511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.40294E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07318E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6194E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.9324E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63553E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63077E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.16298E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21919E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40049E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27553E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.897E3	2.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80016E1	-7.15256E-5	-8.80008E1	6.91414E-4	4.26769E-3	9.50098E-2	2.73151E1	-3.26319E1	-3.2662E1	2.68148E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.01085E-1
2.0E0	9.9016E4	1.02E2	3.16E2	1.6E2	-7.32464E-2	-8.80013E1	-7.15256E-5	-8.8001E1	6.4373E-4	4.36306E-3	9.49383E-2	2.73192E1	-3.26542E1	-3.26425E1	2.68689E1	1.19991E-7	2.51393E-3	2.51393E-3	6.29684E-3	3.00852E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.8001E1	-3.33786E-4	-8.80008E1	5.00679E-4	4.29153E-3	9.49144E-2	2.72903E1	-3.26685E1	-3.26231E1	2.68004E1	1.19978E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.01742E-1
4.0E0	2.1498E4	7.0E0	6.55E2	3.98E2	-7.286E-2	-8.80012E1	-2.14577E-4	-8.80006E1	5.48363E-4	4.02927E-3	9.52005E-2	2.72993E1	-3.267E1	-3.26312E1	2.68528E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80015E1	-2.38419E-5	-8.8001E1	8.58307E-4	4.36306E-3	9.49621E-2	2.73106E1	-3.2645E1	-3.2645E1	2.68484E1	1.19851E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80017E1	2.38419E-5	-8.80008E1	6.91414E-4	4.48227E-3	9.50098E-2	2.73417E1	-3.26425E1	-3.26437E1	2.68556E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80016E1	-1.90735E-4	-8.80007E1	7.62939E-4	4.69685E-3	9.48906E-2	2.73147E1	-3.26488E1	-3.2599E1	2.68016E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80014E1	2.38419E-5	-8.80012E1	9.29832E-4	4.673E-3	9.48191E-2	2.73351E1	-3.26627E1	-3.26315E1	2.68821E1	1.20017E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.00563E-1
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80016E1	-4.76837E-5	-8.80009E1	5.96046E-4	4.72069E-3	9.48429E-2	2.73364E1	-3.26469E1	-3.26185E1	2.68343E1	1.19601E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.9874E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80015E1	-2.6226E-4	-8.80012E1	6.19888E-4	4.57764E-3	9.49144E-2	2.73122E1	-3.2662E1	-3.26537E1	2.68148E1	1.20042E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.99093E-1
1.4E1	3.284E3	2.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80014E1	4.76837E-5	-8.8001E1	6.4373E-4	4.48227E-3	9.49383E-2	2.73189E1	-3.26633E1	-3.2635E1	2.6798E1	1.19646E-7	2.52384E-3	2.52384E-3	6.35059E-3	2.99686E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80013E1	-1.19209E-4	-8.80012E1	8.58307E-4	4.43459E-3	9.52721E-2	2.73508E1	-3.26765E1	-3.26362E1	2.69163E1	1.20435E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
1.6E1	4.1E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80014E1	-3.8147E-4	-8.80009E1	8.10623E-4	4.19617E-3	9.50098E-2	2.73189E1	-3.26765E1	-3.26482E1	2.68088E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
1.7E1	7.88E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80014E1	4.76837E-5	-8.80012E1	7.86781E-4	4.74453E-3	9.5129E-2	2.73297E1	-3.26543E1	-3.26152E1	2.6804E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.8E1	3.27E3	6.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80017E1	-3.09944E-4	-8.8001E1	6.4373E-4	4.52995E-3	9.50575E-2	2.73169E1	-3.26596E1	-3.26573E1	2.68887E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
1.9E1	1.904E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80016E1	2.38419E-5	-8.8001E1	5.24521E-4	4.50611E-3	9.52959E-2	2.72799E1	-3.26849E1	-3.26939E1	2.6771E1	1.19749E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
2.0E1	2.4868E4	1.5E1	8.08E2	5.58E2	-7.30146E-2	-8.80015E1	-2.14577E-4	-8.80006E1	6.91414E-4	4.36306E-3	9.5582E-2	2.73116E1	-3.2688E1	-3.2629E1	2.68707E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01871E-1
2.1E1	3.6E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80016E1	-4.76837E-4	-8.80008E1	7.15256E-4	4.60148E-3	9.52721E-2	2.73222E1	-3.26496E1	-3.26343E1	2.6796E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.9943E-1
2.2E1	1.702E3	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80013E1	-5.24521E-4	-8.80009E1	5.48363E-4	4.45843E-3	9.54151E-2	2.73517E1	-3.26697E1	-3.26018E1	2.68545E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80012E1	-6.67572E-4	-8.8001E1	5.00679E-4	4.76837E-3	9.52244E-2	2.73204E1	-3.26691E1	-3.26478E1	2.68592E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9841E-1