[Scan]
initial_time=2016-01-18T22:37:51
final_time=2016-01-18T22:38:12
ip_count=19
run=1024
dataset=10
scan=741
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.78778E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-8.3307E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.41809E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.66538E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.61924E-8
mult1=-1.61195E-8
mult2=-2.59195E-9
rf_tmon=-5.23505E-3
rf_agc=3.30142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.43952E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67891E0
bslens_imon=2.35206E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19694E1
lens5a_imon=1.98354E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53873E1
cs_ef1b_imon=2.75984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04725E1
cs_ea1_imon=2.59803E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98758E0
lens1_imon=1.48157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64758E1
os_ef1alow_imon=2.97429E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.47814E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84369E1
cs_ef1a_imon=2.89981E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.19309E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=4.27521E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15122E1
os_ea1_imon=2.44229E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63698E1
os_ef1bup_imon=3.07683E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21782E0
cs_ionrep_imon=1.1843E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=2.90018E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.92219E-8
tplens_vset=1.4E-1
tplens_vmon=1.70204E0
tplens_imon=-2.55746E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.49577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26992E1
iondef2_imon=1.55564E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98232E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=9.25601E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29434E0
ionrepsh_imon=1.73231E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33621E1
lens5b_imon=2.16425E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74701E1
cs_ef2b_imon=3.13147E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46758E0
os_ea2_imon=-7.40579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71464E1
cs_ef2a_imon=3.16067E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.46578E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7081E-1
os_ef2bup_imon=-5.22406E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11329E1
os_restr2_imon=3.38372E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.27504E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02052E1
cs_anode2_imon=2.23737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.09101E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68574E1
iondef4_imon=1.10187E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.83896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.21119E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14823E0
cs_ionaccel_imon=-1.76592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47466E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56505E1
einzel_imon=7.66538E-6
window_vset=0.0E0
window_vmon=2.51904E-1
window_imon=-8.45243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39159E-4
mask2_vset=0.0E0
mask2_vmon=-1.86244E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.27017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.56496E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.31425E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42194E0
defgridb_imon=6.29683E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.40405E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07591E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62079E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.93581E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62908E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63215E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0016E-2
os_fil2_imon=-2.70617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.02919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33685E-1
cs_fil2_imon=-2.48161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21943E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.13226E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.864E3	1.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80013E1	-4.76837E-5	-8.80008E1	2.38419E-4	4.52995E-3	9.50336E-2	2.72974E1	-3.26455E1	-3.26018E1	2.68789E1	1.20297E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.0041E-1
2.0E0	9.8871E4	9.3E1	3.16E2	1.6E2	-7.20871E-2	-8.80013E1	4.76837E-5	-8.80007E1	4.76837E-4	4.76837E-3	9.51767E-2	2.73159E1	-3.26573E1	-3.26398E1	2.68436E1	1.20209E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00197E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80012E1	-2.86102E-4	-8.80008E1	5.72205E-4	4.86374E-3	9.49144E-2	2.73488E1	-3.26744E1	-3.2626E1	2.68316E1	1.19809E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00302E-1
4.0E0	2.1816E4	1.9E1	6.55E2	3.98E2	-7.11597E-2	-8.80013E1	-7.15256E-5	-8.80004E1	3.57628E-4	4.3869E-3	9.52482E-2	2.73417E1	-3.26753E1	-3.2629E1	2.68483E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80012E1	-1.90735E-4	-8.80008E1	2.86102E-4	4.26769E-3	9.52482E-2	2.73193E1	-3.26467E1	-3.26178E1	2.68129E1	1.19705E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.08504E-2	-8.80018E1	1.90735E-4	-8.80007E1	3.09944E-4	4.17233E-3	9.5129E-2	2.73269E1	-3.26691E1	-3.26189E1	2.68605E1	1.20209E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80015E1	-7.15256E-5	-8.80009E1	3.09944E-4	4.48227E-3	9.52005E-2	2.73357E1	-3.26578E1	-3.26327E1	2.6828E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80015E1	-1.66893E-4	-8.80009E1	5.00679E-4	4.41074E-3	9.50336E-2	2.72847E1	-3.26777E1	-3.26212E1	2.68406E1	1.20226E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.03185E-1
1.2E1	7.7E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80014E1	-3.8147E-4	-8.80009E1	2.6226E-4	4.24385E-3	9.49383E-2	2.73216E1	-3.2649E1	-3.26178E1	2.68689E1	1.19809E-7	2.51552E-3	2.51552E-3	6.35692E-3	3.02133E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80016E1	0.0E0	-8.80007E1	3.57628E-4	4.17233E-3	9.48191E-2	2.737E1	-3.26669E1	-3.25966E1	2.68106E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
1.4E1	3.268E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80013E1	-1.43051E-4	-8.80008E1	6.4373E-4	4.33922E-3	9.47475E-2	2.73219E1	-3.26747E1	-3.26254E1	2.6834E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.9952E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80012E1	-2.14577E-4	-8.8001E1	5.48363E-4	4.43459E-3	9.46283E-2	2.73466E1	-3.26849E1	-3.2611E1	2.67956E1	1.19705E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.6E1	4.48E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80013E1	-2.6226E-4	-8.80007E1	6.91414E-4	4.64916E-3	9.4986E-2	2.72877E1	-3.26536E1	-3.2614E1	2.68466E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9874E-1
1.7E1	7.91E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80016E1	-6.4373E-4	-8.80007E1	1.00136E-3	4.52995E-3	9.47952E-2	2.73252E1	-3.26915E1	-3.2649E1	2.68244E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.8E1	3.365E3	2.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80013E1	-7.39098E-4	-8.80009E1	5.48363E-4	4.62532E-3	9.4676E-2	2.73051E1	-3.26669E1	-3.26344E1	2.6837E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02769E-1
1.9E1	1.979E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80015E1	-5.72205E-4	-8.80009E1	4.52995E-4	4.14848E-3	9.50813E-2	2.73664E1	-3.26927E1	-3.25737E1	2.68484E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
2.0E1	2.4794E4	1.1E1	8.08E2	5.58E2	-7.23964E-2	-8.80018E1	-4.05312E-4	-8.80009E1	2.86102E-4	4.48227E-3	9.48668E-2	2.73219E1	-3.26633E1	-3.26362E1	2.68118E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01347E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80014E1	-2.86102E-4	-8.80005E1	6.4373E-4	4.60148E-3	9.50575E-2	2.73187E1	-3.26644E1	-3.26526E1	2.6837E1	1.19757E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9952E-1
2.2E1	1.736E3	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80015E1	-5.24521E-4	-8.80009E1	6.91414E-4	4.62532E-3	9.49383E-2	2.73147E1	-3.26945E1	-3.26332E1	2.68617E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80016E1	-5.72205E-4	-8.80007E1	5.48363E-4	4.50611E-3	9.48191E-2	2.7321E1	-3.26992E1	-3.26337E1	2.68574E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1