[Scan]
initial_time=2016-01-18T22:38:20
final_time=2016-01-18T22:38:41
ip_count=19
run=1024
dataset=10
scan=742
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.80456E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-7.93827E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.43073E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.57809E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.61302E-8
mult1=-1.80845E-8
mult2=-2.68667E-9
rf_tmon=-3.61119E-3
rf_agc=3.40365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.64218E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.75066E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.58609E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98818E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64735E1
os_ef1alow_imon=2.9658E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.46339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=2.90352E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.19204E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11619E1
os_restr1_imon=4.27255E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14904E1
os_ea1_imon=2.41195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63444E1
os_ef1bup_imon=3.07372E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.18059E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.89503E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.92542E-8
tplens_vset=1.4E-1
tplens_vmon=1.67919E0
tplens_imon=-4.08609E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98063E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=8.79538E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30578E0
ionrepsh_imon=1.74123E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74637E1
cs_ef2b_imon=3.12751E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4096E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.16643E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04542E0
os_ef2alow_imon=-2.60902E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9762E-1
os_ef2bup_imon=-5.20623E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10958E1
os_restr2_imon=3.37626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.24042E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68532E1
iondef4_imon=1.09821E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.81836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.19466E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15668E0
cs_ionaccel_imon=-1.74564E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47538E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56293E1
einzel_imon=7.76922E-6
window_vset=0.0E0
window_vmon=2.52607E-1
window_imon=-8.50415E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86438E1
mask2_imon=-7.72569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9258E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.99583E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.41435E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07388E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62011E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=9.94565E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62855E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63105E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.63812E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86749E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.0592E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3391E-1
cs_fil2_imon=-2.12505E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.76731E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21908E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.85747E-1
res40_imon=-2.54179E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.843E3	3.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80015E1	-7.15256E-5	-8.80006E1	1.90735E-4	4.43459E-3	9.50813E-2	2.7347E1	-3.26685E1	-3.26101E1	2.68325E1	1.198E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00197E-1
2.0E0	9.8523E4	9.2E1	3.16E2	1.6E2	-7.30146E-2	-8.80014E1	-1.90735E-4	-8.80007E1	2.86102E-4	4.41074E-3	9.52244E-2	2.73327E1	-3.26801E1	-3.26056E1	2.68286E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80015E1	9.53674E-5	-8.80008E1	2.14577E-4	4.69685E-3	9.51052E-2	2.73363E1	-3.26849E1	-3.26567E1	2.68082E1	1.20174E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.02133E-1
4.0E0	2.1513E4	1.0E1	6.55E2	3.98E2	-7.17779E-2	-8.80013E1	-3.09944E-4	-8.80006E1	3.33786E-4	4.93526E-3	9.50098E-2	2.73322E1	-3.26738E1	-3.26178E1	2.68196E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80013E1	-6.91414E-4	-8.80004E1	6.19888E-4	4.76837E-3	9.52959E-2	2.73293E1	-3.26614E1	-3.26189E1	2.68563E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80014E1	-3.8147E-4	-8.80004E1	4.52995E-4	4.62532E-3	9.5129E-2	2.73216E1	-3.27001E1	-3.25972E1	2.68307E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.97901E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80015E1	-2.38419E-4	-8.80006E1	5.24521E-4	4.88758E-3	9.48191E-2	2.73309E1	-3.26404E1	-3.26164E1	2.6852E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.98026E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80014E1	0.0E0	-8.80006E1	7.62939E-4	4.76837E-3	9.47475E-2	2.73204E1	-3.26726E1	-3.26266E1	2.68458E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.2E1	7.7E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80014E1	0.0E0	-8.80007E1	6.19888E-4	4.88758E-3	9.50575E-2	2.73285E1	-3.26825E1	-3.26326E1	2.68286E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01738E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80015E1	-2.38419E-5	-8.80008E1	7.62939E-4	5.03063E-3	9.51529E-2	2.7318E1	-3.26591E1	-3.25874E1	2.6802E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00302E-1
1.4E1	3.229E3	3.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80017E1	-2.86102E-4	-8.8001E1	6.4373E-4	5.03063E-3	9.50336E-2	2.73257E1	-3.26549E1	-3.26425E1	2.68731E1	1.19925E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.00144E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80019E1	-4.29153E-4	-8.80006E1	7.86781E-4	4.86374E-3	9.52005E-2	2.7337E1	-3.26455E1	-3.26366E1	2.68569E1	1.20158E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00197E-1
1.6E1	4.06E2	0.0E0	6.47E2	4.41E2	-7.08504E-2	-8.80016E1	-5.96046E-4	-8.80009E1	7.86781E-4	4.52995E-3	9.49144E-2	2.7321E1	-3.26744E1	-3.26266E1	2.68136E1	1.20517E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
1.7E1	7.97E2	0.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80019E1	-4.29153E-4	-8.8001E1	7.39098E-4	4.72069E-3	9.49383E-2	2.73219E1	-3.2647E1	-3.26368E1	2.68088E1	1.20191E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.01475E-1
1.8E1	3.394E3	1.0E0	7.27E2	5.0E2	-7.11597E-2	-8.80015E1	-4.52995E-4	-8.80006E1	6.67572E-4	4.33922E-3	9.48191E-2	2.73225E1	-3.26627E1	-3.2635E1	2.68274E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01347E-1
1.9E1	1.935E3	0.0E0	7.68E2	5.29E2	-7.08504E-2	-8.80015E1	-2.38419E-4	-8.80006E1	7.86781E-4	4.41074E-3	9.51052E-2	2.73098E1	-3.2662E1	-3.26555E1	2.68707E1	1.198E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00453E-1
2.0E1	2.4754E4	1.3E1	8.08E2	5.58E2	-7.09279E-2	-8.80016E1	2.38419E-5	-8.80006E1	7.39098E-4	4.3869E-3	9.51529E-2	2.73216E1	-3.26658E1	-3.26015E1	2.6795E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.06187E-2	-8.80014E1	-2.6226E-4	-8.80005E1	5.96046E-4	4.05312E-3	9.5129E-2	2.73126E1	-3.26666E1	-3.2648E1	2.68644E1	1.19978E-7	2.52139E-3	2.52139E-3	6.29067E-3	2.97762E-1
2.2E1	1.667E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80011E1	-9.53674E-5	-8.80008E1	3.33786E-4	4.33922E-3	9.5129E-2	2.73464E1	-3.2662E1	-3.26284E1	2.6807E1	1.20243E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80014E1	-5.96046E-4	-8.80008E1	7.86781E-4	4.52995E-3	9.50336E-2	2.73243E1	-3.26735E1	-3.26332E1	2.68532E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1