[Scan]
initial_time=2016-01-18T22:38:49
final_time=2016-01-18T22:39:10
ip_count=19
run=1024
dataset=10
scan=743
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.74325E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.75707E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.42936E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.63754E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.61875E-8
mult1=-1.71953E-8
mult2=-2.64094E-9
rf_tmon=-4.41509E-3
rf_agc=3.32324E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.60904E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.30966E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.194E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.747E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.58786E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03419E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.47507E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.89837E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.18744E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.28049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.42858E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.06451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.18731E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=2.89765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.91453E-8
tplens_vset=1.4E-1
tplens_vmon=1.64851E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98087E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.2268E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=1.71008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41727E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71504E1
cs_ef2a_imon=3.15101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03954E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.39067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.22262E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.80114E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.14592E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.06708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.31981E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.40414E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61858E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.94636E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63279E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63006E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21107E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21923E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67701E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.914E3	1.0E0	1.47E2	4.1E1	-7.08504E-2	-8.80016E1	-6.19888E-4	-8.80005E1	5.24521E-4	4.64916E-3	9.55343E-2	2.73334E1	-3.27051E1	-3.25977E1	2.68186E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
2.0E0	9.7693E4	9.6E1	3.16E2	1.6E2	-7.18554E-2	-8.80015E1	-3.57628E-4	-8.80006E1	5.00679E-4	4.57764E-3	9.50575E-2	2.73069E1	-3.26854E1	-3.26125E1	2.68088E1	1.20004E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.99941E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80017E1	-4.29153E-4	-8.80005E1	7.15256E-4	4.22001E-3	9.51767E-2	2.72976E1	-3.2644E1	-3.26046E1	2.68209E1	1.19856E-7	2.52189E-3	2.52189E-3	6.31827E-3	3.01544E-1
4.0E0	2.135E4	1.3E1	6.55E2	3.98E2	-7.13915E-2	-8.80017E1	2.38419E-5	-8.80005E1	8.10623E-4	4.36306E-3	9.52482E-2	2.73063E1	-3.26801E1	-3.26392E1	2.68641E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80016E1	-2.6226E-4	-8.80005E1	6.4373E-4	4.69685E-3	9.53674E-2	2.73183E1	-3.26687E1	-3.26386E1	2.68629E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80016E1	-5.48363E-4	-8.80005E1	4.52995E-4	4.57764E-3	9.52721E-2	2.73243E1	-3.26404E1	-3.26152E1	2.68418E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80017E1	-5.00679E-4	-8.80004E1	2.14577E-4	4.62532E-3	9.50813E-2	2.73075E1	-3.26861E1	-3.2611E1	2.68593E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80013E1	-5.00679E-4	-8.80006E1	6.19888E-4	4.64916E-3	9.48906E-2	2.72815E1	-3.26248E1	-3.26573E1	2.68302E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.97394E-1
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80017E1	-1.66893E-4	-8.80008E1	5.72205E-4	4.95911E-3	9.47714E-2	2.73393E1	-3.26549E1	-3.26206E1	2.68767E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80016E1	-3.57628E-4	-8.80007E1	7.39098E-4	4.8399E-3	9.50575E-2	2.73315E1	-3.26795E1	-3.26585E1	2.68022E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
1.4E1	3.319E3	3.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80018E1	-2.14577E-4	-8.80007E1	5.72205E-4	4.52995E-3	9.52005E-2	2.73243E1	-3.26476E1	-3.26134E1	2.68514E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02133E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80017E1	-1.90735E-4	-8.80008E1	3.57628E-4	4.52995E-3	9.51529E-2	2.73279E1	-3.26699E1	-3.26308E1	2.68352E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-1.19209E-4	-8.80007E1	8.58307E-4	4.3869E-3	9.51767E-2	2.73346E1	-3.26927E1	-3.26437E1	2.6825E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.7E1	7.73E2	1.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80016E1	-7.15256E-5	-8.80008E1	4.52995E-4	4.36306E-3	9.52959E-2	2.73175E1	-3.26154E1	-3.26413E1	2.68111E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.97647E-1
1.8E1	3.317E3	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80016E1	-1.90735E-4	-8.80007E1	5.24521E-4	4.43459E-3	9.5129E-2	2.73388E1	-3.26878E1	-3.26432E1	2.686E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9892E-1
1.9E1	1.881E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80017E1	-4.76837E-5	-8.80006E1	4.52995E-4	4.69685E-3	9.53436E-2	2.73225E1	-3.26789E1	-3.2623E1	2.68502E1	1.19978E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.98554E-1
2.0E1	2.4748E4	1.1E1	8.08E2	5.58E2	-7.30146E-2	-8.80015E1	-4.76837E-5	-8.80006E1	5.24521E-4	4.64916E-3	9.53674E-2	2.73515E1	-3.26523E1	-3.26383E1	2.6819E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80013E1	2.6226E-4	-8.80007E1	4.29153E-4	4.81606E-3	9.50336E-2	2.73293E1	-3.26565E1	-3.26279E1	2.684E1	1.19956E-7	2.51723E-3	2.51723E-3	6.29237E-3	3.00293E-1
2.2E1	1.771E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80013E1	-9.53674E-5	-8.80005E1	5.00679E-4	4.673E-3	9.51529E-2	2.73458E1	-3.26579E1	-3.26266E1	2.68184E1	1.20116E-7	2.51874E-3	2.51874E-3	6.34231E-3	3.00916E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80018E1	4.76837E-5	-8.80007E1	6.67572E-4	4.45843E-3	9.54628E-2	2.73187E1	-3.26526E1	-3.26178E1	2.68256E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1