[Scan]
initial_time=2016-01-18T22:39:18
final_time=2016-01-18T22:39:40
ip_count=19
run=1024
dataset=10
scan=744
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.82152E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.20649E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.43094E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.56506E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.6175E-8
mult1=-2.1652E-8
mult2=-2.69582E-9
rf_tmon=-3.44765E-3
rf_agc=3.41704E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.87606E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12442E2
lens4a_imon=2.04761E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=2.747E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04537E1
cs_ea1_imon=2.57717E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97707E0
lens1_imon=1.86723E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04159E1
cs_ea2_imon=1.49316E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.9117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.18637E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.40629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.20512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.88179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.91454E-8
tplens_vset=1.4E-1
tplens_vmon=1.58315E0
tplens_imon=-5.98557E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2698E1
iondef2_imon=1.5512E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=8.6844E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33982E0
ionrepsh_imon=1.74514E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33375E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41552E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00334E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22996E2
cs_ionfoca_imon=6.28126E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.81924E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.16429E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=6.58611E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.27466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=5.71011E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.39663E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61819E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.93068E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63183E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31065E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21942E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68903E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.94E3	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80016E1	-3.8147E-4	-8.80006E1	5.48363E-4	4.55379E-3	9.49383E-2	2.73328E1	-3.26254E1	-3.26083E1	2.68683E1	1.19965E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00824E-1
2.0E0	9.8309E4	9.3E1	3.16E2	1.6E2	-7.34782E-2	-8.80015E1	-1.43051E-4	-8.80008E1	6.91414E-4	4.60148E-3	9.48668E-2	2.73327E1	-3.26657E1	-3.26398E1	2.67974E1	1.1974E-7	2.51182E-3	2.51182E-3	6.33388E-3	3.02368E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80017E1	-4.05312E-4	-8.80006E1	6.19888E-4	4.62532E-3	9.50098E-2	2.73252E1	-3.2636E1	-3.26284E1	2.6843E1	1.19978E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.0041E-1
4.0E0	2.1586E4	8.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80016E1	-4.76837E-4	-8.80007E1	5.96046E-4	4.52995E-3	9.4676E-2	2.73039E1	-3.26518E1	-3.26332E1	2.68244E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80014E1	-5.48363E-4	-8.80008E1	6.91414E-4	4.64916E-3	9.49144E-2	2.73676E1	-3.26897E1	-3.26248E1	2.68587E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80013E1	-7.15256E-5	-8.80007E1	2.86102E-4	4.19617E-3	9.50098E-2	2.73446E1	-3.26632E1	-3.26124E1	2.68382E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80017E1	-9.53674E-5	-8.80006E1	5.72205E-4	4.57764E-3	9.5129E-2	2.73165E1	-3.26212E1	-3.26254E1	2.6819E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80018E1	-7.15256E-5	-8.80007E1	5.24521E-4	4.29153E-3	9.52482E-2	2.73196E1	-3.26637E1	-3.26109E1	2.68383E1	1.19705E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80013E1	-1.90735E-4	-8.80004E1	3.33786E-4	4.26769E-3	9.5129E-2	2.73057E1	-3.26578E1	-3.26285E1	2.68532E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00852E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80017E1	-3.09944E-4	-8.80006E1	5.48363E-4	4.48227E-3	9.52244E-2	2.73153E1	-3.26272E1	-3.26122E1	2.68683E1	1.20403E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.98819E-1
1.4E1	3.132E3	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80017E1	-2.38419E-4	-8.80005E1	8.58307E-4	4.57764E-3	9.49383E-2	2.73161E1	-3.26521E1	-3.26434E1	2.68146E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.98481E-1
1.5E1	9.0E1	1.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80013E1	-2.86102E-4	-8.80007E1	7.15256E-4	4.57764E-3	9.5129E-2	2.73129E1	-3.2647E1	-3.26188E1	2.68136E1	1.1979E-7	2.52131E-3	2.52131E-3	6.29684E-3	3.00348E-1
1.6E1	4.33E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80014E1	-2.14577E-4	-8.80006E1	5.96046E-4	4.74453E-3	9.50575E-2	2.73027E1	-3.26697E1	-3.26331E1	2.68196E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
1.7E1	7.77E2	0.0E0	6.87E2	4.7E2	-7.11597E-2	-8.80014E1	1.43051E-4	-8.80007E1	4.05312E-4	4.8399E-3	9.5129E-2	2.73327E1	-3.26657E1	-3.26206E1	2.68256E1	1.19653E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9978E-1
1.8E1	3.285E3	2.0E0	7.27E2	5.0E2	-7.08504E-2	-8.80011E1	-9.53674E-5	-8.80005E1	5.24521E-4	4.95911E-3	9.50098E-2	2.73277E1	-3.26425E1	-3.26223E1	2.68611E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02133E-1
1.9E1	1.911E3	1.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80014E1	-2.14577E-4	-8.80005E1	6.67572E-4	4.57764E-3	9.50813E-2	2.73364E1	-3.2688E1	-3.26437E1	2.68214E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.0201E-1
2.0E1	2.4497E4	1.5E1	8.08E2	5.58E2	-7.11597E-2	-8.80014E1	-3.09944E-4	-8.80006E1	8.34465E-4	4.43459E-3	9.50098E-2	2.73339E1	-3.26344E1	-3.26512E1	2.68016E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80015E1	7.15256E-5	-8.80005E1	6.67572E-4	4.36306E-3	9.51052E-2	2.73207E1	-3.26452E1	-3.26512E1	2.68665E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98481E-1
2.2E1	1.696E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80015E1	-1.19209E-4	-8.80009E1	6.4373E-4	4.74453E-3	9.50336E-2	2.73429E1	-3.26585E1	-3.2638E1	2.6843E1	1.19953E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.9892E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80015E1	-2.38419E-5	-8.8001E1	4.76837E-4	4.36306E-3	9.49621E-2	2.73476E1	-3.2698E1	-3.26349E1	2.68412E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1