[Scan]
initial_time=2016-01-18T22:40:16
final_time=2016-01-18T22:40:38
ip_count=19
run=1024
dataset=10
scan=746
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.06958E-2
qbias_imon=-3.79657E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.38912E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.46182E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.49132E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.61473E-8
mult1=-1.86865E-8
mult2=-2.65274E-9
rf_tmon=-5.19136E-3
rf_agc=3.30932E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.38981E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.74592E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.58185E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0035E0
lens1_imon=1.42022E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.46576E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.89152E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.18704E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14795E1
os_ea1_imon=2.42071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.16655E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.89188E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.9194E-8
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26038E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.5494E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98079E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=9.08971E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.72027E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33399E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42393E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.23308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73502E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67571E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.81896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81045E-1
olens1_imon=7.17276E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82662E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.5198E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.41308E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.41922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61848E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.952E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62756E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.09023E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.26856E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.842E3	2.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80018E1	-5.48363E-4	-8.80007E1	2.38419E-4	4.52995E-3	9.49621E-2	2.7337E1	-3.26921E1	-3.26113E1	2.68052E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
2.0E0	9.9017E4	1.07E2	3.16E2	1.6E2	-7.17779E-2	-8.80017E1	-7.15256E-4	-8.80008E1	3.57628E-4	4.50611E-3	9.50098E-2	2.73039E1	-3.26616E1	-3.26379E1	2.68612E1	1.20004E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.00197E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80014E1	-2.86102E-4	-8.80006E1	2.86102E-4	4.81606E-3	9.52482E-2	2.73167E1	-3.2633E1	-3.2604E1	2.68348E1	1.20137E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00676E-1
4.0E0	2.1283E4	1.6E1	6.55E2	3.98E2	-7.14689E-2	-8.80016E1	-3.57628E-4	-8.80006E1	1.19209E-4	4.8399E-3	9.51767E-2	2.73195E1	-3.26627E1	-3.26056E1	2.68502E1	1.19646E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80015E1	-3.09944E-4	-8.8001E1	6.67572E-4	4.76837E-3	9.50575E-2	2.73311E1	-3.26337E1	-3.26071E1	2.68453E1	1.198E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80016E1	-2.6226E-4	-8.80013E1	4.05312E-4	4.673E-3	9.49144E-2	2.73198E1	-3.2639E1	-3.26614E1	2.6825E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80018E1	-9.53674E-5	-8.80009E1	6.19888E-4	4.45843E-3	9.49383E-2	2.73137E1	-3.26762E1	-3.26034E1	2.6846E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80017E1	-4.52995E-4	-8.8001E1	5.48363E-4	4.48227E-3	9.50336E-2	2.73201E1	-3.26819E1	-3.26218E1	2.68256E1	1.19713E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.0041E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.8002E1	-6.67572E-4	-8.8001E1	5.24521E-4	4.29153E-3	9.49383E-2	2.73315E1	-3.26518E1	-3.2638E1	2.68635E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80018E1	-7.39098E-4	-8.80007E1	3.57628E-4	4.3869E-3	9.45807E-2	2.73252E1	-3.26071E1	-3.26419E1	2.681E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
1.4E1	3.235E3	1.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80021E1	-8.34465E-4	-8.80005E1	3.57628E-4	4.50611E-3	9.46999E-2	2.73634E1	-3.26579E1	-3.2635E1	2.68328E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00302E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80018E1	-3.8147E-4	-8.80008E1	4.52995E-4	4.19617E-3	9.49144E-2	2.73297E1	-3.26795E1	-3.26266E1	2.68136E1	1.20278E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01347E-1
1.6E1	4.43E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80018E1	-5.72205E-4	-8.80007E1	4.52995E-4	4.33922E-3	9.4986E-2	2.73045E1	-3.26621E1	-3.26104E1	2.68262E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.7E1	8.38E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80016E1	-2.14577E-4	-8.80008E1	3.8147E-4	4.22001E-3	9.4986E-2	2.7355E1	-3.26554E1	-3.2647E1	2.68593E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
1.8E1	3.364E3	3.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80017E1	-5.00679E-4	-8.80007E1	3.33786E-4	4.33922E-3	9.5129E-2	2.73574E1	-3.26224E1	-3.26416E1	2.68484E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01223E-1
1.9E1	1.957E3	3.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80017E1	-4.05312E-4	-8.80003E1	5.00679E-4	4.33922E-3	9.47952E-2	2.73429E1	-3.26909E1	-3.26458E1	2.681E1	1.19501E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.98819E-1
2.0E1	2.4399E4	1.5E1	8.08E2	5.58E2	-7.13915E-2	-8.80017E1	-4.29153E-4	-8.80006E1	5.48363E-4	4.64916E-3	9.4986E-2	2.73297E1	-3.26783E1	-3.262E1	2.68761E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.96929E-1
2.1E1	4.5E1	0.0E0	8.49E2	5.88E2	-7.13143E-2	-8.80015E1	0.0E0	-8.80004E1	5.48363E-4	4.673E-3	9.47714E-2	2.73145E1	-3.26585E1	-3.26331E1	2.6796E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98481E-1
2.2E1	1.707E3	0.0E0	8.89E2	6.17E2	-7.10051E-2	-8.80016E1	-1.43051E-4	-8.80006E1	5.96046E-4	4.22001E-3	9.47952E-2	2.73163E1	-3.2659E1	-3.26354E1	2.6849E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.06958E-2	-8.80015E1	-2.86102E-4	-8.80011E1	4.52995E-4	4.26769E-3	9.49383E-2	2.73502E1	-3.26476E1	-3.26038E1	2.67571E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.0071E-1