[Scan]
initial_time=2016-01-18T22:40:46
final_time=2016-01-18T22:41:07
ip_count=19
run=1024
dataset=10
scan=747
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.79411E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-7.4774E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.43085E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.47513E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.61361E-8
mult1=-1.73844E-8
mult2=-2.78205E-9
rf_tmon=-4.00806E-3
rf_agc=3.30437E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.62561E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.24215E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.74308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.60384E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0005E0
lens1_imon=1.49953E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6495E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.48559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=2.89077E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.18637E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.27879E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14915E1
os_ea1_imon=2.42143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.19467E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.89425E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.92194E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25995E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.5512E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=9.41551E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.72243E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.15539E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45698E0
os_ea2_imon=-8.47299E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.15489E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86805E-1
os_ef2bup_imon=-5.32698E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11419E1
os_restr2_imon=3.38252E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.23291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08885E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.80355E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.15808E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13651E0
cs_ionaccel_imon=-1.69534E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56712E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.68077E-1
window_imon=-7.98728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-7.70926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=6.94301E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.61856E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42136E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07277E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61754E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30876E1
cs_fil1_imon=9.94757E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62256E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62773E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.75027E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25006E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34521E-1
cs_fil2_imon=-2.57072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33315E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.66157E-1
res40_imon=-2.56763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.874E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80019E1	-5.00679E-4	-8.80011E1	2.38419E-4	4.69685E-3	9.53197E-2	2.73246E1	-3.26602E1	-3.26443E1	2.6804E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9952E-1
2.0E0	9.7525E4	1.01E2	3.16E2	1.6E2	-7.20871E-2	-8.80016E1	-4.29153E-4	-8.80008E1	5.72205E-4	4.52995E-3	9.51052E-2	2.73183E1	-3.26633E1	-3.26284E1	2.68701E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98222E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80017E1	-6.4373E-4	-8.80006E1	3.57628E-4	4.60148E-3	9.4986E-2	2.73405E1	-3.2659E1	-3.26248E1	2.68142E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.97963E-1
4.0E0	2.1368E4	1.6E1	6.55E2	3.98E2	-7.22418E-2	-8.80017E1	-3.09944E-4	-8.80008E1	7.15256E-4	4.64916E-3	9.50575E-2	2.73423E1	-3.26661E1	-3.26254E1	2.68505E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80016E1	-5.00679E-4	-8.80009E1	5.00679E-4	4.31538E-3	9.48906E-2	2.73147E1	-3.26795E1	-3.26038E1	2.68412E1	1.20311E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80014E1	-4.29153E-4	-8.8001E1	7.39098E-4	4.64916E-3	9.4986E-2	2.73301E1	-3.26795E1	-3.26044E1	2.68551E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80013E1	-4.29153E-4	-8.80009E1	3.57628E-4	4.64916E-3	9.49383E-2	2.73213E1	-3.26539E1	-3.26364E1	2.6826E1	1.2021E-7	2.5165E-3	2.5165E-3	6.31761E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80016E1	-3.8147E-4	-8.80009E1	4.05312E-4	4.76837E-3	9.47714E-2	2.73033E1	-3.26703E1	-3.26272E1	2.68165E1	1.19738E-7	2.51321E-3	2.51321E-3	6.30149E-3	2.99916E-1
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80018E1	-5.96046E-4	-8.80007E1	4.52995E-4	4.48227E-3	9.53436E-2	2.73234E1	-3.26531E1	-3.25794E1	2.68641E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80017E1	-5.72205E-4	-8.80005E1	5.72205E-4	4.55379E-3	9.51529E-2	2.73277E1	-3.26811E1	-3.26621E1	2.68292E1	1.19902E-7	2.51203E-3	2.51203E-3	6.28592E-3	3.02253E-1
1.4E1	3.237E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80019E1	-5.96046E-4	-8.80006E1	7.39098E-4	4.43459E-3	9.50813E-2	2.73104E1	-3.26437E1	-3.26071E1	2.68256E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00824E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80017E1	-6.4373E-4	-8.80004E1	5.72205E-4	4.43459E-3	9.49383E-2	2.73273E1	-3.26585E1	-3.26158E1	2.6834E1	1.19705E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.6E1	4.19E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80016E1	-3.57628E-4	-8.80007E1	4.29153E-4	4.50611E-3	9.48906E-2	2.73255E1	-3.26633E1	-3.2635E1	2.68472E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
1.7E1	7.94E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80015E1	-5.72205E-4	-8.80006E1	5.24521E-4	4.69685E-3	9.50098E-2	2.72901E1	-3.26428E1	-3.26122E1	2.68659E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.8E1	3.279E3	3.0E0	7.27E2	5.0E2	-7.201E-2	-8.80015E1	-6.91414E-4	-8.80006E1	4.05312E-4	4.52995E-3	9.52244E-2	2.73369E1	-3.26627E1	-3.26026E1	2.67986E1	1.19705E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.97963E-1
1.9E1	1.849E3	2.0E0	7.68E2	5.29E2	-7.286E-2	-8.80015E1	-4.05312E-4	-8.80007E1	3.09944E-4	4.43459E-3	9.53197E-2	2.73057E1	-3.26615E1	-3.26621E1	2.68629E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
2.0E1	2.5149E4	2.3E1	8.08E2	5.58E2	-7.29374E-2	-8.80014E1	-4.29153E-4	-8.80007E1	5.24521E-4	4.64916E-3	9.51529E-2	2.73602E1	-3.26609E1	-3.26542E1	2.67884E1	1.19861E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00563E-1
2.1E1	5.4E1	1.0E0	8.49E2	5.88E2	-7.201E-2	-8.80015E1	-3.09944E-4	-8.80006E1	3.8147E-4	4.55379E-3	9.52005E-2	2.7308E1	-3.26405E1	-3.26249E1	2.68424E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
2.2E1	1.776E3	1.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80015E1	-2.86102E-4	-8.80009E1	6.91414E-4	4.33922E-3	9.50813E-2	2.73357E1	-3.26543E1	-3.26236E1	2.68142E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80013E1	-4.05312E-4	-8.8001E1	5.00679E-4	4.36306E-3	9.51052E-2	2.73375E1	-3.26767E1	-3.25995E1	2.68178E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9892E-1