[Scan]
initial_time=2016-01-18T22:42:41
final_time=2016-01-18T22:43:01
ip_count=19
run=1024
dataset=10
scan=751
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.79645E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.38072E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.42554E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.37291E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.61761E-8
mult1=-2.2383E-8
mult2=-2.83039E-9
rf_tmon=-4.01975E-3
rf_agc=3.43129E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.55456E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.40876E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54096E1
cs_ef1b_imon=2.74516E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02061E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=2.60626E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01649E0
lens1_imon=1.44604E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.96862E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04103E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84539E1
cs_ef1a_imon=2.90745E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.17776E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=4.27879E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.41089E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.0694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.1682E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01688E1
cs_anode1_imon=2.89147E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.91059E-8
tplens_vset=1.4E-1
tplens_vmon=1.65441E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.55824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98031E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=9.11522E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.71787E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.16702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4037E0
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.16671E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09221E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70587E-1
os_ef2bup_imon=-5.1845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.26035E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.24472E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.80955E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.11664E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15447E0
cs_ionaccel_imon=-1.68492E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56504E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.29849E-1
window_imon=-7.95253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86414E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.28961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34059E0
defgridb_imon=5.9871E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.43075E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06918E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.95053E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63293E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62722E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88906E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.36221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21731E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21936E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.46087E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.83E3	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80014E1	-2.6226E-4	-8.80006E1	6.4373E-4	4.69685E-3	9.51529E-2	2.73546E1	-3.26449E1	-3.26372E1	2.68653E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02396E-1
2.0E0	9.8046E4	8.6E1	3.16E2	1.6E2	-7.21643E-2	-8.80013E1	-2.14577E-4	-8.80008E1	3.57628E-4	4.48227E-3	9.54151E-2	2.73339E1	-3.26705E1	-3.2653E1	2.68262E1	1.1974E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.02368E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80016E1	-5.72205E-4	-8.80005E1	3.09944E-4	4.673E-3	9.51767E-2	2.73269E1	-3.26773E1	-3.26331E1	2.6822E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02133E-1
4.0E0	2.1513E4	5.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80013E1	-3.57628E-4	-8.80008E1	5.00679E-4	4.41074E-3	9.52005E-2	2.73231E1	-3.26494E1	-3.26549E1	2.68358E1	1.20055E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10051E-2	-8.80012E1	-3.33786E-4	-8.80005E1	2.14577E-4	4.43459E-3	9.52721E-2	2.73333E1	-3.26585E1	-3.26218E1	2.68238E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80013E1	-6.4373E-4	-8.80004E1	3.57628E-4	4.3869E-3	9.5129E-2	2.73576E1	-3.26862E1	-3.26644E1	2.68575E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80014E1	-3.09944E-4	-8.80007E1	4.29153E-4	4.31538E-3	9.53674E-2	2.73236E1	-3.26955E1	-3.26075E1	2.68082E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80013E1	-7.39098E-4	-8.80007E1	6.19888E-4	4.22001E-3	9.5129E-2	2.73241E1	-3.26866E1	-3.25966E1	2.6846E1	1.1974E-7	2.51603E-3	2.51603E-3	6.2863E-3	3.00097E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80013E1	-5.48363E-4	-8.80006E1	5.48363E-4	4.64916E-3	9.53913E-2	2.73134E1	-3.2675E1	-3.2603E1	2.68496E1	1.19925E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00144E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80016E1	-5.00679E-4	-8.80005E1	8.34465E-4	4.41074E-3	9.52244E-2	2.73496E1	-3.26777E1	-3.25647E1	2.68016E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
1.4E1	3.282E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80015E1	-4.29153E-4	-8.80006E1	7.62939E-4	4.57764E-3	9.53197E-2	2.73604E1	-3.26951E1	-3.26086E1	2.68611E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97963E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80016E1	-3.8147E-4	-8.80006E1	8.10623E-4	4.50611E-3	9.51529E-2	2.73111E1	-3.2632E1	-3.26224E1	2.6837E1	1.20403E-7	2.51915E-3	2.51915E-3	6.34661E-3	2.99348E-1
1.6E1	4.65E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80016E1	-6.19888E-4	-8.80007E1	6.67572E-4	4.673E-3	9.52244E-2	2.73033E1	-3.26549E1	-3.26086E1	2.6831E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99175E-1
1.7E1	7.75E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80016E1	-5.96046E-4	-8.80007E1	5.48363E-4	4.48227E-3	9.49621E-2	2.7349E1	-3.26374E1	-3.26561E1	2.6855E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.8E1	3.272E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80018E1	-5.24521E-4	-8.80008E1	5.00679E-4	4.64916E-3	9.49383E-2	2.73429E1	-3.26951E1	-3.26026E1	2.68364E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
1.9E1	1.877E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80017E1	-5.00679E-4	-8.80006E1	3.8147E-4	4.72069E-3	9.50098E-2	2.73405E1	-3.26602E1	-3.26065E1	2.68372E1	1.20122E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.95899E-1
2.0E1	2.4806E4	1.3E1	8.08E2	5.58E2	-7.20871E-2	-8.8002E1	-4.76837E-4	-8.80007E1	5.48363E-4	4.17233E-3	9.50098E-2	2.73243E1	-3.26512E1	-3.26248E1	2.68268E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.96414E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80019E1	-7.15256E-4	-8.80006E1	4.29153E-4	4.22001E-3	9.48906E-2	2.73508E1	-3.26506E1	-3.26092E1	2.68112E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99175E-1
2.2E1	1.798E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80019E1	-6.19888E-4	-8.80009E1	5.00679E-4	4.02927E-3	9.50336E-2	2.73126E1	-3.26521E1	-3.26544E1	2.68603E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9874E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.8002E1	-3.57628E-4	-8.80008E1	4.29153E-4	4.3869E-3	9.52482E-2	2.73135E1	-3.26621E1	-3.26194E1	2.68334E1	1.19891E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.006E-1