[Scan]
initial_time=2016-01-18T22:44:58
final_time=2016-01-18T22:45:18
ip_count=19
run=1024
dataset=10
scan=756
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.75641E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.76124E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.49204E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.48874E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.62007E-8
mult1=-1.21374E-8
mult2=-2.69142E-9
rf_tmon=-5.64798E-3
rf_agc=3.22203E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.58317E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63055E0
bslens_imon=2.31166E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19529E1
lens5a_imon=2.00337E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04828E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.73475E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02441E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04884E1
cs_ea1_imon=2.6197E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96799E0
lens1_imon=1.50361E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.49724E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.89837E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.18019E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.44119E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26924E0
cs_ionrep_imon=1.17402E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.88936E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.91148E-8
tplens_vset=1.4E-1
tplens_vmon=1.6702E0
tplens_imon=-1.41884E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.47961E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.5696E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.97898E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=9.09388E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26679E0
ionrepsh_imon=1.73562E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.15507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38739E0
os_ea2_imon=-8.14038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.14884E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04735E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.37878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73149E1
iondef1_imon=1.11084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7816E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.11294E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.52649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.14529E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.75228E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.20406E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.425E0
defgridb_imon=6.1242E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.40816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6163E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30983E1
cs_fil1_imon=9.92323E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63063E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62646E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10672E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25901E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21933E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.4819E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.791E3	4.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80024E1	-4.05312E-4	-8.80006E1	5.00679E-4	4.48227E-3	9.52482E-2	2.73293E1	-3.26531E1	-3.26012E1	2.68424E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
2.0E0	9.8038E4	9.7E1	3.16E2	1.6E2	-7.30918E-2	-8.80025E1	-2.14577E-4	-8.80005E1	3.33786E-4	4.79221E-3	9.49621E-2	2.73147E1	-3.26705E1	-3.26092E1	2.6848E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99686E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80023E1	9.53674E-5	-8.80008E1	5.96046E-4	4.12464E-3	9.51052E-2	2.73004E1	-3.26537E1	-3.26455E1	2.68464E1	1.20069E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.98481E-1
4.0E0	2.1703E4	1.0E1	6.55E2	3.98E2	-7.21643E-2	-8.80018E1	-1.43051E-4	-8.80006E1	7.15256E-4	4.24385E-3	9.53436E-2	2.72892E1	-3.26484E1	-3.26455E1	2.68184E1	1.19841E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-2.6226E-4	-8.80005E1	6.4373E-4	4.17233E-3	9.53197E-2	2.73255E1	-3.26543E1	-3.25978E1	2.6822E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80021E1	-3.33786E-4	-8.80006E1	4.05312E-4	4.24385E-3	9.5129E-2	2.72913E1	-3.26801E1	-3.26188E1	2.68214E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80019E1	-6.91414E-4	-8.80004E1	4.52995E-4	4.26769E-3	9.51767E-2	2.73129E1	-3.26554E1	-3.26002E1	2.68581E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
8.0E0	1.0E0	1.0E0	1.332E3	8.73E2	-7.08504E-2	-8.8002E1	-6.4373E-4	-8.80005E1	5.00679E-4	4.1008E-3	9.52482E-2	2.73398E1	-3.26704E1	-3.25833E1	2.68557E1	1.19861E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.07733E-2	-8.80019E1	-9.05991E-4	-8.80005E1	5.00679E-4	4.24385E-3	9.46522E-2	2.73293E1	-3.26604E1	-3.25936E1	2.68367E1	1.1988E-7	2.51886E-3	2.51886E-3	6.29703E-3	3.0E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80021E1	-1.0252E-3	-8.80006E1	4.29153E-4	4.3869E-3	9.50813E-2	2.73688E1	-3.26687E1	-3.2608E1	2.68316E1	1.20171E-7	2.51527E-3	2.51527E-3	6.31321E-3	2.9926E-1
1.4E1	3.231E3	2.0E0	5.66E2	3.82E2	-7.201E-2	-8.80021E1	-6.91414E-4	-8.80004E1	2.38419E-4	4.76837E-3	9.53913E-2	2.73357E1	-3.26603E1	-3.265E1	2.68244E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80022E1	-5.96046E-4	-8.80007E1	6.19888E-4	4.55379E-3	9.52244E-2	2.73239E1	-3.26636E1	-3.25884E1	2.68082E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.03185E-1
1.6E1	4.0E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80018E1	-6.19888E-4	-8.80005E1	7.15256E-5	4.50611E-3	9.52244E-2	2.73394E1	-3.26401E1	-3.26278E1	2.68762E1	1.1988E-7	2.51575E-3	2.51575E-3	6.33341E-3	3.01237E-1
1.7E1	7.96E2	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80019E1	-7.15256E-4	-8.80006E1	2.14577E-4	4.62532E-3	9.51052E-2	2.73201E1	-3.26603E1	-3.26212E1	2.68184E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.98026E-1
1.8E1	3.437E3	3.0E0	7.27E2	5.0E2	-7.16233E-2	-8.8002E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.43459E-3	9.51052E-2	2.73297E1	-3.26795E1	-3.26086E1	2.68538E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9874E-1
1.9E1	2.016E3	2.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80018E1	-5.72205E-4	-8.80004E1	4.76837E-4	4.62532E-3	9.48906E-2	2.73234E1	-3.26573E1	-3.26319E1	2.68551E1	1.19653E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
2.0E1	2.4742E4	1.8E1	8.08E2	5.58E2	-7.06187E-2	-8.80022E1	-6.67572E-4	-8.80003E1	7.39098E-4	4.43459E-3	9.48191E-2	2.73279E1	-3.2644E1	-3.2623E1	2.67649E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.97901E-1
2.1E1	4.0E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80021E1	-4.76837E-4	-8.80004E1	6.67572E-4	4.41074E-3	9.50098E-2	2.73138E1	-3.26868E1	-3.26167E1	2.68372E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
2.2E1	1.757E3	1.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80018E1	-7.62939E-4	-8.80005E1	9.53674E-4	4.41074E-3	9.49144E-2	2.73269E1	-3.2675E1	-3.26354E1	2.68004E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.8002E1	-6.19888E-4	-8.80003E1	6.67572E-4	4.55379E-3	9.49144E-2	2.73149E1	-3.26615E1	-3.26083E1	2.6831E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99686E-1