[Scan]
initial_time=2016-01-18T22:45:53
final_time=2016-01-18T22:46:13
ip_count=19
run=1024
dataset=10
scan=758
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.81306E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.28989E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.42655E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.35653E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.61541E-8
mult1=-1.81568E-8
mult2=-2.86433E-9
rf_tmon=-4.04979E-3
rf_agc=3.39644E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.62775E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.40168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.196E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04831E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54003E1
cs_ef1b_imon=2.74134E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04498E1
cs_ea1_imon=2.60237E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9929E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04257E1
cs_ea2_imon=1.49914E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=2.88626E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.17716E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11511E1
os_restr1_imon=4.27809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.4392E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63838E1
os_ef1bup_imon=3.06488E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=1.16289E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=2.88521E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.91753E-8
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.48108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27047E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.16207E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30696E0
ionrepsh_imon=1.6977E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.15747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74878E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39249E0
os_ea2_imon=-5.11252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00357E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71339E1
cs_ef2a_imon=3.15107E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04645E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60161E-1
os_ef2bup_imon=-5.33046E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11164E1
os_restr2_imon=3.378E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02024E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.12219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.09198E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.78191E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.10324E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.70577E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.75039E-6
window_vset=0.0E0
window_vmon=2.55334E-1
window_imon=-8.2653E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86124E1
mask2_imon=-7.98728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.66478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.66313E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=6.86488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=5.8703E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.4037E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07219E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.93153E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62679E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62535E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25206E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21876E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.84691E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.813E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80021E1	-3.33786E-4	-8.80006E1	2.86102E-4	4.3869E-3	9.50336E-2	2.72935E1	-3.2686E1	-3.26474E1	2.68225E1					
2.0E0	9.7793E4	8.9E1	3.16E2	1.6E2	-7.19325E-2	-8.80021E1	-1.90735E-4	-8.80005E1	2.38419E-4	4.50611E-3	9.51767E-2	2.73143E1	-3.26627E1	-3.26205E1	2.68887E1	1.19872E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.00144E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80022E1	-3.57628E-4	-8.80005E1	5.48363E-4	4.48227E-3	9.49144E-2	2.73231E1	-3.26724E1	-3.26405E1	2.68065E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9874E-1
4.0E0	2.1442E4	1.3E1	6.55E2	3.98E2	-7.14689E-2	-8.80023E1	-6.67572E-4	-8.80006E1	6.19888E-4	4.81606E-3	9.53674E-2	2.73334E1	-3.26384E1	-3.26083E1	2.68773E1	1.198E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.96887E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80021E1	-5.48363E-4	-8.80006E1	7.39098E-4	4.36306E-3	9.5129E-2	2.73201E1	-3.26585E1	-3.2632E1	2.68328E1	1.19749E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80023E1	-6.67572E-4	-8.80006E1	9.05991E-4	4.45843E-3	9.50813E-2	2.73291E1	-3.26795E1	-3.26044E1	2.68028E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80022E1	-5.96046E-4	-8.8001E1	6.67572E-4	4.62532E-3	9.51052E-2	2.73122E1	-3.26826E1	-3.26119E1	2.6803E1	1.19705E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80018E1	-6.4373E-4	-8.80007E1	5.72205E-4	4.72069E-3	9.50336E-2	2.73363E1	-3.26843E1	-3.26404E1	2.68556E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80019E1	-5.00679E-4	-8.80007E1	6.4373E-4	4.79221E-3	9.50098E-2	2.73364E1	-3.26384E1	-3.26154E1	2.68845E1	1.19902E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99941E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.8002E1	-4.29153E-4	-8.80006E1	1.19209E-4	4.57764E-3	9.4986E-2	2.72917E1	-3.26218E1	-3.26269E1	2.68267E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.4E1	3.274E3	2.0E0	5.66E2	3.82E2	-7.35556E-2	-8.8002E1	-4.05312E-4	-8.80003E1	4.05312E-4	4.64916E-3	9.48906E-2	2.73375E1	-3.26389E1	-3.26084E1	2.6844E1	1.19908E-7	2.51973E-3	2.51973E-3	6.32498E-3	2.99816E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80021E1	-6.19888E-4	-8.80006E1	6.67572E-4	4.55379E-3	9.51052E-2	2.73217E1	-3.26563E1	-3.2608E1	2.68688E1					
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80021E1	-6.19888E-4	-8.80007E1	5.00679E-4	4.24385E-3	9.52482E-2	2.73123E1	-3.26717E1	-3.26116E1	2.68466E1	1.20163E-7	2.51596E-3	2.51596E-3	6.31398E-3	3.00197E-1
1.7E1	7.94E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80021E1	-7.15256E-4	-8.80004E1	5.24521E-4	4.31538E-3	9.5129E-2	2.7321E1	-3.26691E1	-3.2639E1	2.68629E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
1.8E1	3.351E3	1.0E0	7.27E2	5.0E2	-7.10825E-2	-8.80022E1	-7.15256E-4	-8.80004E1	4.29153E-4	4.62532E-3	9.48191E-2	2.73424E1	-3.26729E1	-3.25954E1	2.67698E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
1.9E1	1.943E3	3.0E0	7.68E2	5.29E2	-7.286E-2	-8.80019E1	-6.19888E-4	-8.80004E1	5.72205E-4	4.57764E-3	9.52244E-2	2.73541E1	-3.26767E1	-3.26278E1	2.68053E1	1.20414E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
2.0E1	2.4534E4	1.1E1	8.08E2	5.58E2	-7.25507E-2	-8.80017E1	-5.48363E-4	-8.80004E1	5.72205E-4	4.31538E-3	9.50575E-2	2.73357E1	-3.26452E1	-3.26266E1	2.67656E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9926E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80019E1	-5.24521E-4	-8.80002E1	3.09944E-4	4.24385E-3	9.5129E-2	2.73145E1	-3.26225E1	-3.25947E1	2.69316E1	1.19851E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9892E-1
2.2E1	1.741E3	1.0E0	8.89E2	6.17E2	-7.27053E-2	-8.8002E1	-3.8147E-4	-8.80004E1	4.05312E-4	4.26769E-3	9.51529E-2	2.73163E1	-3.2652E1	-3.26585E1	2.67752E1	1.19902E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99686E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80021E1	-4.29153E-4	-8.80006E1	6.4373E-4	4.45843E-3	9.52721E-2	2.73387E1	-3.27047E1	-3.26549E1	2.68322E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9952E-1