[Scan]
initial_time=2016-01-18T22:46:21
final_time=2016-01-18T22:46:41
ip_count=19
run=1024
dataset=10
scan=759
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.879E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-7.41589E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.44109E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.33631E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.61655E-8
mult1=-1.92641E-8
mult2=-2.97411E-9
rf_tmon=-4.71594E-3
rf_agc=3.27133E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.62108E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.04817E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.73979E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0454E1
cs_ea1_imon=2.60095E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97343E0
lens1_imon=1.59116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03348E1
cs_ea2_imon=1.47613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.89368E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.17814E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.28301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.42611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.05586E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.17457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01515E1
cs_anode1_imon=2.88864E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.90615E-8
tplens_vset=1.4E-1
tplens_vmon=1.67565E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.54479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=9.32169E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30342E0
ionrepsh_imon=1.73344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44795E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.36977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.28088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.23596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68516E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.75727E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.09968E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.55089E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.04893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29335E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.41435E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07611E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61416E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=9.94774E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62238E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21826E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8452E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.747E3	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80021E1	-2.6226E-4	-8.80003E1	6.67572E-4	4.31538E-3	9.52244E-2	2.73364E1	-3.26614E1	-3.26608E1	2.67878E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.98481E-1
2.0E0	9.7254E4	1.07E2	3.16E2	1.6E2	-7.27828E-2	-8.80021E1	-5.96046E-4	-8.80002E1	5.24521E-4	4.62532E-3	9.51767E-2	2.73351E1	-3.2686E1	-3.26003E1	2.68917E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.98665E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80018E1	-8.34465E-4	-8.80004E1	8.58307E-4	4.52995E-3	9.55582E-2	2.73335E1	-3.26787E1	-3.26225E1	2.69038E1	1.19766E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.00942E-1
4.0E0	2.1275E4	1.1E1	6.55E2	3.98E2	-7.22418E-2	-8.80022E1	-2.6226E-4	-8.80005E1	7.39098E-4	4.31538E-3	9.51529E-2	2.73219E1	-3.26873E1	-3.2629E1	2.67794E1	1.20127E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.00989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80019E1	-4.29153E-4	-8.80006E1	7.86781E-4	4.45843E-3	9.51767E-2	2.73345E1	-3.26711E1	-3.26218E1	2.68406E1	1.19978E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80024E1	-2.14577E-4	-8.80008E1	4.29153E-4	4.12464E-3	9.52482E-2	2.73122E1	-3.26838E1	-3.26231E1	2.67955E1	1.19646E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80025E1	-5.72205E-4	-8.80006E1	9.05991E-4	4.62532E-3	9.52005E-2	2.73105E1	-3.26573E1	-3.26008E1	2.68182E1	1.20055E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80023E1	-3.8147E-4	-8.80007E1	5.48363E-4	4.22001E-3	9.49383E-2	2.73321E1	-3.26416E1	-3.26182E1	2.68496E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00942E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80027E1	-2.86102E-4	-8.8001E1	6.67572E-4	4.57764E-3	9.50813E-2	2.73363E1	-3.26591E1	-3.26104E1	2.68296E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80022E1	-2.6226E-4	-8.80008E1	6.19888E-4	4.26769E-3	9.48191E-2	2.73466E1	-3.26753E1	-3.25797E1	2.68142E1	1.19902E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00197E-1
1.4E1	3.165E3	1.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80022E1	-1.19209E-4	-8.8001E1	5.72205E-4	4.26769E-3	9.47475E-2	2.7347E1	-3.26478E1	-3.26213E1	2.68569E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80022E1	-4.76837E-4	-8.80005E1	6.4373E-4	4.17233E-3	9.52005E-2	2.73273E1	-3.26573E1	-3.26278E1	2.68641E1	1.19861E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00563E-1
1.6E1	4.12E2	3.0E0	6.47E2	4.41E2	-7.13915E-2	-8.80021E1	-1.19209E-4	-8.80006E1	7.39098E-4	4.00543E-3	9.52005E-2	2.73302E1	-3.26695E1	-3.26181E1	2.68388E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
1.7E1	7.85E2	0.0E0	6.87E2	4.7E2	-7.08504E-2	-8.80019E1	-5.00679E-4	-8.80009E1	6.4373E-4	4.50611E-3	9.50098E-2	2.72903E1	-3.26697E1	-3.26242E1	2.68478E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.8E1	3.396E3	1.0E0	7.27E2	5.0E2	-7.13143E-2	-8.8002E1	-4.76837E-4	-8.80007E1	6.91414E-4	4.17233E-3	9.49383E-2	2.73213E1	-3.26597E1	-3.26272E1	2.68208E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.9E1	1.985E3	1.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80016E1	-6.67572E-4	-8.80005E1	8.34465E-4	4.64916E-3	9.51767E-2	2.73706E1	-3.27059E1	-3.26116E1	2.68064E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
2.0E1	2.4503E4	1.1E1	8.08E2	5.58E2	-7.15461E-2	-8.80017E1	-3.8147E-4	-8.80006E1	4.29153E-4	4.3869E-3	9.51052E-2	2.73328E1	-3.2662E1	-3.26219E1	2.68106E1	1.19925E-7	2.51359E-3	2.51359E-3	6.35223E-3	2.99879E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80017E1	-1.90735E-4	-8.80004E1	5.00679E-4	4.26769E-3	9.52244E-2	2.73139E1	-3.26467E1	-3.26172E1	2.6865E1	1.20183E-7	2.52061E-3	2.52061E-3	6.32626E-3	3.00069E-1
2.2E1	1.723E3	2.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80015E1	-2.6226E-4	-8.80004E1	4.52995E-4	4.45843E-3	9.52005E-2	2.7334E1	-3.26384E1	-3.25894E1	2.68076E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80016E1	-1.43051E-4	-8.80004E1	9.05991E-4	4.36306E-3	9.52005E-2	2.73364E1	-3.26773E1	-3.26419E1	2.68516E1	1.19749E-7	2.51203E-3	2.51203E-3	6.33977E-3	3.00966E-1