[Scan]
initial_time=2016-01-18T22:46:48
final_time=2016-01-18T22:47:08
ip_count=19
run=1024
dataset=10
scan=760
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.7882E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.48074E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.44748E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.35809E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.61876E-8
mult1=-1.8141E-8
mult2=-2.52336E-9
rf_tmon=-7.12864E-3
rf_agc=3.06958E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.59545E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69571E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19288E1
lens5a_imon=1.96174E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.72249E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04528E1
cs_ea1_imon=2.57901E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97461E0
lens1_imon=1.49205E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.5048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.88864E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.17743E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20137E0
cs_ionrep_imon=1.15157E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93756E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.88323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.9135E-8
tplens_vset=1.4E-1
tplens_vmon=1.69511E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26402E1
iondef2_imon=1.5232E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=8.67784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=1.73168E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.16278E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45266E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.15281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.37589E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.23488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72945E1
iondef1_imon=1.10909E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69275E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.78935E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.12293E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.54008E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.70372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.05246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=5.9057E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.42108E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.95062E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62577E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86374E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23131E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.75006E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21945E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12751E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.852E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.8002E1	-3.33786E-4	-8.80007E1	6.4373E-4	4.07696E-3	9.52005E-2	2.73375E1	-3.26842E1	-3.26193E1	2.68082E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02659E-1
2.0E0	9.7805E4	8.1E1	3.16E2	1.6E2	-7.26282E-2	-8.80019E1	-5.00679E-4	-8.80005E1	8.10623E-4	4.33922E-3	9.50575E-2	2.73278E1	-3.26844E1	-3.26422E1	2.68225E1	1.20161E-7	2.5216E-3	2.5216E-3	6.32784E-3	2.99421E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8002E1	-6.91414E-4	-8.80007E1	8.34465E-4	4.3869E-3	9.47237E-2	2.73122E1	-3.26649E1	-3.26266E1	2.68667E1	1.20116E-7	2.52222E-3	2.52222E-3	6.3074E-3	3.01193E-1
4.0E0	2.1542E4	8.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80023E1	-7.62939E-4	-8.80007E1	7.62939E-4	4.86374E-3	9.50098E-2	2.73299E1	-3.26573E1	-3.26278E1	2.6843E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80019E1	-8.82149E-4	-8.80006E1	5.96046E-4	4.55379E-3	9.50575E-2	2.73351E1	-3.26398E1	-3.26903E1	2.68502E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80022E1	-5.24521E-4	-8.80008E1	6.19888E-4	4.95911E-3	9.47952E-2	2.73364E1	-3.26756E1	-3.26095E1	2.68186E1	1.19601E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80018E1	-5.96046E-4	-8.80006E1	5.48363E-4	4.22001E-3	9.47475E-2	2.73004E1	-3.2688E1	-3.26372E1	2.68184E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03286E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-8.10623E-4	-8.80005E1	5.48363E-4	4.33922E-3	9.49383E-2	2.73189E1	-3.26693E1	-3.26272E1	2.68563E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02659E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80021E1	-8.34465E-4	-8.80005E1	6.4373E-4	4.31538E-3	9.49621E-2	2.73387E1	-3.26657E1	-3.25731E1	2.68779E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01871E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80019E1	-6.67572E-4	-8.80006E1	8.58307E-4	4.33922E-3	9.51052E-2	2.73568E1	-3.26512E1	-3.26104E1	2.68442E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
1.4E1	3.114E3	3.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80021E1	-3.57628E-4	-8.80006E1	8.34465E-4	4.55379E-3	9.50575E-2	2.73111E1	-3.26663E1	-3.2629E1	2.68599E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80022E1	-5.48363E-4	-8.80007E1	6.4373E-4	4.76837E-3	9.51767E-2	2.73039E1	-3.26543E1	-3.262E1	2.68088E1	1.19757E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.98481E-1
1.6E1	4.14E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80023E1	-2.6226E-4	-8.80004E1	6.19888E-4	4.14848E-3	9.51529E-2	2.73109E1	-3.26753E1	-3.2644E1	2.68603E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.98222E-1
1.7E1	7.79E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80018E1	-4.05312E-4	-8.80003E1	6.67572E-4	4.64916E-3	9.50813E-2	2.73345E1	-3.26903E1	-3.2637E1	2.68275E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00197E-1
1.8E1	3.416E3	6.0E0	7.27E2	5.0E2	-7.286E-2	-8.80022E1	-3.57628E-4	-8.80002E1	7.15256E-4	4.29153E-3	9.49383E-2	2.72775E1	-3.26597E1	-3.26416E1	2.68773E1	1.20244E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.0041E-1
1.9E1	1.868E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80022E1	-4.05312E-4	-8.8E1	6.91414E-4	4.60148E-3	9.49383E-2	2.73213E1	-3.2647E1	-3.2632E1	2.67758E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
2.0E1	2.4242E4	1.0E1	8.08E2	5.58E2	-7.286E-2	-8.80018E1	-4.76837E-4	-8.80004E1	6.4373E-4	4.48227E-3	9.51767E-2	2.73165E1	-3.26627E1	-3.2638E1	2.68065E1	1.19959E-7	2.5143E-3	2.5143E-3	6.31012E-3	2.99475E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80019E1	-8.82149E-4	-8.80003E1	8.34465E-4	4.62532E-3	9.52244E-2	2.72992E1	-3.26431E1	-3.26472E1	2.68749E1					
2.2E1	1.668E3	2.0E0	8.89E2	6.17E2	-7.30146E-2	-8.8002E1	-6.19888E-4	-8.80007E1	6.91414E-4	4.31538E-3	9.47952E-2	2.73104E1	-3.26655E1	-3.26189E1	2.68532E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80023E1	-7.39098E-4	-8.80006E1	5.24521E-4	4.36306E-3	9.51052E-2	2.72945E1	-3.26402E1	-3.26354E1	2.69275E1	1.19902E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1