[Scan]
initial_time=2016-01-18T22:49:04
final_time=2016-01-18T22:49:23
ip_count=19
run=1024
dataset=10
scan=765
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.85848E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.22349E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.43054E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.36177E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.61473E-8
mult1=-2.12974E-8
mult2=-2.74677E-9
rf_tmon=-4.24402E-3
rf_agc=3.30437E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.62346E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.07632E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1952E1
lens5a_imon=2.02453E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53914E1
cs_ef1b_imon=2.73439E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04591E1
cs_ea1_imon=2.63088E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03895E0
lens1_imon=1.34451E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64715E1
os_ef1alow_imon=2.96866E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.46973E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84391E1
cs_ef1a_imon=2.89448E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.18056E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27955E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14849E1
os_ea1_imon=2.41999E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63742E1
os_ef1bup_imon=3.07037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21485E0
cs_ionrep_imon=1.20692E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.88898E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.9152E-8
tplens_vset=1.4E-1
tplens_vmon=1.64023E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26815E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98101E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=9.02283E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.72027E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34204E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.12619E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39089E0
os_ea2_imon=-9.66262E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06057E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71141E1
cs_ef2a_imon=3.16217E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04568E0
os_ef2alow_imon=-2.50186E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80696E-1
os_ef2bup_imon=-5.32193E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11185E1
os_restr2_imon=3.37037E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01852E1
cs_anode2_imon=2.2361E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.0798E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.77394E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.12138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15768E0
cs_ionaccel_imon=-1.68669E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47395E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56338E1
einzel_imon=7.74292E-6
window_vset=0.0E0
window_vmon=2.53575E-1
window_imon=-7.68697E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86411E1
mask2_imon=-6.69554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.07999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=5.83628E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.41894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06882E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61496E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.93766E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62457E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62542E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.64591E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80329E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.18948E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35918E-1
cs_fil2_imon=-2.86623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01382E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21879E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.76167E-1
res40_imon=-2.47616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.982E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80019E1	-7.86781E-4	-8.80004E1	4.29153E-4	4.22001E-3	9.48429E-2	2.73027E1	-3.26372E1	-3.26614E1	2.6843E1	1.19809E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01085E-1
2.0E0	9.7792E4	9.1E1	3.16E2	1.6E2	-7.40192E-2	-8.80018E1	-4.05312E-4	-8.80004E1	5.00679E-4	4.60148E-3	9.51052E-2	2.73039E1	-3.26639E1	-3.26104E1	2.6855E1	1.19902E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80017E1	-4.05312E-4	-8.80005E1	6.4373E-4	3.8147E-3	9.47952E-2	2.7311E1	-3.26596E1	-3.26472E1	2.68528E1	1.20031E-7	2.51248E-3	2.51248E-3	6.3074E-3	2.99613E-1
4.0E0	2.1783E4	1.4E1	6.55E2	3.98E2	-7.37874E-2	-8.80021E1	-6.67572E-4	-8.80004E1	5.24521E-4	4.05312E-3	9.48429E-2	2.73051E1	-3.26661E1	-3.2626E1	2.6798E1	1.1979E-7	2.52025E-3	2.52025E-3	6.27577E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80024E1	-6.67572E-4	-8.80005E1	3.8147E-4	4.07696E-3	9.51767E-2	2.72973E1	-3.26536E1	-3.265E1	2.68328E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.97394E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80024E1	-5.72205E-4	-8.80003E1	4.29153E-4	3.88622E-3	9.48668E-2	2.73216E1	-3.26585E1	-3.26378E1	2.68394E1	1.20017E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80022E1	-4.29153E-4	-8.80005E1	2.38419E-4	3.98159E-3	9.49383E-2	2.73201E1	-3.26567E1	-3.26494E1	2.68442E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80021E1	-5.24521E-4	-8.80009E1	3.33786E-4	3.76701E-3	9.5129E-2	2.73177E1	-3.26807E1	-3.25948E1	2.684E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80022E1	-8.82149E-4	-8.80006E1	4.05312E-4	3.76701E-3	9.48906E-2	2.73003E1	-3.26452E1	-3.26152E1	2.68358E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80023E1	-6.19888E-4	-8.80003E1	6.19888E-4	3.95775E-3	9.50336E-2	2.73243E1	-3.26963E1	-3.2653E1	2.68016E1	1.19925E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.01475E-1
1.4E1	3.143E3	4.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80021E1	-9.77516E-4	-8.80005E1	3.09944E-4	4.00543E-3	9.53197E-2	2.73405E1	-3.26777E1	-3.26464E1	2.68502E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9978E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80021E1	-5.48363E-4	-8.80005E1	5.48363E-4	4.14848E-3	9.52244E-2	2.73093E1	-3.26789E1	-3.26176E1	2.68105E1	1.19646E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.98156E-1
1.6E1	4.21E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80021E1	-6.67572E-4	-8.80004E1	4.52995E-4	4.14848E-3	9.5129E-2	2.73081E1	-3.26615E1	-3.2635E1	2.6843E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9952E-1
1.7E1	7.93E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80021E1	-8.58307E-4	-8.80005E1	6.4373E-4	4.1008E-3	9.51529E-2	2.73568E1	-3.26368E1	-3.26284E1	2.68737E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
1.8E1	3.341E3	2.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80026E1	-8.82149E-4	-8.80006E1	5.24521E-4	4.07696E-3	9.48906E-2	2.73428E1	-3.26803E1	-3.26018E1	2.68128E1	1.19601E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.9E1	1.963E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80022E1	-3.57628E-4	-8.80005E1	9.53674E-4	4.1008E-3	9.50575E-2	2.73093E1	-3.26591E1	-3.26362E1	2.68004E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
2.0E1	2.4489E4	1.3E1	8.08E2	5.58E2	-7.34782E-2	-8.80023E1	-1.0252E-3	-8.80005E1	6.91414E-4	4.26769E-3	9.53197E-2	2.73219E1	-3.26518E1	-3.26182E1	2.68496E1	1.19953E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9943E-1
2.1E1	3.7E1	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80025E1	-6.19888E-4	-8.80008E1	7.62939E-4	4.45843E-3	9.52005E-2	2.73153E1	-3.26747E1	-3.26104E1	2.68665E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.97963E-1
2.2E1	1.783E3	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80025E1	-6.19888E-4	-8.80006E1	8.34465E-4	4.29153E-3	9.52244E-2	2.73381E1	-3.26502E1	-3.26413E1	2.68273E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.96156E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80024E1	-3.09944E-4	-8.80007E1	5.00679E-4	4.64916E-3	9.53436E-2	2.73151E1	-3.26815E1	-3.26396E1	2.68286E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.97394E-1