[Scan]
initial_time=2016-01-18T22:49:31
final_time=2016-01-18T22:49:50
ip_count=19
run=1024
dataset=10
scan=766
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.83753E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.01344E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.42525E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.32567E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.6127E-8
mult1=-1.59293E-8
mult2=-2.6228E-9
rf_tmon=-3.57514E-3
rf_agc=3.44211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=5.32901E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19282E1
lens5a_imon=1.9812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=2.73751E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04674E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04345E1
cs_ea1_imon=2.58361E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94688E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04109E1
cs_ea2_imon=1.48852E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.89077E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.1764E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.27809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14657E1
os_ea1_imon=2.41372E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07183E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20904E0
cs_ionrep_imon=1.17599E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93767E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.89077E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.9134E-8
tplens_vset=1.4E-1
tplens_vmon=1.69924E0
tplens_imon=-4.26306E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98264E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=9.30953E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=1.71469E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4391E0
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.16706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50315E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1106E1
os_restr2_imon=3.36202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.26637E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.81055E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.12719E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14752E0
cs_ionaccel_imon=-1.67797E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=2.38537E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86303E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=8.08951E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=6.97814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.42599E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.4176E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07555E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61542E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.9346E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62603E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62653E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90173E-2
os_fil2_imon=-2.81399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26928E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.4375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21869E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27553E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.9E3	2.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80021E1	-1.66893E-4	-8.80004E1	4.29153E-4	4.43459E-3	9.48429E-2	2.73351E1	-3.26512E1	-3.2623E1	2.68478E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99175E-1
2.0E0	9.7614E4	9.9E1	3.16E2	1.6E2	-7.25507E-2	-8.8002E1	-4.29153E-4	-8.80005E1	6.4373E-4	4.50611E-3	9.53197E-2	2.73088E1	-3.26487E1	-3.26132E1	2.68599E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.97963E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80019E1	-6.67572E-4	-8.80004E1	7.15256E-4	4.64916E-3	9.54151E-2	2.7308E1	-3.26756E1	-3.2652E1	2.68286E1	1.19766E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99879E-1
4.0E0	2.1841E4	9.0E0	6.55E2	3.98E2	-7.13915E-2	-8.8002E1	-6.91414E-4	-8.80002E1	6.4373E-4	4.55379E-3	9.50098E-2	2.73153E1	-3.26843E1	-3.26044E1	2.68441E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80021E1	-8.58307E-4	-8.80003E1	5.48363E-4	4.57764E-3	9.52959E-2	2.73328E1	-3.26484E1	-3.26119E1	2.68345E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80022E1	-5.24521E-4	-8.80003E1	4.52995E-4	4.52995E-3	9.51767E-2	2.73057E1	-3.26518E1	-3.26308E1	2.68284E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8002E1	-5.48363E-4	-8.80005E1	3.33786E-4	4.81606E-3	9.55105E-2	2.73219E1	-3.26554E1	-3.26086E1	2.68719E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.8002E1	-3.8147E-4	-8.80007E1	5.48363E-4	4.41074E-3	9.55343E-2	2.73303E1	-3.26723E1	-3.26212E1	2.68117E1	1.19705E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.98481E-1
1.2E1	7.1E1	1.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80021E1	-9.05991E-4	-8.80009E1	5.24521E-4	4.19617E-3	9.52244E-2	2.73237E1	-3.26494E1	-3.26224E1	2.68623E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9874E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80023E1	-4.52995E-4	-8.80006E1	3.09944E-4	4.86374E-3	9.52482E-2	2.73358E1	-3.26644E1	-3.26396E1	2.68484E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.99E-1
1.4E1	3.158E3	1.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80024E1	-3.8147E-4	-8.80004E1	4.29153E-4	4.52995E-3	9.53197E-2	2.73222E1	-3.26614E1	-3.26632E1	2.67842E1	1.19697E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80024E1	-6.91414E-4	-8.80007E1	4.29153E-4	4.95911E-3	9.5582E-2	2.73051E1	-3.2681E1	-3.26324E1	2.6835E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
1.6E1	4.09E2	1.0E0	6.47E2	4.41E2	-7.05415E-2	-8.80028E1	-5.72205E-4	-8.80002E1	5.72205E-4	4.52995E-3	9.52959E-2	2.73338E1	-3.26659E1	-3.26254E1	2.68478E1	1.19941E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.02875E-1
1.7E1	8.31E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80027E1	-6.4373E-4	-8.80007E1	4.29153E-4	4.673E-3	9.54628E-2	2.72811E1	-3.26512E1	-3.26278E1	2.6796E1	1.19991E-7	2.52521E-3	2.52521E-3	6.31879E-3	3.01065E-1
1.8E1	3.405E3	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80024E1	-4.05312E-4	-8.80005E1	6.4373E-4	4.48227E-3	9.53674E-2	2.73411E1	-3.26777E1	-3.2623E1	2.68755E1	1.20069E-7	2.52209E-3	2.52209E-3	6.34588E-3	2.9952E-1
1.9E1	2.031E3	2.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80021E1	-5.96046E-4	-8.80005E1	6.19888E-4	4.26769E-3	9.54628E-2	2.72945E1	-3.26325E1	-3.26236E1	2.6822E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.99E-1
2.0E1	2.4343E4	2.3E1	8.08E2	5.58E2	-7.19325E-2	-8.80021E1	-7.15256E-4	-8.80004E1	5.48363E-4	4.3869E-3	9.52244E-2	2.73305E1	-3.26762E1	-3.26372E1	2.68136E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99686E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80022E1	-3.33786E-4	-8.80009E1	7.15256E-4	4.31538E-3	9.52959E-2	2.73322E1	-3.26968E1	-3.26284E1	2.68221E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00197E-1
2.2E1	1.699E3	1.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80021E1	-4.52995E-4	-8.80003E1	5.96046E-4	4.45843E-3	9.51767E-2	2.73285E1	-3.26512E1	-3.26248E1	2.68364E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80021E1	-7.15256E-4	-8.80004E1	4.29153E-4	4.24385E-3	9.51767E-2	2.73303E1	-3.26543E1	-3.26428E1	2.68496E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.01085E-1