[Scan]
initial_time=2016-01-18T22:50:25
final_time=2016-01-18T22:50:44
ip_count=19
run=1024
dataset=10
scan=768
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78977E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.2819E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.48344E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.28819E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.61833E-8
mult1=-1.99156E-8
mult2=-2.7917E-9
rf_tmon=-4.24413E-3
rf_agc=3.31358E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.87964E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71781E0
bslens_imon=1.89968E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18787E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05619E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=2.73835E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04731E2
lens23_imon=1.0246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03774E1
cs_ea1_imon=2.53896E-5
lens1_vset=-2.7E0
lens1_vmon=-2.92119E0
lens1_imon=2.04027E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65113E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05132E1
cs_ea2_imon=1.52596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.89332E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.17548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11652E1
os_restr1_imon=4.28085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=2.37745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63413E1
os_ef1bup_imon=3.06199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.14816E0
cs_ionrep_imon=1.1478E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91988E2
cs_nozzle_imon=1.94206E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.91314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.90859E-8
tplens_vset=1.4E-1
tplens_vmon=1.72555E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25717E1
iondef3_imon=1.44557E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26853E1
iondef2_imon=1.6132E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03056E2
lens6_imon=2.98198E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=9.10926E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23828E0
ionrepsh_imon=1.66872E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3275E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50985E0
os_ea2_imon=-1.87592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00046E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.38094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22957E2
cs_ionfoca_imon=6.27729E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.21902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73569E1
iondef1_imon=1.15069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.79978E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.10114E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92699E3
multa_neg_imon=7.87669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93662E3
defgrida_imon=6.24725E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.8673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51886E0
defgridb_imon=6.75555E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.41123E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07684E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61541E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.94209E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6224E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6248E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.84016E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37381E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.73707E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21868E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.1974E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.95622E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.894E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80022E1	-5.24521E-4	-8.80004E1	3.8147E-4	4.52995E-3	9.50813E-2	2.72679E1	-3.26526E1	-3.26974E1	2.68545E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
2.0E0	9.71E4	9.0E1	3.16E2	1.6E2	-7.21643E-2	-8.80026E1	-6.91414E-4	-8.80003E1	3.33786E-4	4.81606E-3	9.50336E-2	2.734E1	-3.26762E1	-3.26181E1	2.67884E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80023E1	-3.57628E-4	-8.80005E1	4.05312E-4	4.81606E-3	9.50575E-2	2.73157E1	-3.2695E1	-3.26349E1	2.68683E1	1.20191E-7	2.52362E-3	2.52362E-3	6.33538E-3	3.00942E-1
4.0E0	2.159E4	1.1E1	6.55E2	3.98E2	-7.20871E-2	-8.80023E1	-4.52995E-4	-8.80004E1	5.48363E-4	4.57764E-3	9.50336E-2	2.73243E1	-3.26506E1	-3.26362E1	2.68334E1	1.19749E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8002E1	-7.86781E-4	-8.80005E1	6.4373E-4	4.673E-3	9.50336E-2	2.73183E1	-3.26717E1	-3.2635E1	2.68406E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80022E1	-6.91414E-4	-8.80003E1	4.76837E-4	5.00679E-3	9.5129E-2	2.73405E1	-3.26657E1	-3.26494E1	2.68233E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80024E1	-8.34465E-4	-8.80004E1	2.86102E-4	4.36306E-3	9.51767E-2	2.73405E1	-3.26773E1	-3.26496E1	2.68406E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80023E1	-8.82149E-4	-8.80007E1	4.52995E-4	4.62532E-3	9.46045E-2	2.72823E1	-3.26374E1	-3.26212E1	2.68388E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80025E1	-8.10623E-4	-8.80004E1	4.29153E-4	4.81606E-3	9.5129E-2	2.73261E1	-3.26518E1	-3.25954E1	2.68623E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80025E1	-6.91414E-4	-8.80005E1	6.67572E-4	4.69685E-3	9.46283E-2	2.73207E1	-3.26567E1	-3.26509E1	2.68586E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.4E1	3.192E3	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80027E1	-6.67572E-4	-8.80006E1	6.91414E-4	4.673E-3	9.47714E-2	2.73259E1	-3.26689E1	-3.26462E1	2.68256E1	1.19891E-7	2.51287E-3	2.51287E-3	6.34982E-3	3.00852E-1
1.5E1	7.7E1	1.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80027E1	-7.62939E-4	-8.80005E1	2.38419E-4	4.62532E-3	9.49621E-2	2.73305E1	-3.26644E1	-3.2639E1	2.6852E1	1.19819E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99613E-1
1.6E1	4.38E2	2.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80025E1	-5.96046E-4	-8.80007E1	5.24521E-4	4.55379E-3	9.51767E-2	2.73195E1	-3.26476E1	-3.2626E1	2.68292E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.7E1	7.79E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80025E1	-6.4373E-4	-8.80005E1	7.86781E-4	4.69685E-3	9.4986E-2	2.72913E1	-3.26669E1	-3.26218E1	2.68749E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
1.8E1	3.328E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80026E1	-6.4373E-4	-8.80004E1	7.86781E-4	4.673E-3	9.4986E-2	2.73255E1	-3.26446E1	-3.26506E1	2.68358E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9952E-1
1.9E1	1.93E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80025E1	-7.39098E-4	-8.80007E1	5.24521E-4	4.31538E-3	9.47237E-2	2.73009E1	-3.26933E1	-3.26398E1	2.6816E1	1.19749E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
2.0E1	2.4143E4	1.0E1	8.08E2	5.58E2	-7.286E-2	-8.80024E1	-8.10623E-4	-8.80003E1	5.48363E-4	4.52995E-3	9.49383E-2	2.73117E1	-3.26639E1	-3.26248E1	2.68454E1	1.20031E-7	2.52027E-3	2.52027E-3	6.28511E-3	3.0201E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80024E1	-4.52995E-4	-8.80005E1	7.15256E-4	4.52995E-3	9.49144E-2	2.72998E1	-3.26673E1	-3.26207E1	2.68638E1	1.1983E-7	2.51809E-3	2.51809E-3	6.31827E-3	2.99991E-1
2.2E1	1.69E3	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80024E1	-6.67572E-4	-8.80004E1	5.72205E-4	5.03063E-3	9.4676E-2	2.73097E1	-3.26625E1	-3.26109E1	2.68196E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80023E1	-6.19888E-4	-8.80005E1	6.67572E-4	4.62532E-3	9.47237E-2	2.73569E1	-3.26853E1	-3.25717E1	2.68496E1	1.1974E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.01104E-1