[Scan]
initial_time=2016-01-18T22:50:52
final_time=2016-01-18T22:51:11
ip_count=19
run=1024
dataset=10
scan=769
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.76031E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.69615E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.44155E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.3592E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.61428E-8
mult1=-1.83065E-8
mult2=-2.72718E-9
rf_tmon=-4.69824E-3
rf_agc=3.25304E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.44882E-10
bslens_vset=-6.2E0
bslens_vmon=-6.86796E0
bslens_imon=3.26176E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19199E1
lens5a_imon=1.88139E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12316E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.73259E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04763E2
lens23_imon=1.03162E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05295E1
cs_ea1_imon=2.56025E-5
lens1_vset=-2.7E0
lens1_vmon=-2.80708E0
lens1_imon=7.91251E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64975E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04434E1
cs_ea2_imon=1.60496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.91134E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.17269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16674E1
os_ea1_imon=2.43637E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.14828E0
cs_ionrep_imon=1.06166E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91833E2
cs_nozzle_imon=1.93792E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.87314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.90751E-8
tplens_vset=1.4E-1
tplens_vmon=1.81132E0
tplens_imon=3.80679E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26413E1
iondef3_imon=1.41773E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.51754E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03041E2
lens6_imon=2.98948E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=9.42445E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.40488E0
ionrepsh_imon=1.6984E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32153E1
lens5b_imon=2.09269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43497E0
os_ea2_imon=-8.29832E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06209E2
lens4b_imon=2.00686E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02873E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.36436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22997E2
cs_ionfoca_imon=6.18284E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.22623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72951E1
iondef1_imon=1.1321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.78343E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.11103E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=8.05766E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=5.87738E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.502E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-7.73639E-1
defgridb_imon=6.44369E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.42318E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61404E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.95519E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63219E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62322E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21733E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72817E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.924E3	0.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80023E1	-1.0252E-3	-8.80003E1	6.4373E-4	4.26769E-3	9.47952E-2	2.72632E1	-3.25405E1	-3.25782E1	2.68314E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
2.0E0	9.7485E4	9.9E1	3.16E2	1.6E2	-7.201E-2	-8.80021E1	-6.91414E-4	-8.80005E1	7.39098E-4	4.57764E-3	9.4986E-2	2.73087E1	-3.26615E1	-3.26098E1	2.68107E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.9714E-1
3.0E0	2.8E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80025E1	-4.29153E-4	-8.80003E1	6.19888E-4	4.33922E-3	9.50813E-2	2.73222E1	-3.26732E1	-3.2662E1	2.68331E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
4.0E0	2.1299E4	1.4E1	6.55E2	3.98E2	-7.17779E-2	-8.80021E1	-7.15256E-4	-8.8E1	6.19888E-4	4.26769E-3	9.53674E-2	2.73598E1	-3.26855E1	-3.26458E1	2.684E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80022E1	-6.91414E-4	-8.80003E1	8.34465E-4	4.45843E-3	9.50098E-2	2.73116E1	-3.26526E1	-3.26443E1	2.67968E1	1.19861E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00824E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80021E1	-5.48363E-4	-8.80002E1	7.62939E-4	4.62532E-3	9.49144E-2	2.73193E1	-3.26343E1	-3.26396E1	2.68418E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80022E1	-4.29153E-4	-8.80003E1	4.76837E-4	4.31538E-3	9.50575E-2	2.73302E1	-3.26585E1	-3.26168E1	2.686E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80021E1	-5.24521E-4	-8.80001E1	6.4373E-4	4.43459E-3	9.51767E-2	2.73279E1	-3.26386E1	-3.26266E1	2.68279E1	1.1966E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.99348E-1
1.2E1	6.3E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80023E1	-5.00679E-4	-8.80002E1	5.48363E-4	4.19617E-3	9.51529E-2	2.73364E1	-3.2662E1	-3.26372E1	2.68532E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80021E1	-7.39098E-4	-8.80001E1	5.96046E-4	4.3869E-3	9.49144E-2	2.73219E1	-3.26765E1	-3.26362E1	2.6816E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00197E-1
1.4E1	3.223E3	6.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80028E1	-5.96046E-4	-8.80003E1	4.05312E-4	4.31538E-3	9.50098E-2	2.73327E1	-3.26765E1	-3.26218E1	2.68268E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80026E1	-7.86781E-4	-8.8E1	5.24521E-4	4.17233E-3	9.47714E-2	2.7308E1	-3.26773E1	-3.2639E1	2.6849E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
1.6E1	4.36E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80025E1	-5.24521E-4	-8.80003E1	6.91414E-4	4.29153E-3	9.51529E-2	2.73243E1	-3.26482E1	-3.26344E1	2.67884E1	1.20278E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00302E-1
1.7E1	8.37E2	1.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80024E1	-5.48363E-4	-8.80003E1	8.58307E-4	4.43459E-3	9.47952E-2	2.73111E1	-3.2644E1	-3.26266E1	2.68574E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
1.8E1	3.361E3	7.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80024E1	-7.39098E-4	-8.80003E1	5.72205E-4	4.673E-3	9.51767E-2	2.73417E1	-3.26272E1	-3.2605E1	2.68508E1	1.198E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.9943E-1
1.9E1	1.961E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80024E1	-5.72205E-4	-8.80003E1	7.15256E-4	4.48227E-3	9.49144E-2	2.73305E1	-3.26526E1	-3.26337E1	2.6819E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9926E-1
2.0E1	2.4295E4	1.5E1	8.08E2	5.58E2	-7.16233E-2	-8.80022E1	-7.86781E-4	-8.80002E1	4.05312E-4	4.69685E-3	9.50575E-2	2.73448E1	-3.26266E1	-3.26657E1	2.68184E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80022E1	-6.4373E-4	-8.80003E1	6.4373E-4	4.64916E-3	9.4986E-2	2.73375E1	-3.26809E1	-3.26319E1	2.67908E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
2.2E1	1.767E3	3.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80023E1	-6.67572E-4	-8.80005E1	8.34465E-4	4.52995E-3	9.52959E-2	2.73297E1	-3.2647E1	-3.2602E1	2.68493E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80024E1	-8.10623E-4	-8.80007E1	6.4373E-4	4.88758E-3	9.52005E-2	2.72951E1	-3.26673E1	-3.26413E1	2.68514E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1