[Scan]
initial_time=2016-01-18T22:51:18
final_time=2016-01-18T22:51:38
ip_count=19
run=1024
dataset=10
scan=770
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.80631E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.68597E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.42254E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.26566E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.61875E-8
mult1=-1.95655E-8
mult2=-2.8284E-9
rf_tmon=-3.97769E-3
rf_agc=3.39765E-2
counter1=5
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.78833E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60416E0
bslens_imon=1.33774E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18299E1
lens5a_imon=2.0201E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12642E2
lens4a_imon=2.06175E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.74187E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.01389E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.02684E1
cs_ea1_imon=2.55466E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05731E0
lens1_imon=2.50574E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64615E1
os_ef1alow_imon=2.96905E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0491E1
cs_ea2_imon=1.49489E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84201E1
cs_ef1a_imon=2.88708E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.17546E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11548E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13463E1
os_ea1_imon=2.33741E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63498E1
os_ef1bup_imon=3.07683E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17683E0
cs_ionrep_imon=1.21729E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92065E2
cs_nozzle_imon=1.943E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02102E1
cs_anode1_imon=2.8766E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.90946E-8
tplens_vset=1.4E-1
tplens_vmon=1.64273E0
tplens_imon=-1.35646E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.65763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.97719E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.32789E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.14828E0
ionrepsh_imon=1.68372E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34145E1
lens5b_imon=2.24825E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74888E1
cs_ef2b_imon=3.12474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55124E0
os_ea2_imon=-7.3742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05939E2
lens4b_imon=1.99552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16216E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08263E0
os_ef2alow_imon=-2.608E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79543E-1
os_ef2bup_imon=-5.14547E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11229E1
os_restr2_imon=3.37399E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22941E2
cs_ionfoca_imon=6.31641E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01778E1
cs_anode2_imon=2.24037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73538E1
iondef1_imon=1.15422E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.10412E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.81399E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.11158E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15572E0
cs_ionaccel_imon=-1.81831E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47346E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.81134E-6
window_vset=0.0E0
window_vmon=2.48785E-1
window_imon=-8.93897E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86169E1
mask2_imon=-8.19045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92731E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=7.16997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50046E3
multb_neg_imon=6.38741E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.14082E0
defgridb_imon=6.91691E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.40193E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61561E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30947E1
cs_fil1_imon=9.95272E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62522E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95744E-2
os_fil2_imon=-2.63131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37316E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.37205E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21892E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2488E-1
res40_imon=-2.51443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.948E3	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80022E1	-7.39098E-4	-8.80006E1	8.34465E-4	4.48227E-3	9.48906E-2	2.74184E1	-3.27939E1	-3.25275E1	2.68273E1	1.1995E-7	2.51296E-3	2.51296E-3	6.3074E-3	3.00363E-1
2.0E0	9.7368E4	8.8E1	3.16E2	1.6E2	-7.30146E-2	-8.80023E1	-8.34465E-4	-8.80003E1	5.24521E-4	4.36306E-3	9.50575E-2	2.73331E1	-3.26585E1	-3.26368E1	2.68625E1	1.1988E-7	2.51575E-3	2.51575E-3	6.30221E-3	3.01237E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80027E1	-7.39098E-4	-8.80007E1	5.48363E-4	4.45843E-3	9.49144E-2	2.73648E1	-3.2666E1	-3.26782E1	2.68226E1	1.20447E-7	2.51411E-3	2.51411E-3	6.34815E-3	2.99811E-1
4.0E0	2.1348E4	3.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80025E1	-1.00136E-3	-8.80003E1	5.00679E-4	4.48227E-3	9.51529E-2	2.73123E1	-3.26699E1	-3.26068E1	2.68151E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80021E1	-9.05991E-4	-8.80001E1	7.39098E-4	4.22001E-3	9.51529E-2	2.73027E1	-3.26452E1	-3.26699E1	2.68905E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80024E1	-7.15256E-4	-8.80004E1	6.4373E-4	4.33922E-3	9.50813E-2	2.73405E1	-3.26813E1	-3.26224E1	2.68184E1	1.20137E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80025E1	-8.10623E-4	-8.80006E1	5.48363E-4	4.673E-3	9.48906E-2	2.72799E1	-3.26789E1	-3.2623E1	2.68508E1	1.19851E-7	2.51954E-3	2.51954E-3	6.28056E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80025E1	-7.39098E-4	-8.80005E1	5.24521E-4	4.1008E-3	9.54151E-2	2.72973E1	-3.26729E1	-3.259E1	2.68563E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.01347E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-6.19888E-4	-8.80005E1	5.72205E-4	4.1008E-3	9.52482E-2	2.73033E1	-3.26313E1	-3.26054E1	2.68352E1	1.20137E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00942E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80027E1	-9.29832E-4	-8.80005E1	5.96046E-4	4.14848E-3	9.54151E-2	2.73225E1	-3.26561E1	-3.26038E1	2.6828E1	1.19891E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.98342E-1
1.4E1	3.213E3	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80026E1	-7.39098E-4	-8.80005E1	6.4373E-4	4.55379E-3	9.52244E-2	2.73629E1	-3.2675E1	-3.26343E1	2.68845E1	1.19766E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.97499E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80025E1	-1.09673E-3	-8.80006E1	5.72205E-4	4.3869E-3	9.49621E-2	2.73369E1	-3.27031E1	-3.2593E1	2.68406E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
1.6E1	4.39E2	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80023E1	-8.34465E-4	-8.80004E1	5.72205E-4	4.36306E-3	9.51767E-2	2.73045E1	-3.26764E1	-3.26283E1	2.68661E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.7E1	8.3E2	2.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80022E1	-1.12057E-3	-8.80002E1	5.72205E-4	4.74453E-3	9.48906E-2	2.73423E1	-3.26844E1	-3.25971E1	2.68292E1	1.19941E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.006E-1
1.8E1	3.517E3	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80024E1	-8.82149E-4	-8.80005E1	4.05312E-4	4.36306E-3	9.49383E-2	2.73237E1	-3.26753E1	-3.2608E1	2.6852E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.9E1	2.012E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80021E1	-5.48363E-4	-8.80003E1	7.15256E-4	4.3869E-3	9.5129E-2	2.7337E1	-3.26691E1	-3.26402E1	2.68632E1	1.20069E-7	2.52099E-3	2.52099E-3	6.35692E-3	3.01609E-1
2.0E1	2.4547E4	1.3E1	8.08E2	5.58E2	-7.30146E-2	-8.80022E1	-6.67572E-4	-8.80004E1	7.86781E-4	4.48227E-3	9.52244E-2	2.73394E1	-3.26946E1	-3.26205E1	2.6804E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0148E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.8002E1	-7.62939E-4	-8.80004E1	4.05312E-4	4.31538E-3	9.53197E-2	2.73482E1	-3.26608E1	-3.26307E1	2.68334E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9874E-1
2.2E1	1.763E3	1.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80019E1	-5.00679E-4	-8.80005E1	3.8147E-4	4.05312E-3	9.48191E-2	2.73541E1	-3.26573E1	-3.26307E1	2.68696E1	1.20017E-7	2.50789E-3	2.50789E-3	6.33486E-3	2.97963E-1
2.3E1	5.0E0	1.0E0	9.3E2	6.47E2	-7.286E-2	-8.80021E1	-5.48363E-4	-8.80002E1	5.72205E-4	4.26769E-3	9.54628E-2	2.73538E1	-3.26831E1	-3.26248E1	2.68118E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1