[Scan]
initial_time=2016-01-18T22:52:12
final_time=2016-01-18T22:52:32
ip_count=19
run=1024
dataset=10
scan=772
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.78422E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.13968E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.42968E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.27866E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.62184E-8
mult1=-1.53747E-8
mult2=-2.70366E-9
rf_tmon=-4.49768E-3
rf_agc=3.40819E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.81264E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57001E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20698E1
lens5a_imon=2.04796E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04361E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.73511E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0453E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.66981E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04676E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02579E1
cs_ea2_imon=1.43584E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.88936E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.17654E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14627E1
os_ea1_imon=2.48632E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63401E1
os_ef1bup_imon=3.06055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.34162E0
cs_ionrep_imon=1.19575E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.92782E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.88359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.90164E-8
tplens_vset=1.4E-1
tplens_vmon=1.58255E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.55985E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.51767E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02826E2
lens6_imon=2.97737E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=9.06312E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34763E0
ionrepsh_imon=1.7866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34337E1
lens5b_imon=2.14529E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31398E0
os_ea2_imon=-1.20779E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06057E2
lens4b_imon=2.00987E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02392E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23148E2
cs_ionfoca_imon=6.31803E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.03389E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68617E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.78491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.1119E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.28187E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93767E3
defgrida_imon=6.88893E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.45851E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=5.49021E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.40792E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07281E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61488E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.93404E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62511E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47563E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79114E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.991E3	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80021E1	-7.15256E-4	-8.80005E1	2.14577E-4	4.673E-3	9.51052E-2	2.7374E1	-3.26596E1	-3.25258E1	2.68418E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.0E0	9.7486E4	6.9E1	3.16E2	1.6E2	-7.19325E-2	-8.80024E1	-9.53674E-4	-8.80004E1	2.6226E-4	4.60148E-3	9.48429E-2	2.72898E1	-3.26389E1	-3.2648E1	2.68821E1	1.20276E-7	2.52301E-3	2.52301E-3	6.3282E-3	3.01237E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80024E1	-7.15256E-4	-8.80005E1	4.52995E-4	4.57764E-3	9.47714E-2	2.73263E1	-3.26313E1	-3.26248E1	2.68472E1	1.1966E-7	2.5225E-3	2.5225E-3	6.29624E-3	3.0041E-1
4.0E0	2.1612E4	6.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80023E1	-6.67572E-4	-8.80004E1	9.53674E-5	4.33922E-3	9.50336E-2	2.72933E1	-3.2672E1	-3.26054E1	2.68227E1	1.198E-7	2.52707E-3	2.52707E-3	6.33436E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80024E1	-3.8147E-4	-8.80001E1	1.66893E-4	4.3869E-3	9.52005E-2	2.73093E1	-3.27005E1	-3.25996E1	2.68322E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80027E1	-7.39098E-4	-8.80003E1	4.29153E-4	4.57764E-3	9.49144E-2	2.73256E1	-3.26676E1	-3.26237E1	2.68099E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80022E1	-5.24521E-4	-8.80003E1	3.57628E-4	4.33922E-3	9.49383E-2	2.73186E1	-3.26438E1	-3.26358E1	2.68352E1	1.1993E-7	2.51575E-3	2.51575E-3	6.323E-3	3.00494E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80022E1	-5.00679E-4	-8.80002E1	7.39098E-4	4.3869E-3	9.48191E-2	2.73039E1	-3.26603E1	-3.26181E1	2.68538E1	1.19925E-7	2.52139E-3	2.52139E-3	6.29067E-3	2.99083E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80022E1	-2.6226E-4	-8.80005E1	6.4373E-4	4.36306E-3	9.49621E-2	2.73357E1	-3.2648E1	-3.26205E1	2.68263E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80024E1	-5.00679E-4	-8.80006E1	4.29153E-4	4.41074E-3	9.50813E-2	2.73204E1	-3.26634E1	-3.25813E1	2.68424E1	1.19883E-7	2.51952E-3	2.51952E-3	6.3074E-3	2.9863E-1
1.4E1	3.283E3	2.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80025E1	-5.24521E-4	-8.80004E1	4.29153E-4	4.12464E-3	9.50336E-2	2.73255E1	-3.26597E1	-3.26254E1	2.68394E1	1.19705E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.99E-1
1.5E1	8.2E1	2.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-5.48363E-4	-8.80007E1	5.00679E-4	4.55379E-3	9.47475E-2	2.72985E1	-3.26585E1	-3.262E1	2.68217E1	1.20174E-7	2.52538E-3	2.52538E-3	6.29098E-3	2.9978E-1
1.6E1	4.55E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80018E1	-4.29153E-4	-8.80005E1	6.4373E-4	4.33922E-3	9.49383E-2	2.73797E1	-3.26613E1	-3.26203E1	2.68179E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99879E-1
1.7E1	8.19E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80018E1	-3.33786E-4	-8.80005E1	5.48363E-4	4.48227E-3	9.48906E-2	2.73322E1	-3.26767E1	-3.26449E1	2.69097E1	1.19919E-7	2.51752E-3	2.51752E-3	6.31761E-3	3.01365E-1
1.8E1	3.531E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80021E1	-6.67572E-4	-8.80009E1	6.4373E-4	4.3869E-3	9.47714E-2	2.73461E1	-3.26603E1	-3.25997E1	2.68142E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02396E-1
1.9E1	1.992E3	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80022E1	-1.90735E-4	-8.80009E1	4.52995E-4	4.57764E-3	9.50336E-2	2.73045E1	-3.26488E1	-3.26422E1	2.68226E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01609E-1
2.0E1	2.4648E4	1.6E1	8.08E2	5.58E2	-7.41738E-2	-8.8002E1	-2.38419E-4	-8.80008E1	5.24521E-4	4.91142E-3	9.50098E-2	2.73293E1	-3.27245E1	-3.25936E1	2.68076E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80021E1	-4.76837E-4	-8.80005E1	3.33786E-4	4.45843E-3	9.48668E-2	2.73287E1	-3.26248E1	-3.2636E1	2.68496E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.97394E-1
2.2E1	1.655E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80021E1	-2.86102E-4	-8.80007E1	5.96046E-4	4.3869E-3	9.51052E-2	2.73748E1	-3.26867E1	-3.2608E1	2.68647E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.8002E1	-5.96046E-4	-8.80006E1	5.24521E-4	4.52995E-3	9.52959E-2	2.73039E1	-3.26585E1	-3.26242E1	2.68617E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1