[Scan]
initial_time=2016-01-18T22:52:39
final_time=2016-01-18T22:52:59
ip_count=19
run=1024
dataset=10
scan=773
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79272E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.37E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.38969E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.24661E-9
ql4_vset=
ql4_vmon=1.07288E-3
ql4_imon=1.61639E-8
mult1=-1.2712E-8
mult2=-2.76073E-9
rf_tmon=-3.44308E-3
rf_agc=3.36431E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.50997E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69984E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19588E1
lens5a_imon=1.972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=2.74772E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02383E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05265E1
cs_ea1_imon=2.61547E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93745E0
lens1_imon=1.25845E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03631E1
cs_ea2_imon=1.5002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.91026E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.17816E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15795E1
os_ea1_imon=2.44416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=1.15723E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.86845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.90548E-8
tplens_vset=1.4E-1
tplens_vmon=1.6668E0
tplens_imon=-6.88256E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.47861E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.55258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=9.21655E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32171E0
ionrepsh_imon=1.71858E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33203E1
lens5b_imon=2.15747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38778E0
os_ea2_imon=-5.71422E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00874E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.39606E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.37049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.26283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.22947E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73144E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68335E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.80075E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.11816E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.24005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.59045E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22838E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61411E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.94557E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62438E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3933E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21798E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31242E-3
inlet_lpb_pmon=2.99339E-1
chamber_ion_pmon=1.20099E-7
chamber_cvt_pmon=2.51923E-3
foreline_cvt_pmon=2.51923E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.99827E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.881E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80022E1	-7.39098E-4	-8.80006E1	5.72205E-4	4.76837E-3	9.49383E-2	2.73405E1	-3.2641E1	-3.25671E1	2.68581E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.0E0	9.69E4	7.8E1	3.16E2	1.6E2	-7.24736E-2	-8.80021E1	-7.15256E-4	-8.80005E1	4.76837E-4	4.57764E-3	9.48191E-2	2.73231E1	-3.26843E1	-3.26002E1	2.67848E1	1.20106E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99175E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.8002E1	-7.39098E-4	-8.80005E1	4.52995E-4	4.48227E-3	9.51052E-2	2.73411E1	-3.26797E1	-3.2629E1	2.68273E1	1.20191E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01742E-1
4.0E0	2.1535E4	1.5E1	6.55E2	3.98E2	-7.27053E-2	-8.80021E1	-5.24521E-4	-8.80003E1	8.82149E-4	4.81606E-3	9.48668E-2	2.73231E1	-3.26637E1	-3.26075E1	2.68472E1	1.19941E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.8002E1	-5.00679E-4	-8.80004E1	8.10623E-4	4.55379E-3	9.4986E-2	2.73375E1	-3.26664E1	-3.26156E1	2.68322E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.03804E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80023E1	-4.29153E-4	-8.80002E1	6.19888E-4	4.55379E-3	9.49144E-2	2.73021E1	-3.26338E1	-3.2647E1	2.68178E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80022E1	-6.91414E-4	-8.80003E1	5.00679E-4	4.17233E-3	9.48191E-2	2.73309E1	-3.26885E1	-3.2629E1	2.68665E1	1.20174E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80023E1	-6.91414E-4	-8.80003E1	6.4373E-4	4.14848E-3	9.52482E-2	2.73246E1	-3.26508E1	-3.2613E1	2.6846E1	1.19965E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.01871E-1
1.2E1	7.8E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80021E1	-5.72205E-4	-8.80006E1	6.19888E-4	4.55379E-3	9.50813E-2	2.73658E1	-3.26416E1	-3.2608E1	2.67968E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80025E1	-9.05991E-4	-8.80005E1	5.00679E-4	4.55379E-3	9.48429E-2	2.73081E1	-3.27149E1	-3.26188E1	2.68644E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
1.4E1	3.351E3	1.0E0	5.66E2	3.82E2	-7.286E-2	-8.80023E1	-8.58307E-4	-8.80006E1	6.19888E-4	4.64916E-3	9.51052E-2	2.73165E1	-3.26843E1	-3.2626E1	2.68508E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99686E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80022E1	-6.91414E-4	-8.80003E1	7.86781E-4	5.07832E-3	9.48429E-2	2.73484E1	-3.26549E1	-3.26284E1	2.6825E1	1.19705E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.6E1	4.37E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80021E1	-6.19888E-4	-8.80006E1	8.82149E-4	4.673E-3	9.47714E-2	2.73246E1	-3.26502E1	-3.26178E1	2.68737E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.98481E-1
1.7E1	8.18E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80023E1	-5.24521E-4	-8.80005E1	7.86781E-4	4.62532E-3	9.50813E-2	2.73261E1	-3.26663E1	-3.26092E1	2.684E1	1.20122E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.98222E-1
1.8E1	3.396E3	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80024E1	-6.4373E-4	-8.80004E1	1.0252E-3	4.57764E-3	9.50336E-2	2.73155E1	-3.26762E1	-3.26499E1	2.68617E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.9E1	1.96E3	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80022E1	-6.67572E-4	-8.80006E1	5.72205E-4	4.31538E-3	9.50098E-2	2.73234E1	-3.26797E1	-3.26425E1	2.68581E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
2.0E1	2.4609E4	1.1E1	8.08E2	5.58E2	-7.22418E-2	-8.80024E1	-5.48363E-4	-8.80004E1	4.05312E-4	4.76837E-3	9.49144E-2	2.73291E1	-3.26615E1	-3.2626E1	2.68394E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80028E1	-6.91414E-4	-8.80005E1	5.00679E-4	4.26769E-3	9.50336E-2	2.73151E1	-3.26372E1	-3.26296E1	2.67962E1	1.1966E-7	2.51025E-3	2.51025E-3	6.31858E-3	3.0201E-1
2.2E1	1.781E3	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80028E1	-7.15256E-4	-8.80005E1	4.52995E-4	4.45843E-3	9.49144E-2	2.73188E1	-3.26447E1	-3.26348E1	2.68725E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9892E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80028E1	-4.76837E-4	-8.80006E1	1.07288E-3	4.36306E-3	9.50575E-2	2.73144E1	-3.26849E1	-3.26008E1	2.68335E1	1.20099E-7	2.51923E-3	2.51923E-3	6.31242E-3	2.99339E-1