[Scan]
initial_time=2016-01-18T22:53:59
final_time=2016-01-18T22:54:19
ip_count=19
run=1024
dataset=10
scan=776
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.8089E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.1454E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.43226E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.21534E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.61627E-8
mult1=-1.95294E-8
mult2=-2.71462E-9
rf_tmon=-5.53984E-3
rf_agc=3.29851E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.27132E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62829E0
bslens_imon=1.9934E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=2.02669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5387E1
cs_ef1b_imon=2.73578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.01897E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03943E1
cs_ea1_imon=2.59772E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9981E0
lens1_imon=1.70501E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64892E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.45963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=2.89668E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.17552E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1154E1
os_restr1_imon=4.27809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.40557E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.07739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.21666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.936E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.89633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.91217E-8
tplens_vset=1.4E-1
tplens_vmon=1.66787E0
tplens_imon=-5.30063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.55516E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.97794E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=8.97098E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21725E0
ionrepsh_imon=1.73109E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43715E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.16567E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04529E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78117E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11199E1
os_restr2_imon=3.37696E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.2336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.1038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.73938E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.12807E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14173E0
cs_ionaccel_imon=-1.70577E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.73997E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-8.82134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86222E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.48735E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.04394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.41812E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.95012E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62992E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6257E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28358E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37268E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02617E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21858E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.6384E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.927E3	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80023E1	-3.57628E-4	-8.80002E1	5.96046E-4	4.64916E-3	9.47952E-2	2.72786E1	-3.26756E1	-3.26567E1	2.68358E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
2.0E0	9.7461E4	7.6E1	3.16E2	1.6E2	-7.33239E-2	-8.80022E1	-5.48363E-4	-8.80003E1	8.10623E-4	4.43459E-3	9.47714E-2	2.7318E1	-3.26842E1	-3.26229E1	2.68316E1	1.20158E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.00966E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80027E1	-9.29832E-4	-8.80004E1	8.34465E-4	4.48227E-3	9.49621E-2	2.73305E1	-3.2639E1	-3.26372E1	2.68184E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.01475E-1
4.0E0	2.1644E4	2.0E1	6.55E2	3.98E2	-7.201E-2	-8.80025E1	-6.91414E-4	-8.80006E1	6.19888E-4	4.57764E-3	9.50098E-2	2.73353E1	-3.26693E1	-3.26351E1	2.68406E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80022E1	-6.91414E-4	-8.80005E1	5.72205E-4	4.62532E-3	9.50575E-2	2.73475E1	-3.26535E1	-3.26347E1	2.68203E1	1.20127E-7	2.51886E-3	2.51886E-3	6.3126E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80023E1	-5.24521E-4	-8.80008E1	5.72205E-4	4.33922E-3	9.52244E-2	2.7346E1	-3.26332E1	-3.26092E1	2.68366E1	1.19895E-7	2.51758E-3	2.51758E-3	6.31902E-3	3.0147E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.8002E1	-3.09944E-4	-8.80007E1	5.72205E-4	4.52995E-3	9.47714E-2	2.73051E1	-3.26467E1	-3.26313E1	2.68358E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80023E1	-3.09944E-4	-8.80005E1	5.72205E-4	4.57764E-3	9.47952E-2	2.73177E1	-3.26645E1	-3.26194E1	2.68346E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.2E1	7.5E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80023E1	-2.6226E-4	-8.80008E1	5.72205E-4	4.36306E-3	9.49383E-2	2.73255E1	-3.26669E1	-3.26104E1	2.68184E1	1.20017E-7	2.51225E-3	2.51225E-3	6.36244E-3	2.9978E-1
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80023E1	-4.76837E-5	-8.80006E1	5.96046E-4	4.72069E-3	9.48191E-2	2.73502E1	-3.26278E1	-3.26386E1	2.68671E1	1.19861E-7	2.50789E-3	2.50789E-3	6.32386E-3	3.00041E-1
1.4E1	3.34E3	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.8002E1	-3.57628E-4	-8.80003E1	5.72205E-4	4.74453E-3	9.4986E-2	2.73225E1	-3.26524E1	-3.26621E1	2.68316E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.5E1	6.7E1	1.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80025E1	-5.00679E-4	-8.80003E1	4.05312E-4	4.3869E-3	9.4676E-2	2.73261E1	-3.26368E1	-3.26098E1	2.68737E1	1.19501E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01209E-1
1.6E1	4.14E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80027E1	-3.09944E-4	-8.80006E1	6.91414E-4	4.41074E-3	9.48429E-2	2.7311E1	-3.26661E1	-3.26425E1	2.68267E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
1.7E1	7.83E2	2.0E0	6.87E2	4.7E2	-7.286E-2	-8.80027E1	-5.00679E-4	-8.80008E1	3.57628E-4	4.52995E-3	9.53436E-2	2.73375E1	-3.26759E1	-3.26314E1	2.68063E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.8E1	3.48E3	1.0E0	7.27E2	5.0E2	-7.201E-2	-8.80027E1	-6.19888E-4	-8.80005E1	4.76837E-4	4.45843E-3	9.52482E-2	2.73033E1	-3.2644E1	-3.26278E1	2.6833E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9874E-1
1.9E1	2.029E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80025E1	-6.19888E-4	-8.80007E1	4.52995E-4	4.14848E-3	9.5129E-2	2.7355E1	-3.26639E1	-3.25834E1	2.68654E1	1.19705E-7	2.5199E-3	2.5199E-3	6.27461E-3	3.00563E-1
2.0E1	2.4737E4	1.6E1	8.08E2	5.58E2	-7.21643E-2	-8.80026E1	-5.00679E-4	-8.80006E1	4.29153E-4	4.33922E-3	9.49144E-2	2.73099E1	-3.26633E1	-3.26344E1	2.6792E1	1.19653E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80028E1	-5.24521E-4	-8.80007E1	5.00679E-4	4.3869E-3	9.50813E-2	2.73151E1	-3.26461E1	-3.2603E1	2.68298E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
2.2E1	1.751E3	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80025E1	-3.33786E-4	-8.80007E1	5.24521E-4	4.88758E-3	9.49621E-2	2.73145E1	-3.26974E1	-3.26254E1	2.67896E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80025E1	-3.57628E-4	-8.80001E1	2.38419E-4	4.69685E-3	9.51052E-2	2.73369E1	-3.26458E1	-3.26362E1	2.68412E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9952E-1