[Scan]
initial_time=2016-01-18T22:54:53
final_time=2016-01-18T22:55:12
ip_count=19
run=1024
dataset=10
scan=778
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.81985E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.53367E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.43653E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.27555E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.61393E-8
mult1=-1.47718E-8
mult2=-2.87808E-9
rf_tmon=-2.15577E-3
rf_agc=3.53738E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.53215E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.73691E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04493E1
cs_ea1_imon=2.61547E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.79644E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.47401E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.88107E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.17204E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1491E1
os_ea1_imon=2.43035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63389E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.16289E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0223E1
cs_anode1_imon=2.8753E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.90868E-8
tplens_vset=1.4E-1
tplens_vmon=1.68273E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26832E1
iondef2_imon=1.55152E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98087E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.32562E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.72566E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38954E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02933E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.35715E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.26884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73222E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.7936E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.10324E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17879E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56639E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86014E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.46304E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.23486E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.27191E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23724E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.4048E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.94221E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63291E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39204E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.41562E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21762E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83318E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.877E3	0.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80022E1	-7.15256E-4	-8.80004E1	6.4373E-4	4.43459E-3	9.50813E-2	2.73608E1	-3.26689E1	-3.25997E1	2.68322E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.98222E-1
2.0E0	9.7018E4	1.02E2	3.16E2	1.6E2	-7.20871E-2	-8.80022E1	-7.39098E-4	-8.80003E1	5.48363E-4	4.60148E-3	9.49383E-2	2.73234E1	-3.26703E1	-3.26313E1	2.68484E1	1.2033E-7	2.50789E-3	2.50789E-3	6.32936E-3	2.99E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80025E1	-5.96046E-4	-8.80005E1	5.48363E-4	4.8399E-3	9.49621E-2	2.73526E1	-3.26759E1	-3.2641E1	2.68442E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.98665E-1
4.0E0	2.1072E4	7.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80023E1	-5.96046E-4	-8.80003E1	4.29153E-4	4.79221E-3	9.4986E-2	2.73139E1	-3.26437E1	-3.26042E1	2.6816E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80024E1	-5.00679E-4	-8.80003E1	7.39098E-4	4.72069E-3	9.4986E-2	2.73308E1	-3.26664E1	-3.26193E1	2.681E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80027E1	-8.82149E-4	-8.80003E1	8.10623E-4	4.74453E-3	9.49621E-2	2.72945E1	-3.26529E1	-3.26059E1	2.68557E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.01742E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80029E1	-4.05312E-4	-8.80003E1	5.24521E-4	4.55379E-3	9.52244E-2	2.73155E1	-3.26526E1	-3.26247E1	2.68088E1	1.19822E-7	2.5267E-3	2.5267E-3	6.33809E-3	3.01121E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80028E1	-7.62939E-4	-8.80005E1	2.86102E-4	4.62532E-3	9.55582E-2	2.73145E1	-3.26331E1	-3.26331E1	2.6849E1	1.19794E-7	2.51675E-3	2.51675E-3	6.33706E-3	2.99353E-1
1.2E1	7.8E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80028E1	-6.4373E-4	-8.80003E1	4.29153E-4	4.69685E-3	9.51767E-2	2.73435E1	-3.2629E1	-3.26554E1	2.68615E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.98481E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80026E1	-8.34465E-4	-8.80004E1	4.52995E-4	4.76837E-3	9.52005E-2	2.73187E1	-3.26661E1	-3.26242E1	2.68202E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.97394E-1
1.4E1	3.177E3	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80026E1	-9.53674E-4	-8.80002E1	5.24521E-4	4.60148E-3	9.53913E-2	2.73394E1	-3.26756E1	-3.26444E1	2.68286E1	1.20158E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.97394E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80022E1	-7.86781E-4	-8.80002E1	4.29153E-4	4.673E-3	9.54151E-2	2.7321E1	-3.26579E1	-3.26266E1	2.68256E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.96973E-1
1.6E1	4.82E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80025E1	-7.39098E-4	-8.80002E1	3.57628E-4	4.74453E-3	9.5129E-2	2.73141E1	-3.26554E1	-3.26122E1	2.68496E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.97647E-1
1.7E1	8.7E2	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80023E1	-6.19888E-4	-8.80006E1	3.57628E-4	4.72069E-3	9.52005E-2	2.73169E1	-3.27033E1	-3.26124E1	2.68343E1	1.19601E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00824E-1
1.8E1	3.546E3	7.0E0	7.27E2	5.0E2	-7.10051E-2	-8.80022E1	-8.34465E-4	-8.80008E1	6.19888E-4	4.52995E-3	9.51529E-2	2.73063E1	-3.26543E1	-3.26496E1	2.6825E1	1.20158E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.02253E-1
1.9E1	2.049E3	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.8002E1	-5.24521E-4	-8.80004E1	7.62939E-4	4.45843E-3	9.50336E-2	2.73027E1	-3.26723E1	-3.26272E1	2.68731E1	1.198E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02769E-1
2.0E1	2.4462E4	1.1E1	8.08E2	5.58E2	-7.23189E-2	-8.80023E1	-5.24521E-4	-8.80005E1	6.91414E-4	4.07696E-3	9.51529E-2	2.73322E1	-3.26431E1	-3.26467E1	2.68569E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01085E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80025E1	-4.05312E-4	-8.80006E1	8.82149E-4	4.43459E-3	9.50098E-2	2.73189E1	-3.26597E1	-3.26212E1	2.68298E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
2.2E1	1.717E3	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80023E1	-8.82149E-4	-8.80005E1	4.05312E-4	4.24385E-3	9.50575E-2	2.73175E1	-3.26933E1	-3.26272E1	2.68232E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80022E1	-8.82149E-4	-8.80009E1	4.52995E-4	4.52995E-3	9.52244E-2	2.73222E1	-3.26832E1	-3.26443E1	2.68418E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00453E-1