[Scan]
initial_time=2016-01-18T22:55:20
final_time=2016-01-18T22:55:39
ip_count=19
run=1024
dataset=10
scan=779
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79725E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.5856E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.41318E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.24267E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.6167E-8
mult1=-1.92995E-8
mult2=-2.91532E-9
rf_tmon=-3.97856E-3
rf_agc=3.34861E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.50771E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62728E0
bslens_imon=2.26011E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5398E1
cs_ef1b_imon=2.74481E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.01937E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04451E1
cs_ea1_imon=2.59989E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98228E0
lens1_imon=1.79998E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64875E1
os_ef1alow_imon=2.96132E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.46693E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.89877E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.17155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11691E1
os_restr1_imon=4.28331E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15016E1
os_ea1_imon=2.40947E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.06106E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.17493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91977E2
cs_nozzle_imon=1.93721E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=2.88104E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.90445E-8
tplens_vset=1.4E-1
tplens_vmon=1.63848E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26372E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26461E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.97942E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.47344E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=1.72955E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34259E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74733E1
cs_ef2b_imon=3.11493E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43025E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.14864E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.37302E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69429E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11216E1
os_restr2_imon=3.37349E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01607E1
cs_anode2_imon=2.2416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6854E1
iondef4_imon=1.10762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.81939E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.07449E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16431E0
cs_ionaccel_imon=-1.77875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47195E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-9.75966E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=6.40121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.87903E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35536E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.41186E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06918E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61298E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.94589E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62748E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.73869E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49328E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.84295E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.88691E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81998E-1
res40_imon=-2.61629E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.875E3	1.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80028E1	-4.76837E-4	-8.80004E1	5.72205E-4	4.95911E-3	9.50575E-2	2.73281E1	-3.26673E1	-3.26124E1	2.67752E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01223E-1
2.0E0	9.823E4	7.2E1	3.16E2	1.6E2	-7.27053E-2	-8.80026E1	-5.96046E-4	-8.80004E1	4.05312E-4	4.62532E-3	9.52482E-2	2.73105E1	-3.26392E1	-3.26086E1	2.69187E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01995E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80027E1	-3.33786E-4	-8.80006E1	4.29153E-4	4.98295E-3	9.49144E-2	2.73319E1	-3.26459E1	-3.26323E1	2.68406E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
4.0E0	2.1351E4	6.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80025E1	-5.96046E-4	-8.80002E1	6.67572E-4	4.52995E-3	9.50098E-2	2.73194E1	-3.26697E1	-3.26054E1	2.6825E1	1.1993E-7	2.52093E-3	2.52093E-3	6.323E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80023E1	-4.52995E-4	-8.80004E1	5.24521E-4	4.8399E-3	9.51767E-2	2.73249E1	-3.26819E1	-3.26332E1	2.68331E1	1.19829E-7	2.51838E-3	2.51838E-3	6.31879E-3	3.01337E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80023E1	-3.33786E-4	-8.80005E1	3.33786E-4	4.86374E-3	9.49144E-2	2.73369E1	-3.26476E1	-3.26146E1	2.68268E1	1.19809E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80023E1	-3.8147E-4	-8.80006E1	4.05312E-4	4.76837E-3	9.50813E-2	2.73422E1	-3.26799E1	-3.26028E1	2.67998E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02396E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80023E1	-2.86102E-4	-8.80009E1	2.86102E-4	4.62532E-3	9.47952E-2	2.73189E1	-3.26422E1	-3.26122E1	2.68418E1	1.20092E-7	2.51814E-3	2.51814E-3	6.33919E-3	3.006E-1
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.8002E1	-3.09944E-4	-8.80006E1	3.33786E-4	4.62532E-3	9.50336E-2	2.73225E1	-3.26428E1	-3.2602E1	2.684E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.8002E1	-5.24521E-4	-8.80001E1	3.57628E-4	4.79221E-3	9.48429E-2	2.73123E1	-3.26434E1	-3.26476E1	2.68647E1	1.20278E-7	2.52757E-3	2.52757E-3	6.3074E-3	3.00824E-1
1.4E1	3.175E3	3.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80021E1	-5.00679E-4	-8.80007E1	5.00679E-4	4.55379E-3	9.50575E-2	2.73299E1	-3.26484E1	-3.26337E1	2.68358E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00563E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80023E1	-2.6226E-4	-8.80002E1	4.05312E-4	4.41074E-3	9.49144E-2	2.73213E1	-3.2647E1	-3.262E1	2.68755E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01223E-1
1.6E1	4.55E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80022E1	-3.8147E-4	-8.8E1	1.43051E-4	4.31538E-3	9.46999E-2	2.73315E1	-3.26597E1	-3.26248E1	2.68166E1	1.19861E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.01085E-1
1.7E1	8.21E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80023E1	-3.09944E-4	-8.80004E1	2.14577E-4	4.36306E-3	9.51767E-2	2.73069E1	-3.26443E1	-3.26313E1	2.68581E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.8E1	3.522E3	3.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80023E1	-6.67572E-4	-8.80004E1	1.90735E-4	4.17233E-3	9.5129E-2	2.73033E1	-3.2653E1	-3.26536E1	2.68166E1	1.20106E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.01223E-1
1.9E1	1.964E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80024E1	-4.29153E-4	-8.80008E1	7.15256E-5	4.74453E-3	9.48668E-2	2.73676E1	-3.26747E1	-3.26182E1	2.68661E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
2.0E1	2.4607E4	6.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80023E1	-2.86102E-4	-8.80004E1	3.33786E-4	4.64916E-3	9.52721E-2	2.73271E1	-3.26223E1	-3.26187E1	2.67814E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80024E1	-4.29153E-4	-8.8E1	9.53674E-5	4.60148E-3	9.50098E-2	2.73399E1	-3.26797E1	-3.2616E1	2.68812E1	1.20031E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00676E-1
2.2E1	1.738E3	2.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80025E1	-3.09944E-4	-8.80002E1	2.86102E-4	4.64916E-3	9.51529E-2	2.73246E1	-3.26608E1	-3.26349E1	2.68202E1	1.20055E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9892E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80023E1	-7.15256E-5	-8.80002E1	2.38419E-4	4.673E-3	9.51529E-2	2.73411E1	-3.26461E1	-3.26372E1	2.6854E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.98665E-1