[Scan]
initial_time=2016-01-18T22:56:13
final_time=2016-01-18T22:56:33
ip_count=19
run=1024
dataset=10
scan=781
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.76473E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.31611E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.45123E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.25512E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.6238E-8
mult1=-1.54575E-8
mult2=-2.68994E-9
rf_tmon=-3.92547E-3
rf_agc=3.25599E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.47981E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6963E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19837E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05011E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53872E1
cs_ef1b_imon=2.74801E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02249E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.61423E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96258E0
lens1_imon=1.43118E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64758E1
os_ef1alow_imon=2.96715E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03385E1
cs_ea2_imon=1.48749E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.88969E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.17235E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11545E1
os_restr1_imon=4.29597E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15332E1
os_ea1_imon=2.44837E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63506E1
os_ef1bup_imon=3.06718E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21641E0
cs_ionrep_imon=1.15695E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93599E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02088E1
cs_anode1_imon=2.87568E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.89793E-8
tplens_vset=1.4E-1
tplens_vmon=1.74136E0
tplens_imon=-4.44037E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26378E1
iondef3_imon=1.47815E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.57548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98116E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=9.14776E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2826E0
ionrepsh_imon=1.71136E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33392E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74761E1
cs_ef2b_imon=3.12323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42276E0
os_ea2_imon=-7.76353E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00833E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71387E1
cs_ef2a_imon=3.16877E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02537E0
os_ef2alow_imon=-2.46713E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77746E-1
os_ef2bup_imon=-5.20729E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10929E1
os_restr2_imon=3.36143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.27553E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.2424E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09621E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.09729E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.78585E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.09299E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15414E0
cs_ionaccel_imon=-1.76262E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47429E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56554E1
einzel_imon=7.64113E-6
window_vset=0.0E0
window_vmon=2.37333E-1
window_imon=-7.50631E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39061E-4
mask2_vset=0.0E0
mask2_vmon=-1.86136E1
mask2_imon=-6.84462E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.9175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.35626E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.32181E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.15988E0
defgridb_imon=6.15381E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.42757E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0742E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6158E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.95589E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62463E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62505E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94351E-2
os_fil2_imon=-2.66525E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88872E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22258E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.5355E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.48089E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21767E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99343E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52553E-3
foreline_cvt_pmon=2.52553E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.27049E-1
res40_imon=-2.38928E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.884E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80027E1	-2.6226E-4	-8.80004E1	5.96046E-4	4.3869E-3	9.48906E-2	2.73387E1	-3.2682E1	-3.26278E1	2.68695E1	1.19851E-7	2.51675E-3	2.51675E-3	6.3074E-3	3.02743E-1
2.0E0	9.7286E4	7.8E1	3.16E2	1.6E2	-7.22418E-2	-8.80025E1	-3.09944E-4	-8.80004E1	6.91414E-4	4.57764E-3	9.49383E-2	2.73163E1	-3.26414E1	-3.26249E1	2.68228E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.01995E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80024E1	-2.86102E-4	-8.80005E1	6.19888E-4	4.69685E-3	9.50336E-2	2.73526E1	-3.26874E1	-3.26434E1	2.68441E1	1.20164E-7	2.52151E-3	2.52151E-3	6.32684E-3	3.00567E-1
4.0E0	2.153E4	9.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80023E1	-5.00679E-4	-8.80004E1	3.8147E-4	4.8399E-3	9.51529E-2	2.73262E1	-3.2638E1	-3.26169E1	2.68215E1	1.19831E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.00989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80021E1	-6.67572E-4	-8.80003E1	5.72205E-4	4.8399E-3	9.50575E-2	2.73375E1	-3.26806E1	-3.2584E1	2.68126E1	1.20092E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.02621E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80024E1	-6.67572E-4	-8.80001E1	4.52995E-4	4.79221E-3	9.51767E-2	2.73093E1	-3.26428E1	-3.2614E1	2.67968E1	1.19672E-7	2.519E-3	2.519E-3	6.32761E-3	3.00005E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80025E1	-6.67572E-4	-8.80003E1	5.48363E-4	4.55379E-3	9.49383E-2	2.73051E1	-3.26392E1	-3.2644E1	2.68683E1	1.20069E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80027E1	-7.15256E-4	-8.80002E1	5.00679E-4	4.72069E-3	9.48191E-2	2.73285E1	-3.26825E1	-3.2617E1	2.68268E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80024E1	-7.15256E-4	-8.80003E1	5.24521E-4	4.43459E-3	9.50336E-2	2.73333E1	-3.26549E1	-3.26675E1	2.68454E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99879E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80025E1	-5.00679E-4	-8.80004E1	4.52995E-4	4.55379E-3	9.51529E-2	2.73269E1	-3.26655E1	-3.26142E1	2.6846E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
1.4E1	3.242E3	5.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80025E1	-4.05312E-4	-8.80002E1	5.24521E-4	4.52995E-3	9.50575E-2	2.73357E1	-3.26464E1	-3.26362E1	2.68511E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.01738E-1
1.5E1	8.8E1	0.0E0	6.06E2	4.11E2	-7.06187E-2	-8.80023E1	-3.33786E-4	-8.80004E1	3.57628E-4	4.673E-3	9.50098E-2	2.73169E1	-3.26573E1	-3.26006E1	2.68232E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.6E1	4.0E2	0.0E0	6.47E2	4.41E2	-7.05415E-2	-8.80022E1	-6.67572E-4	-8.80003E1	5.48363E-4	4.62532E-3	9.5129E-2	2.73207E1	-3.26428E1	-3.26386E1	2.68556E1	1.20311E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
1.7E1	8.4E2	3.0E0	6.87E2	4.7E2	-7.08504E-2	-8.80025E1	-1.00136E-3	-8.80007E1	5.48363E-4	4.17233E-3	9.52959E-2	2.73261E1	-3.26603E1	-3.26506E1	2.68532E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
1.8E1	3.552E3	1.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80022E1	-6.4373E-4	-8.80009E1	7.86781E-4	4.31538E-3	9.48668E-2	2.73249E1	-3.26819E1	-3.2617E1	2.6813E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
1.9E1	1.959E3	2.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80022E1	-8.34465E-4	-8.80006E1	4.52995E-4	4.17233E-3	9.52244E-2	2.73526E1	-3.26675E1	-3.26254E1	2.68244E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
2.0E1	2.4258E4	1.2E1	8.08E2	5.58E2	-7.201E-2	-8.80023E1	-6.19888E-4	-8.80007E1	4.52995E-4	3.95775E-3	9.49621E-2	2.73544E1	-3.26849E1	-3.26182E1	2.68358E1	1.19653E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.02396E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80026E1	-5.72205E-4	-8.80003E1	5.24521E-4	4.31538E-3	9.50098E-2	2.72973E1	-3.26482E1	-3.262E1	2.68929E1	1.19965E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.03712E-1
2.2E1	1.642E3	1.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80027E1	-8.10623E-4	-8.80003E1	5.48363E-4	4.33922E-3	9.50575E-2	2.7337E1	-3.26844E1	-3.26502E1	2.67931E1	1.19549E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00563E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80025E1	-1.12057E-3	-8.80003E1	7.15256E-5	4.91142E-3	9.4986E-2	2.73051E1	-3.26644E1	-3.26378E1	2.68382E1	1.19941E-7	2.52553E-3	2.52553E-3	6.3074E-3	2.99343E-1