[Scan]
initial_time=2016-01-18T22:57:33
final_time=2016-01-18T22:57:53
ip_count=19
run=1024
dataset=10
scan=784
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.84493E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.39665E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.40972E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.23223E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.61346E-8
mult1=-2.4767E-8
mult2=-2.60883E-9
rf_tmon=-8.32166E-3
rf_agc=2.94282E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.6783E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=2.022E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=2.73331E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.61646E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.49232E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03324E1
cs_ea2_imon=1.48234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.89657E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.17297E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14675E1
os_ea1_imon=2.4409E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.18277E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.88431E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.90996E-8
tplens_vset=1.4E-1
tplens_vmon=1.67087E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.52164E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.54795E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98119E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=8.97205E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.73757E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37887E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.14992E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.27657E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02055E1
cs_anode2_imon=2.23488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.07931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.79571E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.08504E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.74691E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=5.82907E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.39687E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07738E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61451E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.93825E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62269E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.32611E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.94731E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.899E3	1.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80024E1	-6.91414E-4	-8.80005E1	4.05312E-4	4.43459E-3	9.48906E-2	2.73411E1	-3.2682E1	-3.26325E1	2.68511E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9926E-1
2.0E0	9.6233E4	1.12E2	3.16E2	1.6E2	-7.27828E-2	-8.80026E1	-6.67572E-4	-8.80003E1	4.76837E-4	4.55379E-3	9.50098E-2	2.73405E1	-3.26861E1	-3.26428E1	2.68526E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9943E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80026E1	-8.82149E-4	-8.80004E1	5.48363E-4	4.36306E-3	9.53436E-2	2.73246E1	-3.26526E1	-3.26107E1	2.68394E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9841E-1
4.0E0	2.1588E4	8.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80024E1	-7.62939E-4	-8.80003E1	2.38419E-4	4.60148E-3	9.51052E-2	2.73163E1	-3.26903E1	-3.26573E1	2.68192E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80033E1	-8.10623E-4	-8.80006E1	4.52995E-4	4.60148E-3	9.50336E-2	2.73195E1	-3.26741E1	-3.2644E1	2.68028E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80029E1	-8.10623E-4	-8.80005E1	3.57628E-4	4.52995E-3	9.50098E-2	2.73171E1	-3.26663E1	-3.25984E1	2.68545E1	1.20209E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.02511E-1
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80027E1	-7.86781E-4	-8.80003E1	5.72205E-4	4.86374E-3	9.50575E-2	2.73033E1	-3.2652E1	-3.2639E1	2.68538E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80025E1	-1.28746E-3	-8.80005E1	3.8147E-4	4.81606E-3	9.50336E-2	2.73111E1	-3.26398E1	-3.26332E1	2.68671E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.99E-1
1.2E1	7.7E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80025E1	-1.07288E-3	-8.80005E1	5.72205E-4	4.91142E-3	9.47952E-2	2.72965E1	-3.26676E1	-3.26236E1	2.68358E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.99E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80023E1	-1.00136E-3	-8.80006E1	4.52995E-4	4.76837E-3	9.5129E-2	2.73165E1	-3.26338E1	-3.26302E1	2.6828E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99879E-1
1.4E1	3.137E3	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80027E1	-1.14441E-3	-8.80004E1	6.19888E-4	5.10216E-3	9.53197E-2	2.73151E1	-3.26555E1	-3.26378E1	2.68508E1	1.19953E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.01738E-1
1.5E1	9.9E1	1.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80027E1	-1.14441E-3	-8.80003E1	8.34465E-4	4.673E-3	9.52244E-2	2.73339E1	-3.26242E1	-3.26107E1	2.6828E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.6E1	4.12E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80026E1	-1.0252E-3	-8.80002E1	6.4373E-4	4.673E-3	9.51052E-2	2.73281E1	-3.26561E1	-3.25953E1	2.6798E1	1.20096E-7	2.51826E-3	2.51826E-3	6.3074E-3	3.00954E-1
1.7E1	8.25E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80028E1	-7.39098E-4	-8.80005E1	5.00679E-4	4.60148E-3	9.51529E-2	2.73159E1	-3.26533E1	-3.26004E1	2.68513E1					
1.8E1	3.426E3	4.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80028E1	-6.91414E-4	-8.80007E1	5.48363E-4	4.93526E-3	9.49144E-2	2.72841E1	-3.26794E1	-3.26101E1	2.68238E1	1.20161E-7	2.5165E-3	2.5165E-3	6.31251E-3	3.01609E-1
1.9E1	2.005E3	3.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80024E1	-8.82149E-4	-8.80005E1	6.91414E-4	4.57764E-3	9.50813E-2	2.73434E1	-3.26626E1	-3.26337E1	2.68157E1	1.20019E-7	2.51203E-3	2.51203E-3	6.29558E-3	3.00761E-1
2.0E1	2.4568E4	1.3E1	8.08E2	5.58E2	-7.27053E-2	-8.80026E1	-1.0252E-3	-8.80005E1	4.29153E-4	4.62532E-3	9.50336E-2	2.73159E1	-3.26717E1	-3.26272E1	2.68382E1	1.19941E-7	2.51077E-3	2.51077E-3	6.31269E-3	3.00097E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80029E1	-9.77516E-4	-8.80005E1	5.00679E-4	4.64916E-3	9.47475E-2	2.73375E1	-3.26596E1	-3.26163E1	2.68355E1	1.19766E-7	2.52921E-3	2.52921E-3	6.31299E-3	3.00676E-1
2.2E1	1.724E3	1.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80029E1	-8.82149E-4	-8.80007E1	3.57628E-4	4.52995E-3	9.50098E-2	2.73201E1	-3.26524E1	-3.26374E1	2.68376E1	1.19979E-7	2.51472E-3	2.51472E-3	6.29185E-3	2.98768E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80027E1	-8.10623E-4	-8.80006E1	5.48363E-4	4.76837E-3	9.48668E-2	2.73243E1	-3.26398E1	-3.26128E1	2.68256E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00302E-1