[Scan]
initial_time=2016-01-18T22:58:53
final_time=2016-01-18T22:59:13
ip_count=19
run=1024
dataset=10
scan=787
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79432E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.18021E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.43528E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.25729E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.61903E-8
mult1=-1.53874E-8
mult2=-2.64875E-9
rf_tmon=-5.19136E-3
rf_agc=3.23903E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.74219E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67908E0
bslens_imon=2.586E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19538E1
lens5a_imon=1.98103E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53973E1
cs_ef1b_imon=2.73476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02203E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.58188E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9754E0
lens1_imon=1.418E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64652E1
os_ef1alow_imon=2.97204E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04077E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=2.90243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.16829E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.27334E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15094E1
os_ea1_imon=2.43401E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63523E1
os_ef1bup_imon=3.06224E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24399E0
cs_ionrep_imon=1.1638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.88783E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.91333E-8
tplens_vset=1.4E-1
tplens_vmon=1.66951E0
tplens_imon=-2.25444E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.48313E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.53929E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98301E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=9.02522E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31137E0
ionrepsh_imon=1.7216E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33733E1
lens5b_imon=2.15324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.12062E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42118E0
os_ea2_imon=-7.79498E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00537E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71189E1
cs_ef2a_imon=3.15992E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0346E0
os_ef2alow_imon=-2.46952E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73305E-1
os_ef2bup_imon=-5.2802E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11311E1
os_restr2_imon=3.36052E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.26784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.10391E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68851E1
iondef4_imon=1.09589E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.78374E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.08117E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14698E0
cs_ionaccel_imon=-1.7734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47469E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.65041E-6
window_vset=0.0E0
window_vmon=2.5627E-1
window_imon=-7.40451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86119E1
mask2_imon=-8.37758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.72643E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.01094E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32753E0
defgridb_imon=6.17986E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.42077E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61331E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.95253E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62952E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62341E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06781E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82859E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36778E-1
cs_fil2_imon=-2.54399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.30374E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=2.99348E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3985E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.888E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80023E1	-1.04904E-3	-8.80005E1	4.76837E-4	4.62532E-3	9.52721E-2	2.73198E1	-3.26915E1	-3.26119E1	2.68484E1	1.20191E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.00676E-1
2.0E0	9.6649E4	9.6E1	3.16E2	1.6E2	-7.18554E-2	-8.80026E1	-7.86781E-4	-8.80007E1	7.15256E-5	4.72069E-3	9.51529E-2	2.73123E1	-3.26688E1	-3.26215E1	2.68572E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
3.0E0	9.0E0	1.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80027E1	-5.00679E-4	-8.80004E1	3.09944E-4	4.62532E-3	9.52721E-2	2.73265E1	-3.26683E1	-3.26295E1	2.68285E1	1.20156E-7	2.51404E-3	2.51404E-3	6.32632E-3	3.00707E-1
4.0E0	2.1458E4	7.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80024E1	-6.67572E-4	-8.80003E1	4.29153E-4	4.50611E-3	9.51767E-2	2.73357E1	-3.26615E1	-3.26422E1	2.68653E1	1.20142E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80024E1	-6.19888E-4	-8.80005E1	2.6226E-4	4.52995E-3	9.53197E-2	2.73165E1	-3.26663E1	-3.262E1	2.68418E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80023E1	-6.67572E-4	-8.80003E1	4.52995E-4	4.76837E-3	9.53436E-2	2.73057E1	-3.26608E1	-3.2613E1	2.68995E1	1.20137E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.02277E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80022E1	-8.34465E-4	-8.80006E1	5.96046E-4	4.88758E-3	9.53674E-2	2.73201E1	-3.26452E1	-3.26116E1	2.68094E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80024E1	-4.52995E-4	-8.80005E1	3.8147E-4	4.673E-3	9.5439E-2	2.73255E1	-3.26494E1	-3.26056E1	2.68401E1	1.2054E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80026E1	-5.48363E-4	-8.80004E1	1.90735E-4	4.72069E-3	9.52005E-2	2.73099E1	-3.2644E1	-3.26242E1	2.6849E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9978E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80022E1	-6.4373E-4	-8.80002E1	1.90735E-4	4.8399E-3	9.52721E-2	2.73249E1	-3.26717E1	-3.26074E1	2.68196E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.96929E-1
1.4E1	3.198E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80022E1	-8.34465E-4	-8.80001E1	-9.53674E-5	4.72069E-3	9.5582E-2	2.73249E1	-3.26404E1	-3.26092E1	2.68448E1	1.19902E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99686E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80022E1	-1.0252E-3	-8.80003E1	2.6226E-4	4.36306E-3	9.53674E-2	2.73502E1	-3.26488E1	-3.26242E1	2.68388E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00563E-1
1.6E1	4.79E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80022E1	-8.10623E-4	-8.80001E1	4.29153E-4	4.79221E-3	9.55582E-2	2.73267E1	-3.2632E1	-3.26633E1	2.67992E1	1.19965E-7	2.51826E-3	2.51826E-3	6.31563E-3	3.00302E-1
1.7E1	8.59E2	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80023E1	-5.24521E-4	-8.80004E1	4.52995E-4	4.57764E-3	9.54151E-2	2.73219E1	-3.26554E1	-3.2611E1	2.68941E1					
1.8E1	3.64E3	2.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80022E1	-3.8147E-4	-8.80008E1	2.14577E-4	4.60148E-3	9.51052E-2	2.73069E1	-3.26644E1	-3.2639E1	2.68599E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.9E1	1.922E3	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80023E1	-4.05312E-4	-8.80001E1	5.72205E-4	4.43459E-3	9.52244E-2	2.73027E1	-3.26615E1	-3.26452E1	2.69127E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
2.0E1	2.4621E4	1.0E1	8.08E2	5.58E2	-7.3401E-2	-8.80022E1	-5.00679E-4	-8.80002E1	6.67572E-4	4.45843E-3	9.52244E-2	2.73251E1	-3.26613E1	-3.2648E1	2.68762E1	1.20004E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99941E-1
2.1E1	4.5E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80023E1	-4.52995E-4	-8.80004E1	8.82149E-4	4.69685E-3	9.50098E-2	2.73097E1	-3.26254E1	-3.26011E1	2.69484E1	1.19878E-7	2.51625E-3	2.51625E-3	6.30375E-3	3.01347E-1
2.2E1	1.669E3	1.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80023E1	-3.57628E-4	-8.80008E1	3.8147E-4	4.36306E-3	9.50813E-2	2.73333E1	-3.26627E1	-3.26032E1	2.67674E1	1.20192E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80026E1	-4.29153E-4	-8.8001E1	4.29153E-4	4.62532E-3	9.48191E-2	2.73039E1	-3.26518E1	-3.26422E1	2.68851E1	1.19925E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.99348E-1