[Scan]
initial_time=2016-01-18T22:59:20
final_time=2016-01-18T22:59:39
ip_count=19
run=1024
dataset=10
scan=788
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.79774E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.89042E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.46024E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.13778E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.62277E-8
mult1=-1.64978E-8
mult2=-2.63899E-9
rf_tmon=-4.92241E-3
rf_agc=3.31911E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.66256E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=2.01479E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.73006E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.61826E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.65454E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03414E1
cs_ea2_imon=1.47621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.89729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.16985E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15816E1
os_ea1_imon=2.44451E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.06055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.88683E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.90716E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-4.111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26502E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.55516E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=8.96037E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=1.73469E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37467E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.22659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67529E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.85555E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.07124E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.16291E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.60053E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=6.99708E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.41339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6118E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.94924E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62142E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28873E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21711E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82718E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.872E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80022E1	-7.39098E-4	-8.80006E1	4.29153E-4	4.14848E-3	9.49144E-2	2.73128E1	-3.2649E1	-3.26567E1	2.6807E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
2.0E0	9.7283E4	8.8E1	3.16E2	1.6E2	-7.201E-2	-8.80024E1	-7.39098E-4	-8.80004E1	9.53674E-5	3.93391E-3	9.46999E-2	2.73253E1	-3.26793E1	-3.2593E1	2.68369E1	1.198E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80025E1	-6.4373E-4	-8.80003E1	2.14577E-4	4.52995E-3	9.48429E-2	2.73486E1	-3.26787E1	-3.26515E1	2.68569E1	1.19554E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.97499E-1
4.0E0	2.1353E4	1.2E1	6.55E2	3.98E2	-7.286E-2	-8.80025E1	-7.39098E-4	-8.80004E1	3.33786E-4	4.19617E-3	9.50575E-2	2.73039E1	-3.26639E1	-3.26428E1	2.68563E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.97901E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80026E1	-4.52995E-4	-8.80005E1	4.29153E-4	4.33922E-3	9.50813E-2	2.73015E1	-3.26645E1	-3.26164E1	2.6792E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97647E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80026E1	-5.96046E-4	-8.80003E1	2.86102E-4	4.02927E-3	9.51052E-2	2.73051E1	-3.26875E1	-3.2612E1	2.68513E1	1.19978E-7	2.5225E-3	2.5225E-3	6.26844E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80028E1	-6.4373E-4	-8.80005E1	4.29153E-4	4.33922E-3	9.48906E-2	2.72921E1	-3.2661E1	-3.25683E1	2.68406E1	1.20003E-7	2.51623E-3	2.51623E-3	6.3275E-3	2.97914E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.08504E-2	-8.80028E1	-7.62939E-4	-8.80007E1	3.8147E-4	4.31538E-3	9.53674E-2	2.73308E1	-3.26236E1	-3.26585E1	2.68196E1	1.20207E-7	2.51227E-3	2.51227E-3	6.34374E-3	3.00888E-1
1.2E1	1.03E2	1.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80028E1	-1.00136E-3	-8.80007E1	1.19209E-4	4.07696E-3	9.5129E-2	2.73287E1	-3.26791E1	-3.26065E1	2.68046E1	1.20278E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.99E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80029E1	-7.86781E-4	-8.80006E1	3.09944E-4	4.33922E-3	9.53674E-2	2.73443E1	-3.26566E1	-3.2593E1	2.6843E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
1.4E1	3.155E3	3.0E0	5.66E2	3.82E2	-7.11597E-2	-8.80028E1	-4.76837E-4	-8.80005E1	5.96046E-4	4.29153E-3	9.51529E-2	2.73352E1	-3.26909E1	-3.25593E1	2.68743E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80027E1	-3.09944E-4	-8.80007E1	4.52995E-4	4.02927E-3	9.52005E-2	2.73315E1	-3.26759E1	-3.2635E1	2.68581E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.6E1	3.95E2	0.0E0	6.47E2	4.41E2	-7.08504E-2	-8.80022E1	-1.90735E-4	-8.80004E1	5.72205E-4	4.36306E-3	9.54866E-2	2.73508E1	-3.26885E1	-3.26284E1	2.68406E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
1.7E1	7.94E2	3.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80024E1	-6.4373E-4	-8.80006E1	2.6226E-4	4.22001E-3	9.53674E-2	2.73431E1	-3.26352E1	-3.26456E1	2.67559E1	1.19978E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.99613E-1
1.8E1	3.522E3	2.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80023E1	-6.91414E-4	-8.80004E1	5.24521E-4	4.52995E-3	9.52244E-2	2.73358E1	-3.26183E1	-3.26325E1	2.68689E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00824E-1
1.9E1	2.009E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80022E1	-4.29153E-4	-8.80008E1	3.57628E-4	4.22001E-3	9.53197E-2	2.73442E1	-3.26068E1	-3.26512E1	2.68815E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
2.0E1	2.4315E4	1.7E1	8.08E2	5.58E2	-7.23964E-2	-8.80023E1	-6.91414E-4	-8.80007E1	2.14577E-4	3.91006E-3	9.51052E-2	2.73345E1	-3.26831E1	-3.26014E1	2.68304E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99175E-1
2.1E1	5.8E1	1.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80022E1	-7.15256E-4	-8.80004E1	4.76837E-5	4.02927E-3	9.53197E-2	2.7301E1	-3.26744E1	-3.26024E1	2.68244E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.98222E-1
2.2E1	1.68E3	1.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80021E1	-9.29832E-4	-8.80005E1	5.24521E-4	3.95775E-3	9.55343E-2	2.73315E1	-3.26146E1	-3.26518E1	2.68418E1	1.20174E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01347E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80024E1	-9.05991E-4	-8.80002E1	5.72205E-4	4.33922E-3	9.54151E-2	2.73293E1	-3.26419E1	-3.26502E1	2.67529E1	1.20055E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.0071E-1