[Scan]
initial_time=2016-01-18T23:01:07
final_time=2016-01-18T23:01:26
ip_count=19
run=1024
dataset=10
scan=792
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13143E-2
qbias_imon=-3.81116E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.98805E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.43547E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.22154E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.62094E-8
mult1=-1.69045E-8
mult2=-2.7226E-9
rf_tmon=-5.15531E-3
rf_agc=3.31774E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=5.45418E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.37192E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.73006E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.62656E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99329E0
lens1_imon=1.47069E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.4809E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.88575E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.15961E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.27508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14795E1
os_ea1_imon=2.42071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.15105E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=2.87278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.90424E-8
tplens_vset=1.4E-1
tplens_vmon=1.67989E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.55048E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=8.66723E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.72676E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.16007E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40711E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00742E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03173E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.37193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.27801E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.22659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.10527E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68929E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.7756E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.03402E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.89254E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.36287E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61101E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.9311E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62132E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61925E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.70249E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21675E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19544E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23563E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.864E3	3.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80022E1	-5.72205E-4	-8.80005E1	7.15256E-5	4.36306E-3	9.48429E-2	2.73187E1	-3.26685E1	-3.26236E1	2.68226E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
2.0E0	9.6383E4	7.7E1	3.16E2	1.6E2	-7.20871E-2	-8.80021E1	-6.91414E-4	-8.80008E1	-7.15256E-5	4.17233E-3	9.48906E-2	2.73153E1	-3.26717E1	-3.259E1	2.68268E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80018E1	-2.6226E-4	-8.80006E1	1.90735E-4	4.29153E-3	9.50813E-2	2.73269E1	-3.2662E1	-3.26242E1	2.68314E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
4.0E0	2.1227E4	1.3E1	6.55E2	3.98E2	-7.26282E-2	-8.80023E1	-4.05312E-4	-8.80003E1	5.48363E-4	4.3869E-3	9.48429E-2	2.73075E1	-3.26747E1	-3.25828E1	2.67541E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80025E1	-4.76837E-4	-8.80004E1	5.24521E-4	4.41074E-3	9.50813E-2	2.728E1	-3.26695E1	-3.26162E1	2.69005E1	1.20278E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80021E1	-6.4373E-4	-8.80003E1	1.19209E-4	4.14848E-3	9.52005E-2	2.72979E1	-3.26657E1	-3.26176E1	2.68364E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.97762E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80021E1	-5.48363E-4	-8.80004E1	5.00679E-4	4.36306E-3	9.49621E-2	2.73503E1	-3.26301E1	-3.26486E1	2.69316E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80021E1	-4.76837E-4	-8.80002E1	3.33786E-4	4.64916E-3	9.48906E-2	2.72811E1	-3.26663E1	-3.25966E1	2.68046E1	1.20042E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.97344E-1
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80022E1	-6.91414E-4	-8.80005E1	5.96046E-4	4.60148E-3	9.46283E-2	2.73171E1	-3.26536E1	-3.26272E1	2.69217E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80019E1	-4.52995E-4	-8.80003E1	5.48363E-4	4.43459E-3	9.49144E-2	2.7337E1	-3.26738E1	-3.26266E1	2.68794E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.4E1	3.264E3	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80019E1	-5.24521E-4	-8.80006E1	4.05312E-4	4.3869E-3	9.48906E-2	2.73682E1	-3.2688E1	-3.26868E1	2.68046E1	1.20311E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.02511E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80018E1	-5.48363E-4	-8.80005E1	1.90735E-4	4.62532E-3	9.49144E-2	2.73405E1	-3.26849E1	-3.26771E1	2.67788E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
1.6E1	4.21E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80022E1	-2.14577E-4	-8.80003E1	3.33786E-4	4.86374E-3	9.49383E-2	2.73442E1	-3.26789E1	-3.25984E1	2.68761E1	1.20226E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
1.7E1	8.11E2	1.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80021E1	0.0E0	-8.80003E1	4.05312E-4	4.673E-3	9.50575E-2	2.73369E1	-3.26651E1	-3.25942E1	2.66712E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00302E-1
1.8E1	3.539E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80021E1	-4.29153E-4	-8.80003E1	5.00679E-4	4.36306E-3	9.49621E-2	2.72943E1	-3.26705E1	-3.2602E1	2.69223E1	1.19861E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00302E-1
1.9E1	1.963E3	4.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80023E1	-7.15256E-4	-8.80003E1	4.29153E-4	4.48227E-3	9.51052E-2	2.73273E1	-3.26717E1	-3.2626E1	2.68238E1	1.19809E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00041E-1
2.0E1	2.4533E4	8.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80022E1	-5.24521E-4	-8.80003E1	5.72205E-4	4.57764E-3	9.47952E-2	2.73273E1	-3.26464E1	-3.2635E1	2.68232E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80022E1	-5.96046E-4	-8.80005E1	7.62939E-4	4.673E-3	9.49383E-2	2.73505E1	-3.26319E1	-3.26319E1	2.69188E1	1.20069E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
2.2E1	1.706E3	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80025E1	-8.10623E-4	-8.80003E1	4.05312E-4	4.3869E-3	9.50575E-2	2.7324E1	-3.26431E1	-3.26561E1	2.66989E1	1.20158E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13143E-2	-8.8002E1	-7.62939E-4	-8.80002E1	4.76837E-4	4.24385E-3	9.51052E-2	2.73105E1	-3.26747E1	-3.26549E1	2.68929E1	1.19544E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.01223E-1