[Scan]
initial_time=2016-01-18T23:01:33
final_time=2016-01-18T23:01:53
ip_count=19
run=1024
dataset=10
scan=793
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.79378E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.495E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.43672E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.13544E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.61855E-8
mult1=-2.07418E-8
mult2=-2.79969E-9
rf_tmon=-4.20273E-3
rf_agc=3.35569E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.74315E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65381E0
bslens_imon=2.46225E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.99089E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54163E1
cs_ef1b_imon=2.72934E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04847E1
cs_ea1_imon=2.61272E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97105E0
lens1_imon=1.23915E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.47483E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.88575E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.1607E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15489E1
os_ea1_imon=2.43899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2172E0
cs_ionrep_imon=1.1608E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.88467E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.90008E-8
tplens_vset=1.4E-1
tplens_vmon=1.6298E0
tplens_imon=-4.5776E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26101E1
iondef3_imon=1.50275E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26703E1
iondef2_imon=1.55344E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98103E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=8.93152E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32066E0
ionrepsh_imon=1.73011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33731E1
lens5b_imon=2.15433E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37392E0
os_ea2_imon=-9.02189E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00843E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.36796E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.28312E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73334E1
iondef1_imon=1.09835E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68454E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.80326E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.0429E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.74766E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.48783E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.33996E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52306E0
defgridb_imon=5.91485E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.38636E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61091E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30941E1
cs_fil1_imon=9.94275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63735E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62079E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.31698E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55057E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21806E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52685E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.886E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80023E1	-2.86102E-4	-8.80001E1	8.58307E-4	4.81606E-3	9.50575E-2	2.73558E1	-3.2659E1	-3.26154E1	2.68484E1	1.19925E-7	2.51136E-3	2.51136E-3	6.34099E-3	2.99613E-1
2.0E0	9.6448E4	8.1E1	3.16E2	1.6E2	-7.10825E-2	-8.80023E1	-4.05312E-4	-8.80001E1	5.72205E-4	4.64916E-3	9.51052E-2	2.73265E1	-3.26548E1	-3.26272E1	2.67842E1	1.20106E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.00453E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.06187E-2	-8.80024E1	-4.05312E-4	-8.80005E1	3.57628E-4	4.69685E-3	9.48191E-2	2.7308E1	-3.26679E1	-3.26644E1	2.68496E1	1.20137E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.99348E-1
4.0E0	2.1258E4	1.5E1	6.55E2	3.98E2	-7.07733E-2	-8.80021E1	-4.52995E-4	-8.8E1	5.24521E-4	4.62532E-3	9.47714E-2	2.73544E1	-3.26873E1	-3.2623E1	2.68731E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.06187E-2	-8.80026E1	-3.8147E-4	-8.80004E1	5.96046E-4	4.19617E-3	9.53436E-2	2.72986E1	-3.26561E1	-3.26307E1	2.68815E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-6.98458E-2	-8.80025E1	-2.86102E-4	-8.80005E1	1.19209E-4	4.43459E-3	9.48429E-2	2.72949E1	-3.26428E1	-3.26518E1	2.6834E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80025E1	-5.72205E-4	-8.80007E1	5.72205E-4	4.95911E-3	9.52244E-2	2.73333E1	-3.2664E1	-3.26334E1	2.67169E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.07733E-2	-8.80028E1	-6.91414E-4	-8.80005E1	2.6226E-4	4.62532E-3	9.49383E-2	2.7314E1	-3.26456E1	-3.26249E1	2.68753E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80026E1	-3.8147E-4	-8.80005E1	4.05312E-4	5.05447E-3	9.46999E-2	2.73051E1	-3.2637E1	-3.26215E1	2.68549E1	1.19822E-7	2.5216E-3	2.5216E-3	6.31251E-3	3.00392E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80022E1	-2.14577E-4	-8.80002E1	4.52995E-4	4.673E-3	9.46283E-2	2.73092E1	-3.26472E1	-3.26378E1	2.68274E1	1.20188E-7	2.51557E-3	2.51557E-3	6.34301E-3	3.01609E-1
1.4E1	3.16E3	3.0E0	5.66E2	3.82E2	-7.09279E-2	-8.80023E1	-4.52995E-4	-8.80001E1	6.19888E-4	4.57764E-3	9.48429E-2	2.73345E1	-3.26597E1	-3.26452E1	2.68153E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80024E1	-7.86781E-4	-8.80004E1	7.15256E-4	4.55379E-3	9.50098E-2	2.73449E1	-3.2664E1	-3.26064E1	2.68302E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
1.6E1	4.38E2	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80024E1	-5.96046E-4	-8.80004E1	8.34465E-4	4.95911E-3	9.46999E-2	2.73538E1	-3.26356E1	-3.26332E1	2.69013E1	1.20031E-7	2.51136E-3	2.51136E-3	6.32418E-3	2.98819E-1
1.7E1	8.81E2	0.0E0	6.87E2	4.7E2	-7.08504E-2	-8.80026E1	-5.24521E-4	-8.80006E1	7.15256E-4	5.03063E-3	9.48906E-2	2.73345E1	-3.26765E1	-3.26308E1	2.67716E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
1.8E1	3.525E3	2.0E0	7.27E2	5.0E2	-7.08504E-2	-8.80027E1	-4.76837E-4	-8.80004E1	7.62939E-4	4.88758E-3	9.47714E-2	2.73099E1	-3.26771E1	-3.25996E1	2.68677E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9926E-1
1.9E1	1.912E3	0.0E0	7.68E2	5.29E2	-7.03869E-2	-8.80027E1	-5.00679E-4	-8.80003E1	6.19888E-4	4.76837E-3	9.47475E-2	2.72986E1	-3.26478E1	-3.26384E1	2.68319E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
2.0E1	2.4498E4	1.4E1	8.08E2	5.58E2	-7.07733E-2	-8.80027E1	-8.34465E-4	-8.80005E1	6.67572E-4	4.57764E-3	9.50098E-2	2.73057E1	-3.26591E1	-3.26476E1	2.67355E1	1.20004E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.9892E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80027E1	-6.4373E-4	-8.80003E1	4.29153E-4	4.91142E-3	9.53197E-2	2.73287E1	-3.26868E1	-3.2652E1	2.68599E1	1.20174E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9952E-1
2.2E1	1.727E3	1.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80024E1	-4.29153E-4	-8.80004E1	5.00679E-4	4.52995E-3	9.49383E-2	2.73147E1	-3.26705E1	-3.26326E1	2.68785E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9841E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80025E1	-7.62939E-4	-8.80003E1	5.72205E-4	4.57764E-3	9.4986E-2	2.73334E1	-3.26703E1	-3.26101E1	2.68454E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1