[Scan]
initial_time=2016-01-18T23:02:00
final_time=2016-01-18T23:02:20
ip_count=19
run=1024
dataset=10
scan=794
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.80782E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.87301E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.39128E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.13931E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.62001E-8
mult1=-1.75788E-8
mult2=-2.75254E-9
rf_tmon=-4.98708E-3
rf_agc=3.26126E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.48351E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19466E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=2.72862E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.61862E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65107E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03462E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.91134E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.16436E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11724E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.44018E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63209E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.17015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.88647E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.90274E-8
tplens_vset=1.4E-1
tplens_vmon=1.66487E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.31394E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.71522E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.15467E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40771E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.7997E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.07741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.38526E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28234E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.22623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.7596E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.05747E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55871E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.39362E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.37703E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.96463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.40042E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61248E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.94509E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63741E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62262E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51132E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52685E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.848E3	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80028E1	-1.66893E-4	-8.80006E1	7.15256E-4	4.55379E-3	9.52005E-2	2.73269E1	-3.26744E1	-3.26484E1	2.68382E1	1.19749E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98665E-1
2.0E0	9.6043E4	1.05E2	3.16E2	1.6E2	-7.15461E-2	-8.80026E1	-5.24521E-4	-8.80008E1	4.76837E-4	4.76837E-3	9.52244E-2	2.73411E1	-3.26687E1	-3.26212E1	2.68244E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.98481E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80028E1	-5.00679E-4	-8.80004E1	4.52995E-4	4.45843E-3	9.52721E-2	2.73086E1	-3.26531E1	-3.26272E1	2.67422E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.97445E-1
4.0E0	2.1252E4	8.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80027E1	-7.86781E-4	-8.80003E1	3.33786E-4	4.55379E-3	9.5129E-2	2.73311E1	-3.26714E1	-3.26236E1	2.69229E1	1.20106E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80027E1	-1.43051E-4	-8.80006E1	4.52995E-4	4.41074E-3	9.48191E-2	2.73141E1	-3.26789E1	-3.26368E1	2.67662E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0071E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80025E1	-4.29153E-4	-8.80006E1	5.72205E-4	4.26769E-3	9.48429E-2	2.73255E1	-3.26398E1	-3.26446E1	2.68695E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80023E1	-6.91414E-4	-8.80007E1	5.00679E-4	4.17233E-3	9.53197E-2	2.73369E1	-3.26505E1	-3.26248E1	2.68695E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80026E1	-1.43051E-4	-8.80009E1	1.90735E-4	4.3869E-3	9.54866E-2	2.73267E1	-3.26909E1	-3.26236E1	2.68322E1	1.20191E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.98554E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80025E1	-2.86102E-4	-8.8001E1	5.48363E-4	4.48227E-3	9.51529E-2	2.73039E1	-3.26467E1	-3.26213E1	2.6789E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.98156E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80023E1	-6.19888E-4	-8.80006E1	6.4373E-4	4.62532E-3	9.50813E-2	2.73358E1	-3.26703E1	-3.26331E1	2.68772E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9892E-1
1.4E1	3.081E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80025E1	-6.67572E-4	-8.80004E1	5.48363E-4	4.3869E-3	9.52482E-2	2.7321E1	-3.26566E1	-3.2604E1	2.68315E1	1.19913E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00041E-1
1.5E1	1.09E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80023E1	-5.96046E-4	-8.80003E1	5.00679E-4	4.24385E-3	9.53436E-2	2.73249E1	-3.26452E1	-3.26338E1	2.68923E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.6E1	4.21E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80028E1	-3.8147E-4	-8.80004E1	6.67572E-4	4.31538E-3	9.5129E-2	2.73357E1	-3.26338E1	-3.26603E1	2.68436E1	1.20031E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01475E-1
1.7E1	8.72E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80024E1	-4.76837E-4	-8.80002E1	6.67572E-4	4.05312E-3	9.51529E-2	2.73165E1	-3.26344E1	-3.26362E1	2.68082E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
1.8E1	3.644E3	1.0E0	7.27E2	5.0E2	-7.201E-2	-8.80026E1	-4.76837E-4	-8.80001E1	4.52995E-4	4.3869E-3	9.54628E-2	2.73257E1	-3.26815E1	-3.26278E1	2.68482E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99879E-1
1.9E1	1.983E3	3.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80027E1	-5.96046E-4	-8.80004E1	4.52995E-4	4.31538E-3	9.51052E-2	2.73466E1	-3.26464E1	-3.2617E1	2.68166E1	1.1969E-7	2.52553E-3	2.52553E-3	6.33388E-3	3.00097E-1
2.0E1	2.4025E4	1.8E1	8.08E2	5.58E2	-7.15461E-2	-8.80028E1	-5.96046E-4	-8.80004E1	7.86781E-4	4.24385E-3	9.49144E-2	2.7324E1	-3.26679E1	-3.26561E1	2.67968E1	1.20031E-7	2.51693E-3	2.51693E-3	6.35786E-3	3.01475E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80029E1	-4.05312E-4	-8.80007E1	6.67572E-4	4.36306E-3	9.49144E-2	2.73297E1	-3.26518E1	-3.2617E1	2.6783E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.00453E-1
2.2E1	1.711E3	1.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80028E1	-8.34465E-4	-8.80006E1	5.00679E-4	4.76837E-3	9.5129E-2	2.73122E1	-3.26773E1	-3.25977E1	2.68742E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80026E1	-7.15256E-4	-8.80004E1	6.4373E-4	4.41074E-3	9.5129E-2	2.73327E1	-3.26651E1	-3.2644E1	2.6783E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1