[Scan]
initial_time=2016-01-18T23:03:20
final_time=2016-01-18T23:03:40
ip_count=19
run=1024
dataset=10
scan=797
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.79789E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.78825E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.38359E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.2144E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.6189E-8
mult1=-2.3274E-8
mult2=-2.8244E-9
rf_tmon=-3.91761E-3
rf_agc=3.40546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.58996E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68197E0
bslens_imon=2.35574E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19505E1
lens5a_imon=1.99897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.73547E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=2.62043E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94166E0
lens1_imon=1.58441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03868E1
cs_ea2_imon=1.48585E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=2.8908E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.16212E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=4.28337E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14724E1
os_ea1_imon=2.42062E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24169E0
cs_ionrep_imon=1.17659E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93714E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.89044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.90114E-8
tplens_vset=1.4E-1
tplens_vmon=1.68551E0
tplens_imon=-2.92476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.55748E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98081E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.16731E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28638E0
ionrepsh_imon=1.72203E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33425E1
lens5b_imon=2.16756E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44799E0
os_ea2_imon=-7.40579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00516E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.1456E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.2699E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.11452E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.77217E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.03882E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02017E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.72929E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.37029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.06081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40049E0
defgridb_imon=6.15726E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.40942E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61254E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.93723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63675E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61991E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13301E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32099E-3
inlet_lpb_pmon=3.00637E-1
chamber_ion_pmon=1.20062E-7
chamber_cvt_pmon=2.51972E-3
foreline_cvt_pmon=2.51972E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31972E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.966E3	3.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80028E1	-5.00679E-4	-8.80002E1	6.67572E-4	4.57764E-3	9.52959E-2	2.73352E1	-3.26845E1	-3.26515E1	2.68209E1	1.19766E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.99879E-1
2.0E0	9.6432E4	9.4E1	3.16E2	1.6E2	-7.30918E-2	-8.8003E1	-2.14577E-4	-8.8E1	5.72205E-4	4.41074E-3	9.51767E-2	2.73331E1	-3.26574E1	-3.26431E1	2.67942E1	1.20209E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80029E1	4.76837E-5	-8.80002E1	5.96046E-4	4.17233E-3	9.52005E-2	2.72997E1	-3.26506E1	-3.26224E1	2.68196E1	1.19956E-7	2.51623E-3	2.51623E-3	6.3275E-3	3.0101E-1
4.0E0	2.1174E4	8.0E0	6.55E2	3.98E2	-7.21643E-2	-8.8002E1	-3.8147E-4	-8.80003E1	6.91414E-4	4.3869E-3	9.52005E-2	2.73181E1	-3.26602E1	-3.26095E1	2.68725E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80023E1	-4.29153E-4	-8.80002E1	7.62939E-4	4.12464E-3	9.51529E-2	2.73277E1	-3.26548E1	-3.26211E1	2.68519E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80023E1	-6.4373E-4	-8.80004E1	5.72205E-4	4.33922E-3	9.52721E-2	2.73128E1	-3.26543E1	-3.26154E1	2.68047E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80024E1	-3.8147E-4	-8.8E1	4.76837E-4	4.48227E-3	9.53913E-2	2.73255E1	-3.26723E1	-3.26434E1	2.68424E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80027E1	-7.86781E-4	-8.80002E1	5.72205E-4	4.29153E-3	9.52721E-2	2.73198E1	-3.26478E1	-3.26124E1	2.68088E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80024E1	-6.91414E-4	-8.80004E1	6.4373E-4	4.45843E-3	9.49144E-2	2.73279E1	-3.26296E1	-3.25972E1	2.6813E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80024E1	-5.24521E-4	-8.80004E1	5.96046E-4	4.31538E-3	9.51529E-2	2.73075E1	-3.26657E1	-3.26242E1	2.68671E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
1.4E1	3.182E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80025E1	-5.96046E-4	-8.8E1	5.72205E-4	4.48227E-3	9.52005E-2	2.73189E1	-3.26561E1	-3.26597E1	2.684E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02659E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80027E1	-8.10623E-4	-8.80002E1	5.24521E-4	4.43459E-3	9.50813E-2	2.73159E1	-3.26524E1	-3.26212E1	2.68484E1	1.19705E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.6E1	4.24E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80027E1	-6.67572E-4	-8.80002E1	7.15256E-4	4.64916E-3	9.52005E-2	2.73135E1	-3.26567E1	-3.26116E1	2.67956E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.7E1	8.37E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80021E1	-6.91414E-4	-8.80002E1	3.57628E-4	4.64916E-3	9.50336E-2	2.73204E1	-3.26514E1	-3.26296E1	2.68233E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9892E-1
1.8E1	3.7E3	1.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80023E1	-5.96046E-4	-8.80005E1	5.72205E-4	4.52995E-3	9.4986E-2	2.73151E1	-3.2662E1	-3.26178E1	2.68839E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
1.9E1	2.051E3	3.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80023E1	-6.19888E-4	-8.80004E1	4.29153E-4	4.69685E-3	9.49621E-2	2.73249E1	-3.26579E1	-3.26488E1	2.68923E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.97647E-1
2.0E1	2.4119E4	1.3E1	8.08E2	5.58E2	-7.38649E-2	-8.80023E1	-8.34465E-4	-8.80006E1	4.52995E-4	4.50611E-3	9.51767E-2	2.73458E1	-3.26897E1	-3.26083E1	2.67247E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.0071E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80021E1	-6.67572E-4	-8.80005E1	4.52995E-4	4.673E-3	9.50813E-2	2.7334E1	-3.26691E1	-3.26213E1	2.68256E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
2.2E1	1.7E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80023E1	-7.62939E-4	-8.80006E1	5.48363E-4	4.41074E-3	9.50813E-2	2.73339E1	-3.26591E1	-3.2632E1	2.68532E1	1.20363E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80023E1	-6.67572E-4	-8.80003E1	4.29153E-4	4.62532E-3	9.51529E-2	2.73141E1	-3.26669E1	-3.26398E1	2.68154E1	1.20062E-7	2.51972E-3	2.51972E-3	6.32099E-3	3.00637E-1