[Scan]
initial_time=2016-01-18T23:04:13
final_time=2016-01-18T23:04:33
ip_count=19
run=1024
dataset=10
scan=799
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.83012E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.99496E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.46637E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.3175E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.61697E-8
mult1=-2.08836E-8
mult2=-2.67426E-9
rf_tmon=-3.71311E-3
rf_agc=3.43768E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=6.04832E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.32867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.72646E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.61682E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98788E0
lens1_imon=1.43464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.47694E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.88071E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.15868E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.28013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14675E1
os_ea1_imon=2.42432E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.17412E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.88107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.9021E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=9.09197E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.7109E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3421E1
lens5b_imon=2.15503E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43956E0
os_ea2_imon=-8.72534E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01912E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.36652E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.23524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68947E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.82161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.02675E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.63562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56705E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.09081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.41849E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60948E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.94317E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56973E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21883E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.80315E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=195
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.891E3	6.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80028E1	-9.29832E-4	-8.80004E1	2.86102E-4	4.62532E-3	9.50098E-2	2.73115E1	-3.2655E1	-3.26144E1	2.68094E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01738E-1
2.0E0	9.6059E4	8.3E1	3.16E2	1.6E2	-7.29374E-2	-8.80026E1	-7.15256E-4	-8.80002E1	5.00679E-4	4.48227E-3	9.47714E-2	2.73155E1	-3.26909E1	-3.26285E1	2.68101E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80026E1	-7.86781E-4	-8.80004E1	4.52995E-4	4.81606E-3	9.47714E-2	2.73381E1	-3.2655E1	-3.26359E1	2.67688E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99083E-1
4.0E0	2.1316E4	1.0E1	6.55E2	3.98E2	-7.29374E-2	-8.80021E1	-6.67572E-4	-8.80004E1	3.8147E-4	4.79221E-3	9.50813E-2	2.73333E1	-3.26717E1	-3.26122E1	2.69229E1	1.1993E-7	2.5199E-3	2.5199E-3	6.31779E-3	2.98031E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80024E1	-8.58307E-4	-8.80005E1	2.86102E-4	4.72069E-3	9.50098E-2	2.73468E1	-3.26753E1	-3.26173E1	2.68279E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80023E1	-7.39098E-4	-8.80005E1	1.90735E-4	4.76837E-3	9.50575E-2	2.73157E1	-3.26572E1	-3.26166E1	2.68119E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.8002E1	-8.58307E-4	-8.80008E1	4.76837E-4	4.52995E-3	9.5129E-2	2.73093E1	-3.26597E1	-3.26236E1	2.68196E1	1.19872E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80023E1	-7.39098E-4	-8.80005E1	5.24521E-4	4.57764E-3	9.50098E-2	2.73117E1	-3.26783E1	-3.26344E1	2.67974E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80023E1	-6.91414E-4	-8.80005E1	4.52995E-4	4.76837E-3	9.49621E-2	2.73234E1	-3.26797E1	-3.25989E1	2.68655E1	1.19819E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.01209E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80024E1	-6.4373E-4	-8.80004E1	7.39098E-4	4.95911E-3	9.52244E-2	2.73628E1	-3.26699E1	-3.26086E1	2.68496E1	1.19953E-7	2.51096E-3	2.51096E-3	6.29665E-3	3.01223E-1
1.4E1	3.29E3	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80023E1	-5.96046E-4	-8.80009E1	5.72205E-4	4.69685E-3	9.54866E-2	2.73155E1	-3.26793E1	-3.26211E1	2.68481E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80021E1	-7.62939E-4	-8.80011E1	6.67572E-4	4.79221E-3	9.48668E-2	2.73387E1	-3.26717E1	-3.26446E1	2.6816E1	1.19653E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97704E-1
1.6E1	4.64E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80024E1	-4.29153E-4	-8.80006E1	8.58307E-4	4.76837E-3	9.49144E-2	2.73123E1	-3.26591E1	-3.26669E1	2.68358E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.99E-1
1.7E1	8.67E2	1.0E0	6.87E2	4.7E2	-7.201E-2	-8.80024E1	-4.76837E-4	-8.80005E1	6.91414E-4	4.76837E-3	9.50575E-2	2.73219E1	-3.26422E1	-3.26002E1	2.68238E1	1.19766E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
1.8E1	3.552E3	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80023E1	-2.86102E-4	-8.80007E1	6.91414E-4	4.673E-3	9.52005E-2	2.73296E1	-3.26627E1	-3.26334E1	2.6828E1	1.19601E-7	2.52867E-3	2.52867E-3	6.31837E-3	3.00041E-1
1.9E1	1.959E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80025E1	-5.72205E-4	-8.80004E1	6.91414E-4	4.88758E-3	9.4986E-2	2.73169E1	-3.26272E1	-3.26461E1	2.68358E1	1.19861E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.98481E-1
2.0E1	2.4092E4	9.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80024E1	-3.8147E-4	-8.80007E1	7.15256E-4	4.8399E-3	9.5129E-2	2.73255E1	-3.26549E1	-3.26272E1	2.68617E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98222E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80027E1	-2.38419E-4	-8.80007E1	5.00679E-4	4.93526E-3	9.53913E-2	2.73198E1	-3.26437E1	-3.26266E1	2.68522E1	1.19757E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98222E-1
2.2E1	1.722E3	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80023E1	-3.57628E-4	-8.80007E1	5.48363E-4	5.19753E-3	9.5129E-2	2.73225E1	-3.26879E1	-3.2602E1	2.67998E1	1.19851E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.9892E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80024E1	-3.09944E-4	-8.80006E1	7.39098E-4	4.74453E-3	9.50813E-2	2.72915E1	-3.26661E1	-3.26236E1	2.68947E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1