[Scan]
initial_time=2016-01-18T23:04:40
final_time=2016-01-18T23:05:00
ip_count=19
run=1024
dataset=10
scan=800
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.83842E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.31421E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.4145E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.30917E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.61898E-8
mult1=-1.64269E-8
mult2=-2.70366E-9
rf_tmon=-4.71004E-3
rf_agc=3.33681E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.56958E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19418E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53965E1
cs_ef1b_imon=2.73295E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.59844E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98848E0
lens1_imon=1.61128E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.47405E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.88611E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.16033E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.43225E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=1.17989E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.87927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.89967E-8
tplens_vset=1.4E-1
tplens_vmon=1.68169E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26449E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.9805E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.19163E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.7246E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39209E0
os_ea2_imon=-8.94163E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.15461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02513E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.27909E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68599E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.79307E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.02143E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.18454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.39483E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61086E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30932E1
cs_fil1_imon=9.93909E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63207E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6214E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52333E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21855E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.46388E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.874E3	2.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80025E1	-9.29832E-4	-8.80004E1	4.52995E-4	5.03063E-3	9.50098E-2	2.73316E1	-3.26773E1	-3.25971E1	2.68557E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
2.0E0	9.6647E4	9.5E1	3.16E2	1.6E2	-7.17779E-2	-8.80025E1	-8.34465E-4	-8.80007E1	6.4373E-4	4.81606E-3	9.51529E-2	2.73099E1	-3.26543E1	-3.26392E1	2.6801E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99686E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80021E1	-7.62939E-4	-8.80007E1	6.91414E-4	4.64916E-3	9.4986E-2	2.73104E1	-3.26885E1	-3.26608E1	2.68484E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
4.0E0	2.1193E4	1.3E1	6.55E2	3.98E2	-7.18554E-2	-8.80024E1	-5.24521E-4	-8.80004E1	4.05312E-4	4.52995E-3	9.52482E-2	2.73322E1	-3.26585E1	-3.26119E1	2.68331E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80026E1	-5.96046E-4	-8.80003E1	6.67572E-4	4.64916E-3	9.48668E-2	2.73213E1	-3.26591E1	-3.26362E1	2.68124E1	1.19941E-7	2.52236E-3	2.52236E-3	6.30212E-3	3.00348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-7.15256E-4	-8.80004E1	6.4373E-4	4.41074E-3	9.47475E-2	2.73175E1	-3.26626E1	-3.2636E1	2.68208E1	1.20017E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80025E1	-5.24521E-4	-8.80006E1	5.72205E-4	4.26769E-3	9.47714E-2	2.73093E1	-3.26585E1	-3.2614E1	2.68412E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80024E1	-5.00679E-4	-8.80003E1	4.52995E-4	4.45843E-3	9.4986E-2	2.72973E1	-3.26795E1	-3.2611E1	2.67728E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80022E1	-3.57628E-4	-8.80003E1	4.52995E-4	4.52995E-3	9.50336E-2	2.73291E1	-3.26699E1	-3.26092E1	2.68851E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80024E1	-6.67572E-4	-8.80003E1	5.48363E-4	4.72069E-3	9.50336E-2	2.73392E1	-3.26786E1	-3.26131E1	2.68507E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
1.4E1	3.198E3	6.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80027E1	-1.0252E-3	-8.80005E1	5.96046E-4	4.26769E-3	9.48906E-2	2.73115E1	-3.26725E1	-3.26127E1	2.68438E1	1.1988E-7	2.51783E-3	2.51783E-3	6.29185E-3	3.01237E-1
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80024E1	-1.07288E-3	-8.80001E1	5.48363E-4	4.64916E-3	9.4986E-2	2.7329E1	-3.26634E1	-3.26021E1	2.68225E1	1.19937E-7	2.51611E-3	2.51611E-3	6.3245E-3	2.9971E-1
1.6E1	4.23E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80027E1	-8.82149E-4	-8.80001E1	3.8147E-4	4.673E-3	9.5129E-2	2.73181E1	-3.26649E1	-3.2629E1	2.6836E1	1.19978E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98554E-1
1.7E1	8.68E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80028E1	-8.82149E-4	-8.80005E1	3.8147E-4	4.22001E-3	9.51529E-2	2.73075E1	-3.26302E1	-3.26464E1	2.68016E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.97963E-1
1.8E1	3.524E3	1.0E0	7.27E2	5.0E2	-7.14689E-2	-8.80024E1	-6.91414E-4	-8.80002E1	1.66893E-4	4.3869E-3	9.52244E-2	2.73464E1	-3.26514E1	-3.26284E1	2.6846E1	1.20055E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.97647E-1
1.9E1	1.907E3	3.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80022E1	-8.10623E-4	-8.80005E1	4.76837E-4	4.14848E-3	9.51529E-2	2.73411E1	-3.26524E1	-3.26188E1	2.6849E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
2.0E1	2.439E4	1.2E1	8.08E2	5.58E2	-7.17779E-2	-8.80022E1	-7.15256E-4	-8.80002E1	4.29153E-4	4.8399E-3	9.50336E-2	2.73682E1	-3.26783E1	-3.26146E1	2.6828E1	1.19861E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.00563E-1
2.1E1	3.9E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80023E1	-5.48363E-4	-8.80004E1	3.57628E-4	4.50611E-3	9.51052E-2	2.73346E1	-3.26862E1	-3.26366E1	2.68424E1	1.20055E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.00966E-1
2.2E1	1.735E3	0.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80021E1	-4.05312E-4	-8.80002E1	1.66893E-4	4.43459E-3	9.48906E-2	2.73183E1	-3.26681E1	-3.26266E1	2.67995E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80025E1	-6.19888E-4	-8.80001E1	2.14577E-4	4.60148E-3	9.50336E-2	2.73175E1	-3.26449E1	-3.26325E1	2.68599E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9943E-1