[Scan]
initial_time=2016-01-18T23:05:18
final_time=2016-01-18T23:05:37
ip_count=19
run=1024
dataset=11
scan=801
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-7.60603E-1
ql1_imon=1.65569E-8
ql2_vset=
ql2_vmon=-7.35426E-1
ql2_imon=1.89819E-9
ql3_vset=
ql3_vmon=-9.19495E0
ql3_imon=7.06474E-9
ql4_vset=
ql4_vmon=-9.19037E0
ql4_imon=-7.64346E-10
mult1=-9.85401E-9
mult2=-2.83693E-9
rf_tmon=-5.06988E-3
rf_agc=3.27546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.55231E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04845E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=3.17767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=1.09529E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37905E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.35473E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.05514E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.15713E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.28589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.45584E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63407E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=9.43803E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.13374E-8
tplens_vset=1.4E-1
tplens_vmon=1.69983E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.51259E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=3.92231E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30755E0
ionrepsh_imon=8.53194E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.1649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44441E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06046E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.37229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.07955E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73157E1
iondef1_imon=1.11015E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.3386E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.03552E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.90408E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.47012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.64897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39079E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.40216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08561E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31863E1
cs_fil1_imon=6.31391E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.56349E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62971E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.34493E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21714E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.78824E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.62558E-1	-7.3483E-1	-9.19547E0	-9.19061E0	4.55379E-3	9.4986E-2	2.7345E1	-3.26722E1	-3.26273E1	2.68569E1	1.19851E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9892E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.62486E-1	-7.35235E-1	-9.19535E0	-9.19049E0	4.79221E-3	9.49144E-2	2.7334E1	-3.26537E1	-3.26461E1	2.68366E1	1.20425E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.97555E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-7.61819E-1	-7.35283E-1	-9.19545E0	-9.19011E0	4.81606E-3	9.49144E-2	2.73352E1	-3.26744E1	-3.26148E1	2.68364E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-7.61676E-1	-7.35211E-1	-9.19552E0	-9.18999E0	4.50611E-3	9.50336E-2	2.73335E1	-3.26446E1	-3.26353E1	2.67769E1	1.20209E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.61485E-1	-7.35211E-1	-9.19545E0	-9.18994E0	4.86374E-3	9.48906E-2	2.73255E1	-3.26681E1	-3.26434E1	2.68617E1	1.20158E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.6108E-1	-7.35283E-1	-9.19554E0	-9.1898E0	4.88758E-3	9.46045E-2	2.73526E1	-3.26585E1	-3.26236E1	2.68394E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.60865E-1	-7.35402E-1	-9.19559E0	-9.1898E0	4.81606E-3	9.49144E-2	2.73281E1	-3.26655E1	-3.26119E1	2.68134E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.60794E-1	-7.35521E-1	-9.19566E0	-9.18951E0	4.673E-3	9.47237E-2	2.73075E1	-3.26362E1	-3.26176E1	2.6846E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.60722E-1	-7.35426E-1	-9.19583E0	-9.18972E0	4.62532E-3	9.47475E-2	2.73309E1	-3.26428E1	-3.2629E1	2.68556E1	1.20191E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-7.6046E-1	-7.35497E-1	-9.19545E0	-9.18996E0	4.45843E-3	9.4986E-2	2.73357E1	-3.2638E1	-3.26176E1	2.681E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-7.60269E-1	-7.35569E-1	-9.19538E0	-9.18992E0	4.19617E-3	9.49144E-2	2.73246E1	-3.26266E1	-3.26354E1	2.67998E1	1.20158E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.60388E-1	-7.35521E-1	-9.1953E0	-9.18963E0	4.3869E-3	9.48906E-2	2.73201E1	-3.26681E1	-3.26428E1	2.68575E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.60174E-1	-7.35378E-1	-9.19569E0	-9.18975E0	4.43459E-3	9.50098E-2	2.73177E1	-3.26428E1	-3.26386E1	2.68641E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.60269E-1	-7.35617E-1	-9.19564E0	-9.18989E0	4.29153E-3	9.47952E-2	2.73434E1	-3.26514E1	-3.26113E1	2.67856E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.60031E-1	-7.35283E-1	-9.19554E0	-9.18984E0	4.24385E-3	9.51767E-2	2.73345E1	-3.26652E1	-3.26223E1	2.68787E1	1.198E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.60698E-1	-7.35402E-1	-9.19561E0	-9.19013E0	4.24385E-3	9.4676E-2	2.73171E1	-3.26615E1	-3.26032E1	2.68629E1	1.19925E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.99348E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.60794E-1	-7.35569E-1	-9.19545E0	-9.18999E0	4.17233E-3	9.47237E-2	2.7347E1	-3.26691E1	-3.26467E1	2.68123E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.60627E-1	-7.3576E-1	-9.19523E0	-9.18994E0	4.33922E-3	9.48906E-2	2.73201E1	-3.26579E1	-3.2611E1	2.6825E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98156E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-7.60579E-1	-7.35307E-1	-9.1953E0	-9.18999E0	4.62532E-3	9.48668E-2	2.73117E1	-3.26585E1	-3.26314E1	2.68563E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.60603E-1	-7.35426E-1	-9.19495E0	-9.19037E0	4.43459E-3	9.47952E-2	2.73157E1	-3.26626E1	-3.26201E1	2.6831E1	1.20122E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9874E-1