[Scan]
initial_time=2016-01-18T23:06:11
final_time=2016-01-18T23:06:31
ip_count=19
run=1024
dataset=11
scan=803
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-7.59745E-1
ql1_imon=1.48584E-8
ql2_vset=
ql2_vmon=-7.35712E-1
ql2_imon=1.99714E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=2.73041E-9
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-4.22156E-10
mult1=-9.75526E-9
mult2=-2.71415E-9
rf_tmon=-3.93033E-3
rf_agc=3.32283E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.65491E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.24936E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=3.15497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=1.1132E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39239E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.3623E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.04757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.15497E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.28662E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.43694E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=9.43403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93658E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.13813E-8
tplens_vset=1.4E-1
tplens_vmon=1.6907E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26171E1
iondef3_imon=1.51515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26674E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=3.98302E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=8.40301E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42754E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.08351E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73471E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68706E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.68806E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.00172E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.69284E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.84928E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3324E1
os_fil1_imon=9.41393E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60778E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=7.18487E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33524E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62832E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.40215E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.66769E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21799E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32784E-3
inlet_lpb_pmon=2.98937E-1
chamber_ion_pmon=1.20016E-7
chamber_cvt_pmon=2.52262E-3
foreline_cvt_pmon=2.52262E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22361E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-7.59745E-1	-7.35545E-1	-9.19445E0	-9.19039E0	4.26769E-3	9.46522E-2	2.73458E1	-3.26956E1	-3.25888E1	2.67929E1	1.2026E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.9892E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09317E0	-7.60007E-1	-7.35497E-1	-9.19425E0	-9.19001E0	4.36306E-3	9.47475E-2	2.73504E1	-3.26927E1	-3.26407E1	2.68211E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.59888E-1	-7.35068E-1	-9.19433E0	-9.18984E0	4.43459E-3	9.47952E-2	2.73126E1	-3.26457E1	-3.26185E1	2.68731E1	1.19925E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.00144E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-7.59578E-1	-7.35474E-1	-9.19409E0	-9.18994E0	4.52995E-3	9.49144E-2	2.73087E1	-3.26368E1	-3.26068E1	2.6837E1	1.20042E-7	2.51498E-3	2.51498E-3	6.2863E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-7.59482E-1	-7.35402E-1	-9.19392E0	-9.18999E0	4.52995E-3	9.50336E-2	2.73045E1	-3.26638E1	-3.26248E1	2.68484E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.59649E-1	-7.35474E-1	-9.1943E0	-9.18989E0	4.57764E-3	9.48668E-2	2.73075E1	-3.26639E1	-3.26074E1	2.68106E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.59816E-1	-7.35903E-1	-9.19435E0	-9.18994E0	4.79221E-3	9.49383E-2	2.72991E1	-3.26783E1	-3.26038E1	2.68532E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-7.59721E-1	-7.35617E-1	-9.19437E0	-9.18982E0	4.31538E-3	9.48429E-2	2.73316E1	-3.26437E1	-3.25883E1	2.68534E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.59792E-1	-7.35474E-1	-9.19435E0	-9.18989E0	4.50611E-3	9.4676E-2	2.7349E1	-3.26885E1	-3.26104E1	2.68166E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.59721E-1	-7.35617E-1	-9.19445E0	-9.18999E0	4.43459E-3	9.47952E-2	2.73453E1	-3.2671E1	-3.2627E1	2.68396E1	1.20085E-7	2.51449E-3	2.51449E-3	6.3148E-3	3.00315E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.59506E-1	-7.35497E-1	-9.1948E0	-9.1898E0	4.57764E-3	9.50813E-2	2.73167E1	-3.2678E1	-3.26187E1	2.6825E1	1.20031E-7	2.52139E-3	2.52139E-3	6.34661E-3	2.97236E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.59578E-1	-7.35688E-1	-9.19461E0	-9.19003E0	4.60148E-3	9.50098E-2	2.73329E1	-3.26878E1	-3.26191E1	2.67711E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.59745E-1	-7.35283E-1	-9.1949E0	-9.18994E0	4.673E-3	9.48429E-2	2.73351E1	-3.26681E1	-3.26206E1	2.68136E1	1.19942E-7	2.51121E-3	2.51121E-3	6.34883E-3	2.99151E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.59649E-1	-7.35164E-1	-9.19459E0	-9.18963E0	4.57764E-3	9.47952E-2	2.73201E1	-3.26663E1	-3.26092E1	2.69121E1	1.19965E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.98222E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.59673E-1	-7.35807E-1	-9.1944E0	-9.18946E0	4.52995E-3	9.48429E-2	2.73225E1	-3.26651E1	-3.2629E1	2.68298E1	1.19653E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.59816E-1	-7.35617E-1	-9.19435E0	-9.18999E0	4.60148E-3	9.49144E-2	2.73399E1	-3.26561E1	-3.26404E1	2.68142E1	1.19965E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-7.59602E-1	-7.35545E-1	-9.19456E0	-9.18984E0	4.52995E-3	9.50098E-2	2.73273E1	-3.26981E1	-3.26296E1	2.68202E1	1.20592E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.59602E-1	-7.35641E-1	-9.1943E0	-9.18953E0	4.57764E-3	9.48668E-2	2.73254E1	-3.26637E1	-3.26028E1	2.68731E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.59721E-1	-7.35545E-1	-9.19409E0	-9.18996E0	4.36306E-3	9.48191E-2	2.72897E1	-3.2667E1	-3.26493E1	2.68024E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.59745E-1	-7.35712E-1	-9.19445E0	-9.18996E0	4.57764E-3	9.47237E-2	2.73471E1	-3.26674E1	-3.26171E1	2.68706E1	1.20016E-7	2.52262E-3	2.52262E-3	6.32784E-3	2.98937E-1