[Scan]
initial_time=2016-01-18T23:06:38
final_time=2016-01-18T23:06:57
ip_count=19
run=1024
dataset=11
scan=804
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.59125E-1
ql1_imon=1.46661E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=2.05498E-9
ql3_vset=
ql3_vmon=-9.19442E0
ql3_imon=2.09087E-9
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-3.78835E-10
mult1=-9.22264E-9
mult2=-2.75055E-9
rf_tmon=-5.02913E-3
rf_agc=3.28649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.65027E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66207E0
bslens_imon=2.52757E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=2.00896E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05085E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54086E1
cs_ef1b_imon=3.16682E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02232E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04428E1
cs_ea1_imon=1.10433E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41518E0
lens1_imon=2.83293E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97337E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.33717E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84686E1
cs_ef1a_imon=3.03721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.15622E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10935E1
os_restr1_imon=4.28313E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14422E1
os_ea1_imon=2.45899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.09287E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21902E0
cs_ionrep_imon=9.47453E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93542E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01932E1
cs_anode1_imon=1.97345E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.14628E-8
tplens_vset=1.4E-1
tplens_vmon=1.67324E0
tplens_imon=-2.35941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.53184E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.56466E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98189E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=3.98295E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27055E0
ionrepsh_imon=8.63097E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33779E1
lens5b_imon=2.16432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74852E1
cs_ef2b_imon=3.13607E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43277E0
os_ea2_imon=-7.58871E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.16838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.49048E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90721E-1
os_ef2bup_imon=-5.21897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.36727E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29661E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.07503E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.0925E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69355E1
iondef4_imon=1.10624E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.70675E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.00847E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11327E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02007E2
cs_ionfocb_imon=1.47308E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56451E1
einzel_imon=7.89802E-6
window_vset=0.0E0
window_vmon=2.54848E-1
window_imon=-8.71291E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39368E-4
mask2_vset=0.0E0
mask2_vmon=-1.86305E1
mask2_imon=-7.38954E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.48587E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.5507E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.32555E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35362E0
defgridb_imon=6.1461E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.40558E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08419E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60914E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31878E1
cs_fil1_imon=6.80598E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38786E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63172E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.34146E-2
os_fil2_imon=-2.49658E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20011E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59051E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33287E-1
cs_fil2_imon=-2.20466E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.88224E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21912E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40095E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9711E-1
res40_imon=-2.4282E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.59387E-1	-7.35497E-1	-9.19428E0	-9.18992E0	4.24385E-3	9.49144E-2	2.73458E1	-3.26514E1	-3.26396E1	2.68395E1	1.20005E-7	2.51642E-3	2.51642E-3	6.32483E-3	3.01193E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-7.59268E-1	-7.35521E-1	-9.19471E0	-9.19003E0	4.48227E-3	9.48906E-2	2.73123E1	-3.26717E1	-3.26188E1	2.68238E1	1.20158E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.59506E-1	-7.35688E-1	-9.19437E0	-9.19027E0	4.29153E-3	9.52244E-2	2.73139E1	-3.26531E1	-3.26083E1	2.68274E1	1.20278E-7	2.52318E-3	2.52318E-3	6.27461E-3	2.99E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.5984E-1	-7.35545E-1	-9.19433E0	-9.19001E0	4.3869E-3	9.50098E-2	2.73428E1	-3.26874E1	-3.26057E1	2.68493E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.59768E-1	-7.35569E-1	-9.19447E0	-9.18989E0	4.57764E-3	9.48668E-2	2.73057E1	-3.26517E1	-3.26285E1	2.68406E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01104E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.59649E-1	-7.35378E-1	-9.19418E0	-9.18994E0	4.07696E-3	9.50098E-2	2.73263E1	-3.26644E1	-3.26054E1	2.68406E1	1.19819E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.59363E-1	-7.35426E-1	-9.19433E0	-9.18977E0	4.33922E-3	9.48906E-2	2.73314E1	-3.26627E1	-3.26132E1	2.68286E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.5922E-1	-7.35116E-1	-9.19437E0	-9.1898E0	4.72069E-3	9.48429E-2	2.73167E1	-3.26753E1	-3.25739E1	2.6836E1	1.20031E-7	2.52362E-3	2.52362E-3	6.34661E-3	3.01209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.58982E-1	-7.35164E-1	-9.19437E0	-9.18975E0	4.45843E-3	9.47952E-2	2.73394E1	-3.26658E1	-3.26089E1	2.68038E1	1.20092E-7	2.52553E-3	2.52553E-3	6.30212E-3	3.01862E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.58886E-1	-7.35068E-1	-9.19445E0	-9.18999E0	4.673E-3	9.48429E-2	2.73201E1	-3.26188E1	-3.26188E1	2.68358E1	1.19978E-7	2.52027E-3	2.52027E-3	6.34099E-3	3.00144E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.59077E-1	-7.35283E-1	-9.19414E0	-9.18992E0	4.93526E-3	9.48191E-2	2.73284E1	-3.2661E1	-3.26316E1	2.68264E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.59101E-1	-7.3545E-1	-9.1944E0	-9.19013E0	4.64916E-3	9.51767E-2	2.7338E1	-3.26622E1	-3.26241E1	2.68448E1	1.20077E-7	2.519E-3	2.519E-3	6.32761E-3	3.00112E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.58767E-1	-7.35736E-1	-9.19452E0	-9.18999E0	4.43459E-3	9.51052E-2	2.73097E1	-3.26414E1	-3.26243E1	2.68441E1	1.19967E-7	2.5216E-3	2.5216E-3	6.32784E-3	3.00149E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.59196E-1	-7.35521E-1	-9.19461E0	-9.18968E0	4.48227E-3	9.50336E-2	2.73401E1	-3.26553E1	-3.25783E1	2.68438E1	1.20226E-7	2.51296E-3	2.51296E-3	6.33648E-3	2.99811E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.5922E-1	-7.35354E-1	-9.1943E0	-9.18977E0	4.62532E-3	9.50575E-2	2.73153E1	-3.26538E1	-3.26538E1	2.68483E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.59268E-1	-7.35235E-1	-9.1944E0	-9.18982E0	4.43459E-3	9.5129E-2	2.73358E1	-3.26502E1	-3.2613E1	2.68551E1	1.20011E-7	2.51709E-3	2.51709E-3	6.31586E-3	2.97793E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.59268E-1	-7.35426E-1	-9.19435E0	-9.18996E0	4.76837E-3	9.52244E-2	2.73111E1	-3.2647E1	-3.2605E1	2.678E1	1.20311E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.59196E-1	-7.3514E-1	-9.19449E0	-9.18999E0	4.81606E-3	9.51529E-2	2.73225E1	-3.26938E1	-3.26393E1	2.69009E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.59244E-1	-7.35211E-1	-9.19461E0	-9.18992E0	4.48227E-3	9.50575E-2	2.73141E1	-3.26759E1	-3.26068E1	2.67812E1	1.20142E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.59125E-1	-7.35021E-1	-9.19442E0	-9.18999E0	4.64916E-3	9.51052E-2	2.73357E1	-3.26663E1	-3.26212E1	2.69355E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00041E-1