[Scan]
initial_time=2016-01-18T23:07:31
final_time=2016-01-18T23:07:51
ip_count=19
run=1024
dataset=11
scan=806
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-7.58648E-1
ql1_imon=1.44973E-8
ql2_vset=
ql2_vmon=-7.35521E-1
ql2_imon=2.04445E-9
ql3_vset=
ql3_vmon=-9.19442E0
ql3_imon=1.4902E-9
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-3.77309E-10
mult1=-1.02341E-8
mult2=-2.90824E-9
rf_tmon=-4.23604E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.7332E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19514E1
lens5a_imon=2.01155E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.15281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04682E1
cs_ea1_imon=1.10527E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.88022E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64945E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.35148E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.0328E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.15348E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.29707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.45099E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63906E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.58544E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93633E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.15104E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.52993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27011E1
iondef2_imon=1.55516E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.0426E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.51477E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41793E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06045E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.15028E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03474E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.02335E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1155E1
os_restr2_imon=3.38382E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73484E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68701E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.68665E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80973E-1
olens1_imon=7.00988E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-7.02193E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55937E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-5.97678E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-4.93163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.07278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.44913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.13767E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.40372E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60923E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31842E1
cs_fil1_imon=5.2147E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2091E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63012E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.47953E-2
os_fil2_imon=-2.24551E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4795E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.10328E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21905E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98335E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-7.59029E-1	-7.35426E-1	-9.19464E0	-9.18987E0	4.79221E-3	9.47237E-2	2.73694E1	-3.26567E1	-3.26514E1	2.6869E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.58862E-1	-7.35593E-1	-9.19471E0	-9.18963E0	4.64916E-3	9.48191E-2	2.72965E1	-3.26762E1	-3.25874E1	2.68363E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.59006E-1	-7.3545E-1	-9.1944E0	-9.18984E0	4.69685E-3	9.50098E-2	2.73346E1	-3.26573E1	-3.2604E1	2.67781E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00144E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-7.58719E-1	-7.35402E-1	-9.19452E0	-9.18953E0	4.45843E-3	9.49621E-2	2.73183E1	-3.26278E1	-3.2635E1	2.68659E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.03129E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.58862E-1	-7.35164E-1	-9.19464E0	-9.19006E0	4.60148E-3	9.48191E-2	2.73166E1	-3.26475E1	-3.26195E1	2.67974E1	1.20278E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-7.58743E-1	-7.35092E-1	-9.19471E0	-9.18989E0	4.3869E-3	9.48429E-2	2.73093E1	-3.26543E1	-3.26086E1	2.68581E1	1.20067E-7	2.52384E-3	2.52384E-3	6.33478E-3	3.00631E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.58696E-1	-7.35307E-1	-9.19476E0	-9.19006E0	4.60148E-3	9.49383E-2	2.73231E1	-3.26482E1	-3.2605E1	2.68274E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.58815E-1	-7.35712E-1	-9.19456E0	-9.1898E0	4.57764E-3	9.48429E-2	2.73129E1	-3.26524E1	-3.26254E1	2.681E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.58839E-1	-7.35521E-1	-9.19445E0	-9.18963E0	4.69685E-3	9.51052E-2	2.73231E1	-3.2629E1	-3.26104E1	2.68358E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.97704E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.58934E-1	-7.35378E-1	-9.19454E0	-9.18965E0	4.64916E-3	9.50575E-2	2.73369E1	-3.26723E1	-3.26152E1	2.68731E1	1.20278E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.58696E-1	-7.35569E-1	-9.19456E0	-9.18994E0	4.52995E-3	9.48906E-2	2.73321E1	-3.26849E1	-3.26272E1	2.6804E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.58862E-1	-7.35092E-1	-9.19461E0	-9.18999E0	5.00679E-3	9.4676E-2	2.73198E1	-3.26685E1	-3.26119E1	2.68184E1	1.20174E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.5841E-1	-7.35188E-1	-9.19468E0	-9.18999E0	4.55379E-3	9.48191E-2	2.73259E1	-3.26505E1	-3.26499E1	2.6795E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-7.58481E-1	-7.35211E-1	-9.19461E0	-9.18999E0	4.81606E-3	9.49621E-2	2.73201E1	-3.26308E1	-3.26038E1	2.68635E1	1.20031E-7	2.51915E-3	2.51915E-3	6.29067E-3	3.00144E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.58529E-1	-7.35354E-1	-9.1943E0	-9.1903E0	4.79221E-3	9.4986E-2	2.73039E1	-3.265E1	-3.26212E1	2.68148E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-7.586E-1	-7.35378E-1	-9.19452E0	-9.19018E0	4.88758E-3	9.50813E-2	2.73499E1	-3.26596E1	-3.26514E1	2.68843E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-7.58648E-1	-7.35211E-1	-9.19452E0	-9.19018E0	4.48227E-3	9.47237E-2	2.73363E1	-3.26729E1	-3.26302E1	2.68377E1	1.19941E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.00348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.58529E-1	-7.35545E-1	-9.19452E0	-9.1902E0	4.81606E-3	9.44614E-2	2.73234E1	-3.26549E1	-3.2659E1	2.67241E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02659E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.58362E-1	-7.35474E-1	-9.1944E0	-9.19001E0	4.98295E-3	9.49383E-2	2.73309E1	-3.265E1	-3.26326E1	2.6843E1	1.19705E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.58648E-1	-7.35521E-1	-9.19442E0	-9.19006E0	4.79221E-3	9.52721E-2	2.73484E1	-3.27011E1	-3.26224E1	2.68701E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1