[Scan]
initial_time=2016-01-18T23:07:58
final_time=2016-01-18T23:08:17
ip_count=19
run=1024
dataset=11
scan=807
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-7.5841E-1
ql1_imon=1.44781E-8
ql2_vset=
ql2_vmon=-7.35283E-1
ql2_imon=2.01991E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=1.2435E-9
ql4_vset=
ql4_vmon=-9.18982E0
ql4_imon=-3.04842E-10
mult1=-9.95712E-9
mult2=-2.75254E-9
rf_tmon=-4.1339E-3
rf_agc=3.44751E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68207E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69978E0
bslens_imon=2.76486E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=2.01479E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.15713E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04213E1
cs_ea1_imon=1.10094E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41101E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.35509E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.03244E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.1559E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.27941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=2.45027E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=9.54218E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01479E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.15006E-8
tplens_vset=1.4E-1
tplens_vmon=1.67748E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.02803E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=8.59047E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3987E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06043E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3046E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.38454E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.0727E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.67783E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.01129E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-6.84173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.20617E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.69931E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.40276E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08032E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60919E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31854E1
cs_fil1_imon=5.89946E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0044E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62862E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.31187E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5027E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-1.74696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.86302E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21818E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.49081E-1
res40_imon=-2.25911E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.58934E-1	-7.35378E-1	-9.19461E0	-9.18992E0	4.8399E-3	9.51767E-2	2.72895E1	-3.26506E1	-3.2608E1	2.68322E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09348E0	-7.59029E-1	-7.35378E-1	-9.19459E0	-9.18996E0	4.86374E-3	9.51052E-2	2.73786E1	-3.26658E1	-3.26291E1	2.68274E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.58839E-1	-7.35354E-1	-9.19445E0	-9.18963E0	5.07832E-3	9.51767E-2	2.7337E1	-3.26662E1	-3.26139E1	2.68261E1	1.19554E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.58839E-1	-7.35188E-1	-9.1944E0	-9.1898E0	4.91142E-3	9.52482E-2	2.73045E1	-3.26814E1	-3.26152E1	2.68737E1	1.19908E-7	2.52525E-3	2.52525E-3	6.29738E-3	3.0101E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-7.59029E-1	-7.35164E-1	-9.19428E0	-9.18994E0	4.98295E-3	9.48668E-2	2.72883E1	-3.26783E1	-3.2614E1	2.68028E1	1.20116E-7	2.51642E-3	2.51642E-3	6.32483E-3	3.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.58862E-1	-7.35116E-1	-9.19437E0	-9.18989E0	4.88758E-3	9.50813E-2	2.73057E1	-3.26585E1	-3.25996E1	2.68358E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-7.58743E-1	-7.35092E-1	-9.19459E0	-9.19001E0	5.05447E-3	9.50813E-2	2.72951E1	-3.26602E1	-3.26213E1	2.6837E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.58576E-1	-7.35164E-1	-9.19487E0	-9.18999E0	5.07832E-3	9.51529E-2	2.7291E1	-3.2675E1	-3.26297E1	2.67812E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.58576E-1	-7.35116E-1	-9.19456E0	-9.18992E0	5.45979E-3	9.49144E-2	2.73105E1	-3.26711E1	-3.2629E1	2.68136E1	1.19766E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99879E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.586E-1	-7.35307E-1	-9.1949E0	-9.18963E0	5.17368E-3	9.50575E-2	2.73198E1	-3.26815E1	-3.26071E1	2.68569E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98222E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-7.58648E-1	-7.35283E-1	-9.19483E0	-9.18965E0	5.05447E-3	9.49383E-2	2.73405E1	-3.26458E1	-3.26146E1	2.68142E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.58815E-1	-7.35378E-1	-9.19454E0	-9.18984E0	5.00679E-3	9.50098E-2	2.73165E1	-3.26585E1	-3.26404E1	2.68262E1	1.20174E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.59029E-1	-7.35307E-1	-9.19464E0	-9.18992E0	4.88758E-3	9.47952E-2	2.73658E1	-3.26711E1	-3.26374E1	2.68478E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.58791E-1	-7.35402E-1	-9.19459E0	-9.18982E0	4.72069E-3	9.4676E-2	2.7337E1	-3.26526E1	-3.26095E1	2.68279E1	1.20311E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.586E-1	-7.35259E-1	-9.19461E0	-9.18984E0	4.86374E-3	9.49144E-2	2.73165E1	-3.26543E1	-3.26332E1	2.68262E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.58362E-1	-7.35402E-1	-9.19437E0	-9.19011E0	4.64916E-3	9.50336E-2	2.73063E1	-3.26873E1	-3.2644E1	2.68376E1	1.20158E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.02511E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-7.58553E-1	-7.35283E-1	-9.19449E0	-9.18987E0	4.81606E-3	9.49383E-2	2.73316E1	-3.26933E1	-3.26667E1	2.68358E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00676E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-7.58052E-1	-7.35259E-1	-9.19447E0	-9.18965E0	4.76837E-3	9.51052E-2	2.72961E1	-3.26681E1	-3.2632E1	2.6849E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99941E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.58123E-1	-7.35545E-1	-9.19447E0	-9.18992E0	4.76837E-3	9.50575E-2	2.73169E1	-3.2629E1	-3.26467E1	2.68377E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.5841E-1	-7.35283E-1	-9.19473E0	-9.18982E0	4.673E-3	9.50575E-2	2.73411E1	-3.26675E1	-3.262E1	2.68334E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1