[Scan]
initial_time=2016-01-18T23:08:51
final_time=2016-01-18T23:09:10
ip_count=19
run=1024
dataset=11
scan=809
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-7.58052E-1
ql1_imon=1.43881E-8
ql2_vset=
ql2_vmon=-7.35545E-1
ql2_imon=2.01907E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=9.92024E-10
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-2.87569E-10
mult1=-9.17448E-9
mult2=-2.69466E-9
rf_tmon=-4.03176E-3
rf_agc=3.40906E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.71235E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=2.00775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.15941E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=1.10343E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39203E0
lens1_imon=2.44769E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64892E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.35862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=3.03708E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.15454E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11257E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.44097E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=9.43449E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.9354E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01717E1
cs_anode1_imon=1.96705E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.14873E-8
tplens_vset=1.4E-1
tplens_vmon=1.6957E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.00858E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32879E0
ionrepsh_imon=8.76554E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.16065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42966E0
os_ea2_imon=-8.54574E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71339E1
cs_ef2a_imon=3.17262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.36607E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.111E1
os_restr2_imon=3.38217E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.08347E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.10803E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68157E1
iondef4_imon=1.11179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.68494E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.01546E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-7.91778E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47438E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=2.38537E-1
window_imon=-6.80569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86275E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.87195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=6.97814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=5.9871E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.40567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07758E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60949E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31847E1
cs_fil1_imon=6.80667E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.84752E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63062E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35759E-2
os_fil2_imon=-2.40275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10349E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50087E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-1.92201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.66909E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32766E-1
res40_imon=-2.43557E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.581E-1	-7.35331E-1	-9.19476E0	-9.18987E0	4.29153E-3	9.50575E-2	2.73411E1	-3.26614E1	-3.26396E1	2.67349E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.58171E-1	-7.35593E-1	-9.19459E0	-9.19006E0	4.72069E-3	9.50098E-2	2.73547E1	-3.26407E1	-3.26444E1	2.68436E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.58338E-1	-7.35092E-1	-9.19437E0	-9.1902E0	4.57764E-3	9.50336E-2	2.73431E1	-3.26596E1	-3.26266E1	2.68088E1	1.19925E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.98026E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-7.58505E-1	-7.35188E-1	-9.19456E0	-9.19011E0	4.673E-3	9.47475E-2	2.73269E1	-3.26691E1	-3.26223E1	2.68419E1	1.2021E-7	2.52466E-3	2.52466E-3	6.3074E-3	2.99179E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.58386E-1	-7.35879E-1	-9.19449E0	-9.18989E0	4.48227E-3	9.47714E-2	2.73201E1	-3.2653E1	-3.2599E1	2.67836E1	1.19872E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.0201E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-7.58481E-1	-7.3545E-1	-9.1948E0	-9.18963E0	4.72069E-3	9.51767E-2	2.73219E1	-3.26374E1	-3.25978E1	2.68178E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-7.5829E-1	-7.3545E-1	-9.19452E0	-9.18972E0	4.72069E-3	9.50575E-2	2.73039E1	-3.26526E1	-3.25859E1	2.68376E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.58219E-1	-7.35378E-1	-9.19449E0	-9.1897E0	4.50611E-3	9.50336E-2	2.72865E1	-3.26651E1	-3.26134E1	2.68118E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.58386E-1	-7.35521E-1	-9.19425E0	-9.18989E0	4.55379E-3	9.49383E-2	2.73279E1	-3.26825E1	-3.26248E1	2.68316E1	1.20435E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-7.58481E-1	-7.3545E-1	-9.19478E0	-9.18982E0	4.64916E-3	9.51529E-2	2.7349E1	-3.26476E1	-3.2626E1	2.6801E1	1.20278E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.9874E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.58386E-1	-7.35712E-1	-9.19437E0	-9.18972E0	4.48227E-3	9.48906E-2	2.73339E1	-3.26416E1	-3.2623E1	2.6834E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.58028E-1	-7.35521E-1	-9.19476E0	-9.19001E0	4.91142E-3	9.49144E-2	2.73399E1	-3.26591E1	-3.2617E1	2.68208E1	1.20244E-7	2.51136E-3	2.51136E-3	6.31299E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-7.57837E-1	-7.35617E-1	-9.19468E0	-9.18972E0	4.41074E-3	9.49383E-2	2.73351E1	-3.2653E1	-3.26044E1	2.6852E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.57933E-1	-7.35807E-1	-9.19471E0	-9.18972E0	4.72069E-3	9.50098E-2	2.73243E1	-3.2653E1	-3.26506E1	2.67812E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-7.58028E-1	-7.35283E-1	-9.19471E0	-9.18961E0	4.95911E-3	9.49621E-2	2.73279E1	-3.26921E1	-3.26188E1	2.6855E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-7.58076E-1	-7.35402E-1	-9.19492E0	-9.18989E0	4.86374E-3	9.52005E-2	2.73339E1	-3.265E1	-3.26224E1	2.68322E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-7.58052E-1	-7.35497E-1	-9.19464E0	-9.18994E0	4.8399E-3	9.50813E-2	2.73153E1	-3.27149E1	-3.26308E1	2.68557E1	1.19851E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-7.5767E-1	-7.35402E-1	-9.19456E0	-9.18992E0	4.98295E-3	9.48906E-2	2.73178E1	-3.26503E1	-3.26498E1	2.68599E1	1.19653E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-7.581E-1	-7.35474E-1	-9.19456E0	-9.18996E0	4.69685E-3	9.50336E-2	2.73273E1	-3.26549E1	-3.26272E1	2.68163E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.58052E-1	-7.35545E-1	-9.19445E0	-9.19006E0	4.50611E-3	9.49621E-2	2.73351E1	-3.26482E1	-3.26452E1	2.68157E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1