[Scan]
initial_time=2016-01-18T23:09:18
final_time=2016-01-18T23:09:37
ip_count=19
run=1024
dataset=11
scan=810
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-7.57933E-1
ql1_imon=1.43808E-8
ql2_vset=
ql2_vmon=-7.35378E-1
ql2_imon=2.03452E-9
ql3_vset=
ql3_vmon=-9.1948E0
ql3_imon=9.08375E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-3.07012E-10
mult1=-1.03785E-8
mult2=-2.8803E-9
rf_tmon=-4.48839E-3
rf_agc=3.38803E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.69697E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=2.00759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.15533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02399E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04543E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38638E0
lens1_imon=2.88743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.3349E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.03712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.15305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.45965E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=9.36193E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.14093E-8
tplens_vset=1.4E-1
tplens_vmon=1.67808E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.52704E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.55624E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.01344E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=8.50756E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41312E0
os_ea2_imon=-9.37423E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00716E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.05578E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.28558E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.7007E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=6.99975E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-7.34629E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-6.58946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.83703E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.4084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0802E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61067E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31855E1
cs_fil1_imon=5.23272E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.28719E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63099E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35056E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.83415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70084E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21815E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-7.57957E-1	-7.35426E-1	-9.19433E0	-9.19025E0	4.60148E-3	9.49144E-2	2.73104E1	-3.26885E1	-3.26301E1	2.68148E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.58219E-1	-7.35116E-1	-9.1943E0	-9.1898E0	4.36306E-3	9.50575E-2	2.73021E1	-3.26482E1	-3.2644E1	2.68611E1	1.19902E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-7.57957E-1	-7.35116E-1	-9.19449E0	-9.19013E0	4.69685E-3	9.5129E-2	2.73075E1	-3.26661E1	-3.26425E1	2.68186E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.98481E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.57909E-1	-7.35188E-1	-9.19449E0	-9.19027E0	4.74453E-3	9.47952E-2	2.7297E1	-3.26822E1	-3.25999E1	2.68366E1	1.20092E-7	2.52236E-3	2.52236E-3	6.32858E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.57933E-1	-7.34997E-1	-9.19454E0	-9.19025E0	4.88758E-3	9.49144E-2	2.73334E1	-3.26826E1	-3.26242E1	2.68111E1	1.19841E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.98842E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.57885E-1	-7.35354E-1	-9.19433E0	-9.19032E0	4.64916E-3	9.49383E-2	2.73075E1	-3.26518E1	-3.26278E1	2.68612E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.58076E-1	-7.35188E-1	-9.19447E0	-9.19008E0	4.57764E-3	9.51052E-2	2.72913E1	-3.26783E1	-3.26014E1	2.68202E1	1.20017E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.58219E-1	-7.35116E-1	-9.19456E0	-9.1902E0	4.81606E-3	9.4986E-2	2.72702E1	-3.26506E1	-3.25978E1	2.68146E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.02511E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.58028E-1	-7.35235E-1	-9.19442E0	-9.1902E0	4.52995E-3	9.50575E-2	2.73153E1	-3.26659E1	-3.26101E1	2.68134E1	1.19601E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.58028E-1	-7.35569E-1	-9.19447E0	-9.19039E0	4.74453E-3	9.51529E-2	2.73457E1	-3.26765E1	-3.26004E1	2.68338E1	1.1988E-7	2.51679E-3	2.51679E-3	6.323E-3	3.00247E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.58314E-1	-7.35474E-1	-9.19456E0	-9.19018E0	4.24385E-3	9.51529E-2	2.72997E1	-3.26771E1	-3.26452E1	2.68316E1	1.19937E-7	2.51725E-3	2.51725E-3	6.3131E-3	3.00251E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.5798E-1	-7.35521E-1	-9.19459E0	-9.19013E0	4.31538E-3	9.52244E-2	2.73393E1	-3.2641E1	-3.26068E1	2.68508E1	1.19978E-7	2.52585E-3	2.52585E-3	6.33538E-3	2.98819E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-7.57837E-1	-7.3545E-1	-9.19461E0	-9.19039E0	4.45843E-3	9.4986E-2	2.72973E1	-3.26104E1	-3.2623E1	2.68382E1	1.20122E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-7.57766E-1	-7.35497E-1	-9.19456E0	-9.18994E0	4.3869E-3	9.48668E-2	2.73021E1	-3.26714E1	-3.25894E1	2.68424E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.57909E-1	-7.35307E-1	-9.19471E0	-9.18987E0	4.48227E-3	9.52244E-2	2.73099E1	-3.26831E1	-3.26284E1	2.68472E1	1.19595E-7	2.52599E-3	2.52599E-3	6.32896E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.581E-1	-7.34997E-1	-9.19468E0	-9.18975E0	4.45843E-3	9.50575E-2	2.73411E1	-3.26419E1	-3.26413E1	2.68493E1	1.1966E-7	2.50914E-3	2.50914E-3	6.32978E-3	3.00942E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.58123E-1	-7.35164E-1	-9.19473E0	-9.19013E0	4.48227E-3	9.53197E-2	2.73189E1	-3.26512E1	-3.26152E1	2.68304E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.58123E-1	-7.35354E-1	-9.19473E0	-9.1902E0	4.00543E-3	9.49383E-2	2.72949E1	-3.26633E1	-3.26086E1	2.68316E1	1.198E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9841E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.57837E-1	-7.35307E-1	-9.19466E0	-9.18999E0	3.95775E-3	9.50813E-2	2.73063E1	-3.26897E1	-3.26319E1	2.67978E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.97445E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.57933E-1	-7.35378E-1	-9.1948E0	-9.18987E0	4.22001E-3	9.47952E-2	2.73261E1	-3.26681E1	-3.25948E1	2.68388E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1