[Scan]
initial_time=2016-01-18T23:09:44
final_time=2016-01-18T23:10:04
ip_count=19
run=1024
dataset=11
scan=811
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-7.5779E-1
ql1_imon=1.4356E-8
ql2_vset=
ql2_vmon=-7.35641E-1
ql2_imon=2.03069E-9
ql3_vset=
ql3_vmon=-9.19447E0
ql3_imon=8.28922E-10
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-2.8739E-10
mult1=-9.68019E-9
mult2=-2.87031E-9
rf_tmon=-4.47037E-3
rf_agc=3.40666E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.69507E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54032E1
cs_ef1b_imon=3.15524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04604E1
cs_ea1_imon=1.0739E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43625E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64857E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.33454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.05446E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.15755E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11697E1
os_restr1_imon=4.2767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.43766E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63438E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19983E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93708E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=1.97887E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.14682E-8
tplens_vset=1.4E-1
tplens_vmon=1.66967E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25809E1
iondef3_imon=1.50974E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.97989E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.02254E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=8.43906E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41372E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.17262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=3.3787E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.08347E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.11075E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.65715E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.02781E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1423E0
cs_ionaccel_imon=-9.93342E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47459E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56625E1
einzel_imon=7.75039E-6
window_vset=0.0E0
window_vmon=2.69815E-1
window_imon=-8.40431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39317E-4
mask2_vset=0.0E0
mask2_vmon=-1.8661E1
mask2_imon=-4.54678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65721E0
defgridb_imon=6.47797E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.40567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07984E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60968E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=7.83187E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00676E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63052E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.46664E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03399E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56715E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50112E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21686E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=225
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.57742E-1	-7.35354E-1	-9.19442E0	-9.18987E0	4.41074E-3	9.48191E-2	2.72957E1	-3.26437E1	-3.26231E1	2.68172E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0071E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-7.58171E-1	-7.35307E-1	-9.19461E0	-9.19034E0	4.76837E-3	9.48668E-2	2.73015E1	-3.26813E1	-3.25918E1	2.68334E1	1.19991E-7	2.52373E-3	2.52373E-3	6.32112E-3	3.01216E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.57885E-1	-7.34997E-1	-9.19476E0	-9.19015E0	4.64916E-3	9.52721E-2	2.73357E1	-3.26783E1	-3.262E1	2.68322E1					
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-7.58052E-1	-7.35283E-1	-9.1948E0	-9.19006E0	4.57764E-3	9.51052E-2	2.73273E1	-3.26744E1	-3.26311E1	2.68373E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.58195E-1	-7.35593E-1	-9.19464E0	-9.18989E0	4.88758E-3	9.50098E-2	2.73171E1	-3.26621E1	-3.26092E1	2.683E1	1.20127E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.01485E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-7.58004E-1	-7.35068E-1	-9.19454E0	-9.19011E0	4.72069E-3	9.50813E-2	2.73285E1	-3.26404E1	-3.26404E1	2.68298E1	1.19872E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.5829E-1	-7.35116E-1	-9.19433E0	-9.19001E0	4.93526E-3	9.47952E-2	2.73159E1	-3.26597E1	-3.26176E1	2.68448E1	1.19953E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-7.5829E-1	-7.35807E-1	-9.19483E0	-9.18987E0	4.81606E-3	9.50813E-2	2.72862E1	-3.26502E1	-3.26508E1	2.68366E1	1.20244E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.01209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-7.58076E-1	-7.35521E-1	-9.19471E0	-9.1898E0	4.673E-3	9.50336E-2	2.72913E1	-3.26543E1	-3.2584E1	2.68671E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.57957E-1	-7.35283E-1	-9.19445E0	-9.1898E0	4.673E-3	9.50575E-2	2.73061E1	-3.26536E1	-3.26095E1	2.68092E1	1.19913E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.57885E-1	-7.35068E-1	-9.19468E0	-9.19003E0	4.88758E-3	9.47952E-2	2.73123E1	-3.26705E1	-3.2602E1	2.68464E1	1.19661E-7	2.51411E-3	2.51411E-3	6.32047E-3	3.02234E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-7.57933E-1	-7.35283E-1	-9.19473E0	-9.18999E0	4.81606E-3	9.47714E-2	2.73092E1	-3.2675E1	-3.25912E1	2.68292E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.5798E-1	-7.35354E-1	-9.19476E0	-9.18996E0	4.93526E-3	9.48191E-2	2.73381E1	-3.26272E1	-3.26609E1	2.68112E1	1.19809E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97445E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-7.58004E-1	-7.35497E-1	-9.19478E0	-9.18994E0	4.52995E-3	9.50575E-2	2.73454E1	-3.26645E1	-3.2617E1	2.684E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.96671E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.58147E-1	-7.35688E-1	-9.19454E0	-9.18989E0	4.57764E-3	9.52721E-2	2.73051E1	-3.26723E1	-3.26188E1	2.68346E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97445E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.57766E-1	-7.35641E-1	-9.19445E0	-9.18994E0	4.57764E-3	9.48191E-2	2.73252E1	-3.26738E1	-3.26266E1	2.6792E1	1.19749E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9841E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.5798E-1	-7.35474E-1	-9.19445E0	-9.19003E0	4.74453E-3	9.50575E-2	2.73297E1	-3.26675E1	-3.26014E1	2.68719E1	1.19861E-7	2.50898E-3	2.50898E-3	6.31288E-3	2.9926E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.5798E-1	-7.35426E-1	-9.19447E0	-9.19008E0	4.74453E-3	9.50336E-2	2.73034E1	-3.26698E1	-3.26232E1	2.68219E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.581E-1	-7.35497E-1	-9.19464E0	-9.18996E0	4.31538E-3	9.48906E-2	2.73411E1	-3.26807E1	-3.26603E1	2.68358E1	1.19979E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.01485E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.5779E-1	-7.35641E-1	-9.19447E0	-9.19003E0	4.52995E-3	9.50098E-2	2.73273E1	-3.26554E1	-3.25809E1	2.68388E1	1.20174E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9926E-1