[Scan]
initial_time=2016-01-18T23:10:11
final_time=2016-01-18T23:10:30
ip_count=19
run=1024
dataset=11
scan=812
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-7.57837E-1
ql1_imon=1.43306E-8
ql2_vset=
ql2_vmon=-7.35378E-1
ql2_imon=2.03298E-9
ql3_vset=
ql3_vmon=-9.19487E0
ql3_imon=6.48332E-10
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-3.16977E-10
mult1=-9.81263E-9
mult2=-2.79013E-9
rf_tmon=-4.51802E-3
rf_agc=3.35093E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.66641E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19476E1
lens5a_imon=2.00386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.1683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04493E1
cs_ea1_imon=1.08396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.34942E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.15673E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.46186E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=9.56191E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93767E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.15248E-8
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26523E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26814E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.02956E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=8.48946E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45325E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00732E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.38094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.07919E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73347E1
iondef1_imon=1.12113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68507E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.58893E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.02814E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.78788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.696E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=8.00811E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51186E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.40336E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.079E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61026E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31844E1
cs_fil1_imon=7.62936E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80375E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63252E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.40825E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52365E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24764E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-7.5767E-1	-7.35259E-1	-9.19456E0	-9.1898E0	4.57764E-3	9.48906E-2	2.73311E1	-3.26425E1	-3.25906E1	2.6847E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.57599E-1	-7.35641E-1	-9.19442E0	-9.19003E0	4.45843E-3	9.50336E-2	2.73412E1	-3.26542E1	-3.26278E1	2.68806E1	1.19941E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-7.57527E-1	-7.35569E-1	-9.19452E0	-9.19003E0	4.3869E-3	9.50813E-2	2.73364E1	-3.26767E1	-3.26183E1	2.6854E1	1.20137E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.97236E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.57647E-1	-7.35211E-1	-9.19449E0	-9.18992E0	4.52995E-3	9.47952E-2	2.73087E1	-3.26813E1	-3.25767E1	2.68196E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.5767E-1	-7.35283E-1	-9.19452E0	-9.1898E0	4.43459E-3	9.48906E-2	2.73141E1	-3.26254E1	-3.26206E1	2.68004E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-7.57623E-1	-7.35402E-1	-9.19459E0	-9.18984E0	4.60148E-3	9.49383E-2	2.73033E1	-3.26621E1	-3.26308E1	2.68785E1	1.19601E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0934E0	-7.5736E-1	-7.35521E-1	-9.19459E0	-9.18982E0	4.673E-3	9.51052E-2	2.73488E1	-3.2672E1	-3.26024E1	2.68154E1	1.19653E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09279E0	-7.5779E-1	-7.35617E-1	-9.19433E0	-9.19008E0	4.29153E-3	9.45807E-2	2.73081E1	-3.26843E1	-3.25972E1	2.68028E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.57694E-1	-7.35307E-1	-9.19452E0	-9.19023E0	4.36306E-3	9.46999E-2	2.73423E1	-3.26585E1	-3.26272E1	2.68036E1	1.20106E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.57837E-1	-7.3545E-1	-9.19449E0	-9.18999E0	4.55379E-3	9.47714E-2	2.73163E1	-3.26549E1	-3.26372E1	2.68448E1	1.19646E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.57837E-1	-7.35474E-1	-9.19485E0	-9.18972E0	4.57764E-3	9.47475E-2	2.73141E1	-3.26476E1	-3.26158E1	2.67938E1	1.19705E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-7.57933E-1	-7.35044E-1	-9.19502E0	-9.18994E0	4.673E-3	9.46999E-2	2.73009E1	-3.26663E1	-3.26122E1	2.68484E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-7.57575E-1	-7.35331E-1	-9.19499E0	-9.18989E0	4.57764E-3	9.46999E-2	2.73087E1	-3.26753E1	-3.26134E1	2.68516E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0148E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.57742E-1	-7.35378E-1	-9.19507E0	-9.19003E0	4.69685E-3	9.45091E-2	2.73269E1	-3.26396E1	-3.26189E1	2.68064E1	1.19757E-7	2.52209E-3	2.52209E-3	6.27461E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.57813E-1	-7.35164E-1	-9.19478E0	-9.18984E0	4.64916E-3	9.46522E-2	2.73357E1	-3.26777E1	-3.2626E1	2.68412E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-7.57861E-1	-7.35164E-1	-9.19459E0	-9.18984E0	4.673E-3	9.45568E-2	2.73177E1	-3.26609E1	-3.26488E1	2.68304E1	1.20055E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.9943E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.5798E-1	-7.35402E-1	-9.19466E0	-9.18968E0	4.55379E-3	9.50575E-2	2.73219E1	-3.26585E1	-3.26338E1	2.68118E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.58052E-1	-7.35474E-1	-9.1948E0	-9.19015E0	4.64916E-3	9.50098E-2	2.73246E1	-3.26809E1	-3.26585E1	2.68448E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.58076E-1	-7.35211E-1	-9.19478E0	-9.18975E0	4.88758E-3	9.47714E-2	2.73316E1	-3.26644E1	-3.26602E1	2.67821E1	1.20158E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.57837E-1	-7.35378E-1	-9.19487E0	-9.18992E0	4.76837E-3	9.49383E-2	2.73347E1	-3.26814E1	-3.26523E1	2.68507E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.98665E-1